8/29/2011	1:04:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	1:04:39 AM	Recipe started at 1:04 AM
8/29/2011	1:04:39 AM	Helium valve closed
8/29/2011	1:04:39 AM	H2 valve closed
8/29/2011	1:04:39 AM	BCl3 valve closed
8/29/2011	1:04:39 AM	PH3 valve closed
8/29/2011	1:04:39 AM	SiCl4 pre valve closed
8/29/2011	1:04:39 AM	SiCl4 post valve closed
8/29/2011	1:04:39 AM	Main Vac valve closed
8/29/2011	1:04:39 AM	Bypass valve closed
8/29/2011	1:04:39 AM	Bubbler valve closed
8/29/2011	1:04:39 AM	Helium MFC set to  0.000000
8/29/2011	1:04:39 AM	H2 MFC set to  0.000000
8/29/2011	1:04:39 AM	BCl3 MFC set to  0.000000
8/29/2011	1:04:39 AM	PHl3 MFC set to  0.000000
8/29/2011	1:04:39 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:04:39 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:04:39 AM	Tube furnace set to 0
8/29/2011	1:04:42 AM	H2 valve closed
8/29/2011	1:04:42 AM	BCl3 valve closed
8/29/2011	1:04:42 AM	PH3 valve closed
8/29/2011	1:04:42 AM	SiCl4 pre valve closed
8/29/2011	1:04:42 AM	SiCl4 post valve closed
8/29/2011	1:04:42 AM	Main Vac valve closed
8/29/2011	1:04:42 AM	Bypass valve closed
8/29/2011	1:04:42 AM	Bubbler valve closed
8/29/2011	1:04:42 AM	Helium valve opened
8/29/2011	1:04:42 AM	Helium MFC set to  500.000000
8/29/2011	1:04:42 AM	H2 MFC set to  0.000000
8/29/2011	1:04:42 AM	BCl3 MFC set to  0.000000
8/29/2011	1:04:42 AM	PHl3 MFC set to  0.000000
8/29/2011	1:04:42 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:04:42 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:04:42 AM	Tube furnace set to 0
8/29/2011	1:05:45 AM	Helium valve closed
8/29/2011	1:05:45 AM	H2 valve closed
8/29/2011	1:05:45 AM	BCl3 valve closed
8/29/2011	1:05:45 AM	PH3 valve closed
8/29/2011	1:05:45 AM	SiCl4 pre valve closed
8/29/2011	1:05:45 AM	SiCl4 post valve closed
8/29/2011	1:05:45 AM	Main Vac valve closed
8/29/2011	1:05:45 AM	Bypass valve closed
8/29/2011	1:05:45 AM	Bubbler valve closed
8/29/2011	1:05:45 AM	Helium MFC set to  0.000000
8/29/2011	1:05:45 AM	H2 MFC set to  0.000000
8/29/2011	1:05:45 AM	BCl3 MFC set to  0.000000
8/29/2011	1:05:45 AM	PHl3 MFC set to  0.000000
8/29/2011	1:05:45 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:05:45 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:05:45 AM	Tube furnace set to 0
8/29/2011	1:05:46 AM	Run finished at 1:05 AM
8/29/2011	1:05:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	1:06:50 AM	Helium MFC set to  20.000000
8/29/2011	1:06:54 AM	Helium valve opened
8/29/2011	1:07:11 AM	Helium MFC set to  100.000000
8/29/2011	1:07:23 AM	Bubbler valve opened
8/29/2011	1:12:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	1:12:36 AM	Recipe started at 1:12 AM
8/29/2011	1:12:36 AM	Helium valve closed
8/29/2011	1:12:36 AM	H2 valve closed
8/29/2011	1:12:36 AM	BCl3 valve closed
8/29/2011	1:12:36 AM	PH3 valve closed
8/29/2011	1:12:36 AM	SiCl4 pre valve closed
8/29/2011	1:12:36 AM	SiCl4 post valve closed
8/29/2011	1:12:36 AM	Main Vac valve closed
8/29/2011	1:12:36 AM	Bubbler valve closed
8/29/2011	1:12:36 AM	Bypass valve opened
8/29/2011	1:12:36 AM	Helium MFC set to  0.000000
8/29/2011	1:12:36 AM	H2 MFC set to  0.000000
8/29/2011	1:12:36 AM	BCl3 MFC set to  0.000000
8/29/2011	1:12:36 AM	PHl3 MFC set to  0.000000
8/29/2011	1:12:36 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:12:36 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:12:36 AM	Tube furnace set to 0
8/29/2011	1:13:40 AM	Helium valve closed
8/29/2011	1:13:40 AM	H2 valve closed
8/29/2011	1:13:40 AM	BCl3 valve closed
8/29/2011	1:13:40 AM	PH3 valve closed
8/29/2011	1:13:40 AM	SiCl4 pre valve closed
8/29/2011	1:13:40 AM	SiCl4 post valve closed
8/29/2011	1:13:40 AM	Main Vac valve closed
8/29/2011	1:13:40 AM	Bubbler valve closed
8/29/2011	1:13:40 AM	Bypass valve opened
8/29/2011	1:13:40 AM	Helium MFC set to  0.000000
8/29/2011	1:13:40 AM	H2 MFC set to  0.000000
8/29/2011	1:13:40 AM	BCl3 MFC set to  0.000000
8/29/2011	1:13:40 AM	PHl3 MFC set to  0.000000
8/29/2011	1:13:40 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:13:41 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:13:41 AM	Tube furnace set to 0
8/29/2011	1:14:41 AM	Helium valve closed
8/29/2011	1:14:41 AM	H2 valve closed
8/29/2011	1:14:41 AM	BCl3 valve closed
8/29/2011	1:14:41 AM	PH3 valve closed
8/29/2011	1:14:41 AM	SiCl4 pre valve closed
8/29/2011	1:14:41 AM	SiCl4 post valve closed
8/29/2011	1:14:41 AM	Bypass valve closed
8/29/2011	1:14:41 AM	Bubbler valve closed
8/29/2011	1:14:41 AM	Main Vac valve opened
8/29/2011	1:14:41 AM	Helium MFC set to  0.000000
8/29/2011	1:14:41 AM	H2 MFC set to  0.000000
8/29/2011	1:14:41 AM	BCl3 MFC set to  0.000000
8/29/2011	1:14:41 AM	PHl3 MFC set to  0.000000
8/29/2011	1:14:41 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:14:41 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:14:41 AM	Tube furnace set to 0
8/29/2011	1:14:42 AM	Run finished at 1:14 AM
8/29/2011	1:14:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	1:22:55 AM	Tube furnace set to 120
8/29/2011	1:23:12 AM	Tube furnace set to 150
8/29/2011	1:40:45 AM	Main Vac valve closed
8/29/2011	1:40:51 AM	Main Vac valve opened
8/29/2011	1:45:53 AM	Main Vac valve closed
8/29/2011	1:46:00 AM	Main Vac valve opened
8/29/2011	1:46:43 AM	Recipe started at 1:46 AM
8/29/2011	1:46:43 AM	Helium valve closed
8/29/2011	1:46:43 AM	H2 valve closed
8/29/2011	1:46:43 AM	BCl3 valve closed
8/29/2011	1:46:43 AM	PH3 valve closed
8/29/2011	1:46:43 AM	SiCl4 pre valve closed
8/29/2011	1:46:43 AM	SiCl4 post valve closed
8/29/2011	1:46:43 AM	Bypass valve closed
8/29/2011	1:46:43 AM	Bubbler valve closed
8/29/2011	1:46:43 AM	Main Vac valve opened
8/29/2011	1:46:43 AM	Helium MFC set to  0.000000
8/29/2011	1:46:43 AM	H2 MFC set to  0.000000
8/29/2011	1:46:43 AM	BCl3 MFC set to  0.000000
8/29/2011	1:46:43 AM	PHl3 MFC set to  0.000000
8/29/2011	1:46:43 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:46:43 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:46:43 AM	Tube furnace set to 0
8/29/2011	1:47:13 AM	H2 valve closed
8/29/2011	1:47:13 AM	BCl3 valve closed
8/29/2011	1:47:13 AM	PH3 valve closed
8/29/2011	1:47:13 AM	SiCl4 pre valve closed
8/29/2011	1:47:13 AM	SiCl4 post valve closed
8/29/2011	1:47:13 AM	Bypass valve closed
8/29/2011	1:47:13 AM	Bubbler valve closed
8/29/2011	1:47:13 AM	Helium valve opened
8/29/2011	1:47:13 AM	Main Vac valve opened
8/29/2011	1:47:13 AM	Helium MFC set to  20.000000
8/29/2011	1:47:13 AM	H2 MFC set to  0.000000
8/29/2011	1:47:13 AM	BCl3 MFC set to  0.000000
8/29/2011	1:47:13 AM	PHl3 MFC set to  0.000000
8/29/2011	1:47:13 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:47:13 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:47:13 AM	Tube furnace set to 0
8/29/2011	1:47:43 AM	Helium valve closed
8/29/2011	1:47:43 AM	H2 valve closed
8/29/2011	1:47:43 AM	BCl3 valve closed
8/29/2011	1:47:43 AM	PH3 valve closed
8/29/2011	1:47:43 AM	SiCl4 pre valve closed
8/29/2011	1:47:43 AM	SiCl4 post valve closed
8/29/2011	1:47:43 AM	Bypass valve closed
8/29/2011	1:47:43 AM	Bubbler valve closed
8/29/2011	1:47:43 AM	Main Vac valve opened
8/29/2011	1:47:43 AM	Helium MFC set to  0.000000
8/29/2011	1:47:43 AM	H2 MFC set to  0.000000
8/29/2011	1:47:43 AM	BCl3 MFC set to  0.000000
8/29/2011	1:47:43 AM	PHl3 MFC set to  0.000000
8/29/2011	1:47:43 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:47:43 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:47:43 AM	Tube furnace set to 0
8/29/2011	1:48:13 AM	H2 valve closed
8/29/2011	1:48:13 AM	BCl3 valve closed
8/29/2011	1:48:13 AM	PH3 valve closed
8/29/2011	1:48:13 AM	SiCl4 pre valve closed
8/29/2011	1:48:13 AM	SiCl4 post valve closed
8/29/2011	1:48:13 AM	Bypass valve closed
8/29/2011	1:48:13 AM	Bubbler valve closed
8/29/2011	1:48:13 AM	Helium valve opened
8/29/2011	1:48:13 AM	Main Vac valve opened
8/29/2011	1:48:13 AM	Helium MFC set to  20.000000
8/29/2011	1:48:13 AM	H2 MFC set to  0.000000
8/29/2011	1:48:13 AM	BCl3 MFC set to  0.000000
8/29/2011	1:48:13 AM	PHl3 MFC set to  0.000000
8/29/2011	1:48:13 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:48:13 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:48:13 AM	Tube furnace set to 0
8/29/2011	1:48:43 AM	Helium valve closed
8/29/2011	1:48:43 AM	H2 valve closed
8/29/2011	1:48:43 AM	BCl3 valve closed
8/29/2011	1:48:43 AM	PH3 valve closed
8/29/2011	1:48:43 AM	SiCl4 pre valve closed
8/29/2011	1:48:43 AM	SiCl4 post valve closed
8/29/2011	1:48:43 AM	Bypass valve closed
8/29/2011	1:48:43 AM	Bubbler valve closed
8/29/2011	1:48:43 AM	Main Vac valve opened
8/29/2011	1:48:43 AM	Helium MFC set to  0.000000
8/29/2011	1:48:43 AM	H2 MFC set to  0.000000
8/29/2011	1:48:43 AM	BCl3 MFC set to  0.000000
8/29/2011	1:48:43 AM	PHl3 MFC set to  0.000000
8/29/2011	1:48:43 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:48:43 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:48:44 AM	Tube furnace set to 0
8/29/2011	1:49:14 AM	H2 valve closed
8/29/2011	1:49:14 AM	BCl3 valve closed
8/29/2011	1:49:14 AM	PH3 valve closed
8/29/2011	1:49:14 AM	SiCl4 pre valve closed
8/29/2011	1:49:14 AM	SiCl4 post valve closed
8/29/2011	1:49:14 AM	Bypass valve closed
8/29/2011	1:49:14 AM	Bubbler valve closed
8/29/2011	1:49:14 AM	Helium valve opened
8/29/2011	1:49:14 AM	Main Vac valve opened
8/29/2011	1:49:14 AM	Helium MFC set to  20.000000
8/29/2011	1:49:14 AM	H2 MFC set to  0.000000
8/29/2011	1:49:14 AM	BCl3 MFC set to  0.000000
8/29/2011	1:49:14 AM	PHl3 MFC set to  0.000000
8/29/2011	1:49:14 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:49:14 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:49:14 AM	Tube furnace set to 0
8/29/2011	1:49:44 AM	Helium valve closed
8/29/2011	1:49:44 AM	H2 valve closed
8/29/2011	1:49:44 AM	BCl3 valve closed
8/29/2011	1:49:44 AM	PH3 valve closed
8/29/2011	1:49:44 AM	SiCl4 pre valve closed
8/29/2011	1:49:44 AM	SiCl4 post valve closed
8/29/2011	1:49:44 AM	Bypass valve closed
8/29/2011	1:49:44 AM	Bubbler valve closed
8/29/2011	1:49:44 AM	Main Vac valve opened
8/29/2011	1:49:44 AM	Helium MFC set to  0.000000
8/29/2011	1:49:44 AM	H2 MFC set to  0.000000
8/29/2011	1:49:44 AM	BCl3 MFC set to  0.000000
8/29/2011	1:49:44 AM	PHl3 MFC set to  0.000000
8/29/2011	1:49:44 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:49:44 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:49:44 AM	Tube furnace set to 0
8/29/2011	1:50:14 AM	H2 valve closed
8/29/2011	1:50:14 AM	BCl3 valve closed
8/29/2011	1:50:14 AM	PH3 valve closed
8/29/2011	1:50:14 AM	SiCl4 pre valve closed
8/29/2011	1:50:14 AM	SiCl4 post valve closed
8/29/2011	1:50:14 AM	Bypass valve closed
8/29/2011	1:50:14 AM	Bubbler valve closed
8/29/2011	1:50:14 AM	Helium valve opened
8/29/2011	1:50:14 AM	Main Vac valve opened
8/29/2011	1:50:14 AM	Helium MFC set to  20.000000
8/29/2011	1:50:14 AM	H2 MFC set to  0.000000
8/29/2011	1:50:14 AM	BCl3 MFC set to  0.000000
8/29/2011	1:50:14 AM	PHl3 MFC set to  0.000000
8/29/2011	1:50:14 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:50:14 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:50:14 AM	Tube furnace set to 0
8/29/2011	1:50:44 AM	Helium valve closed
8/29/2011	1:50:44 AM	H2 valve closed
8/29/2011	1:50:44 AM	BCl3 valve closed
8/29/2011	1:50:44 AM	PH3 valve closed
8/29/2011	1:50:44 AM	SiCl4 pre valve closed
8/29/2011	1:50:44 AM	SiCl4 post valve closed
8/29/2011	1:50:44 AM	Bypass valve closed
8/29/2011	1:50:44 AM	Bubbler valve closed
8/29/2011	1:50:44 AM	Main Vac valve opened
8/29/2011	1:50:44 AM	Helium MFC set to  0.000000
8/29/2011	1:50:44 AM	H2 MFC set to  0.000000
8/29/2011	1:50:44 AM	BCl3 MFC set to  0.000000
8/29/2011	1:50:44 AM	PHl3 MFC set to  0.000000
8/29/2011	1:50:44 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:50:44 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:50:44 AM	Tube furnace set to 0
8/29/2011	1:51:14 AM	H2 valve closed
8/29/2011	1:51:14 AM	BCl3 valve closed
8/29/2011	1:51:14 AM	PH3 valve closed
8/29/2011	1:51:14 AM	SiCl4 pre valve closed
8/29/2011	1:51:14 AM	SiCl4 post valve closed
8/29/2011	1:51:14 AM	Bypass valve closed
8/29/2011	1:51:14 AM	Bubbler valve closed
8/29/2011	1:51:14 AM	Helium valve opened
8/29/2011	1:51:14 AM	Main Vac valve opened
8/29/2011	1:51:14 AM	Helium MFC set to  20.000000
8/29/2011	1:51:14 AM	H2 MFC set to  0.000000
8/29/2011	1:51:14 AM	BCl3 MFC set to  0.000000
8/29/2011	1:51:14 AM	PHl3 MFC set to  0.000000
8/29/2011	1:51:14 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:51:14 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:51:14 AM	Tube furnace set to 0
8/29/2011	1:51:45 AM	Helium valve closed
8/29/2011	1:51:45 AM	H2 valve closed
8/29/2011	1:51:45 AM	BCl3 valve closed
8/29/2011	1:51:45 AM	PH3 valve closed
8/29/2011	1:51:45 AM	SiCl4 pre valve closed
8/29/2011	1:51:45 AM	SiCl4 post valve closed
8/29/2011	1:51:45 AM	Bypass valve closed
8/29/2011	1:51:45 AM	Bubbler valve closed
8/29/2011	1:51:45 AM	Main Vac valve opened
8/29/2011	1:51:45 AM	Helium MFC set to  0.000000
8/29/2011	1:51:45 AM	H2 MFC set to  0.000000
8/29/2011	1:51:45 AM	BCl3 MFC set to  0.000000
8/29/2011	1:51:45 AM	PHl3 MFC set to  0.000000
8/29/2011	1:51:45 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:51:45 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:51:45 AM	Tube furnace set to 0
8/29/2011	1:52:15 AM	H2 valve closed
8/29/2011	1:52:15 AM	BCl3 valve closed
8/29/2011	1:52:15 AM	PH3 valve closed
8/29/2011	1:52:15 AM	SiCl4 pre valve closed
8/29/2011	1:52:15 AM	SiCl4 post valve closed
8/29/2011	1:52:15 AM	Bypass valve closed
8/29/2011	1:52:15 AM	Bubbler valve closed
8/29/2011	1:52:15 AM	Helium valve opened
8/29/2011	1:52:15 AM	Main Vac valve opened
8/29/2011	1:52:15 AM	Helium MFC set to  20.000000
8/29/2011	1:52:15 AM	H2 MFC set to  0.000000
8/29/2011	1:52:15 AM	BCl3 MFC set to  0.000000
8/29/2011	1:52:15 AM	PHl3 MFC set to  0.000000
8/29/2011	1:52:15 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:52:15 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:52:15 AM	Tube furnace set to 0
8/29/2011	1:52:45 AM	Helium valve closed
8/29/2011	1:52:45 AM	H2 valve closed
8/29/2011	1:52:45 AM	BCl3 valve closed
8/29/2011	1:52:45 AM	PH3 valve closed
8/29/2011	1:52:45 AM	SiCl4 pre valve closed
8/29/2011	1:52:45 AM	SiCl4 post valve closed
8/29/2011	1:52:45 AM	Bypass valve closed
8/29/2011	1:52:45 AM	Bubbler valve closed
8/29/2011	1:52:45 AM	Main Vac valve opened
8/29/2011	1:52:45 AM	Helium MFC set to  0.000000
8/29/2011	1:52:45 AM	H2 MFC set to  0.000000
8/29/2011	1:52:45 AM	BCl3 MFC set to  0.000000
8/29/2011	1:52:45 AM	PHl3 MFC set to  0.000000
8/29/2011	1:52:45 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:52:45 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:52:45 AM	Tube furnace set to 0
8/29/2011	1:53:15 AM	H2 valve closed
8/29/2011	1:53:15 AM	BCl3 valve closed
8/29/2011	1:53:15 AM	PH3 valve closed
8/29/2011	1:53:15 AM	SiCl4 pre valve closed
8/29/2011	1:53:15 AM	SiCl4 post valve closed
8/29/2011	1:53:15 AM	Bypass valve closed
8/29/2011	1:53:15 AM	Bubbler valve closed
8/29/2011	1:53:15 AM	Helium valve opened
8/29/2011	1:53:15 AM	Main Vac valve opened
8/29/2011	1:53:15 AM	Helium MFC set to  20.000000
8/29/2011	1:53:15 AM	H2 MFC set to  0.000000
8/29/2011	1:53:15 AM	BCl3 MFC set to  0.000000
8/29/2011	1:53:15 AM	PHl3 MFC set to  0.000000
8/29/2011	1:53:15 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:53:15 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:53:15 AM	Tube furnace set to 0
8/29/2011	1:53:45 AM	Helium valve closed
8/29/2011	1:53:45 AM	H2 valve closed
8/29/2011	1:53:45 AM	BCl3 valve closed
8/29/2011	1:53:45 AM	PH3 valve closed
8/29/2011	1:53:45 AM	SiCl4 pre valve closed
8/29/2011	1:53:45 AM	SiCl4 post valve closed
8/29/2011	1:53:45 AM	Bypass valve closed
8/29/2011	1:53:45 AM	Bubbler valve closed
8/29/2011	1:53:45 AM	Main Vac valve opened
8/29/2011	1:53:45 AM	Helium MFC set to  0.000000
8/29/2011	1:53:45 AM	H2 MFC set to  0.000000
8/29/2011	1:53:45 AM	BCl3 MFC set to  0.000000
8/29/2011	1:53:45 AM	PHl3 MFC set to  0.000000
8/29/2011	1:53:45 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:53:45 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:53:45 AM	Tube furnace set to 0
8/29/2011	1:54:15 AM	H2 valve closed
8/29/2011	1:54:15 AM	BCl3 valve closed
8/29/2011	1:54:15 AM	PH3 valve closed
8/29/2011	1:54:15 AM	SiCl4 pre valve closed
8/29/2011	1:54:15 AM	SiCl4 post valve closed
8/29/2011	1:54:15 AM	Bypass valve closed
8/29/2011	1:54:15 AM	Bubbler valve closed
8/29/2011	1:54:16 AM	Helium valve opened
8/29/2011	1:54:16 AM	Main Vac valve opened
8/29/2011	1:54:16 AM	Helium MFC set to  20.000000
8/29/2011	1:54:16 AM	H2 MFC set to  0.000000
8/29/2011	1:54:16 AM	BCl3 MFC set to  0.000000
8/29/2011	1:54:16 AM	PHl3 MFC set to  0.000000
8/29/2011	1:54:16 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:54:16 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:54:16 AM	Tube furnace set to 0
8/29/2011	1:54:46 AM	Helium valve closed
8/29/2011	1:54:46 AM	H2 valve closed
8/29/2011	1:54:46 AM	BCl3 valve closed
8/29/2011	1:54:46 AM	PH3 valve closed
8/29/2011	1:54:46 AM	SiCl4 pre valve closed
8/29/2011	1:54:46 AM	SiCl4 post valve closed
8/29/2011	1:54:46 AM	Bypass valve closed
8/29/2011	1:54:46 AM	Bubbler valve closed
8/29/2011	1:54:46 AM	Main Vac valve opened
8/29/2011	1:54:46 AM	Helium MFC set to  0.000000
8/29/2011	1:54:46 AM	H2 MFC set to  0.000000
8/29/2011	1:54:46 AM	BCl3 MFC set to  0.000000
8/29/2011	1:54:46 AM	PHl3 MFC set to  0.000000
8/29/2011	1:54:46 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:54:46 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:54:46 AM	Tube furnace set to 0
8/29/2011	1:55:16 AM	H2 valve closed
8/29/2011	1:55:16 AM	BCl3 valve closed
8/29/2011	1:55:16 AM	PH3 valve closed
8/29/2011	1:55:16 AM	SiCl4 pre valve closed
8/29/2011	1:55:16 AM	SiCl4 post valve closed
8/29/2011	1:55:16 AM	Bypass valve closed
8/29/2011	1:55:16 AM	Bubbler valve closed
8/29/2011	1:55:16 AM	Helium valve opened
8/29/2011	1:55:16 AM	Main Vac valve opened
8/29/2011	1:55:16 AM	Helium MFC set to  20.000000
8/29/2011	1:55:16 AM	H2 MFC set to  0.000000
8/29/2011	1:55:16 AM	BCl3 MFC set to  0.000000
8/29/2011	1:55:16 AM	PHl3 MFC set to  0.000000
8/29/2011	1:55:16 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:55:16 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:55:16 AM	Tube furnace set to 0
8/29/2011	1:55:46 AM	Helium valve closed
8/29/2011	1:55:46 AM	H2 valve closed
8/29/2011	1:55:46 AM	BCl3 valve closed
8/29/2011	1:55:46 AM	PH3 valve closed
8/29/2011	1:55:46 AM	SiCl4 pre valve closed
8/29/2011	1:55:46 AM	SiCl4 post valve closed
8/29/2011	1:55:46 AM	Bypass valve closed
8/29/2011	1:55:46 AM	Bubbler valve closed
8/29/2011	1:55:46 AM	Main Vac valve opened
8/29/2011	1:55:46 AM	Helium MFC set to  0.000000
8/29/2011	1:55:46 AM	H2 MFC set to  0.000000
8/29/2011	1:55:46 AM	BCl3 MFC set to  0.000000
8/29/2011	1:55:46 AM	PHl3 MFC set to  0.000000
8/29/2011	1:55:46 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:55:46 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:55:46 AM	Tube furnace set to 0
8/29/2011	1:56:16 AM	H2 valve closed
8/29/2011	1:56:16 AM	BCl3 valve closed
8/29/2011	1:56:16 AM	PH3 valve closed
8/29/2011	1:56:16 AM	SiCl4 pre valve closed
8/29/2011	1:56:16 AM	SiCl4 post valve closed
8/29/2011	1:56:16 AM	Bypass valve closed
8/29/2011	1:56:16 AM	Bubbler valve closed
8/29/2011	1:56:16 AM	Helium valve opened
8/29/2011	1:56:16 AM	Main Vac valve opened
8/29/2011	1:56:16 AM	Helium MFC set to  20.000000
8/29/2011	1:56:16 AM	H2 MFC set to  0.000000
8/29/2011	1:56:16 AM	BCl3 MFC set to  0.000000
8/29/2011	1:56:16 AM	PHl3 MFC set to  0.000000
8/29/2011	1:56:16 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:56:16 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:56:16 AM	Tube furnace set to 0
8/29/2011	1:56:46 AM	Helium valve closed
8/29/2011	1:56:46 AM	H2 valve closed
8/29/2011	1:56:46 AM	BCl3 valve closed
8/29/2011	1:56:46 AM	PH3 valve closed
8/29/2011	1:56:46 AM	SiCl4 pre valve closed
8/29/2011	1:56:46 AM	SiCl4 post valve closed
8/29/2011	1:56:46 AM	Bypass valve closed
8/29/2011	1:56:46 AM	Bubbler valve closed
8/29/2011	1:56:46 AM	Main Vac valve opened
8/29/2011	1:56:46 AM	Helium MFC set to  0.000000
8/29/2011	1:56:46 AM	H2 MFC set to  0.000000
8/29/2011	1:56:46 AM	BCl3 MFC set to  0.000000
8/29/2011	1:56:46 AM	PHl3 MFC set to  0.000000
8/29/2011	1:56:46 AM	SiCl4 MFC set to  0.000000
8/29/2011	1:56:46 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:56:47 AM	Tube furnace set to 0
8/29/2011	1:56:48 AM	Run finished at 1:56 AM
8/29/2011	2:00:05 AM	Main Vac valve closed
8/29/2011	2:00:20 AM	Main Vac valve opened
8/29/2011	2:00:20 AM	Main Vac valve closed
8/29/2011	2:00:21 AM	Main Vac valve opened
8/29/2011	2:01:09 AM	Recipe started at 2:01 AM
8/29/2011	2:01:09 AM	Helium valve closed
8/29/2011	2:01:09 AM	H2 valve closed
8/29/2011	2:01:09 AM	BCl3 valve closed
8/29/2011	2:01:09 AM	PH3 valve closed
8/29/2011	2:01:09 AM	SiCl4 pre valve closed
8/29/2011	2:01:09 AM	SiCl4 post valve closed
8/29/2011	2:01:09 AM	Main Vac valve closed
8/29/2011	2:01:09 AM	Bypass valve closed
8/29/2011	2:01:09 AM	Bubbler valve closed
8/29/2011	2:01:09 AM	Helium MFC set to  0.000000
8/29/2011	2:01:09 AM	H2 MFC set to  0.000000
8/29/2011	2:01:09 AM	BCl3 MFC set to  0.000000
8/29/2011	2:01:09 AM	PHl3 MFC set to  0.000000
8/29/2011	2:01:09 AM	SiCl4 MFC set to  0.000000
8/29/2011	2:01:09 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	2:01:09 AM	Tube furnace set to 1000
8/29/2011	2:01:12 AM	Helium valve closed
8/29/2011	2:01:12 AM	BCl3 valve closed
8/29/2011	2:01:12 AM	PH3 valve closed
8/29/2011	2:01:12 AM	SiCl4 pre valve closed
8/29/2011	2:01:12 AM	SiCl4 post valve closed
8/29/2011	2:01:12 AM	Main Vac valve closed
8/29/2011	2:01:12 AM	Bypass valve closed
8/29/2011	2:01:12 AM	Bubbler valve closed
8/29/2011	2:01:12 AM	H2 valve opened
8/29/2011	2:01:12 AM	Helium MFC set to  0.000000
8/29/2011	2:01:12 AM	H2 MFC set to  500.000000
8/29/2011	2:01:12 AM	BCl3 MFC set to  0.000000
8/29/2011	2:01:12 AM	PHl3 MFC set to  0.000000
8/29/2011	2:01:12 AM	SiCl4 MFC set to  0.000000
8/29/2011	2:01:12 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	2:01:13 AM	Tube furnace set to 1000
8/29/2011	2:02:17 AM	Helium valve closed
8/29/2011	2:02:17 AM	BCl3 valve closed
8/29/2011	2:02:17 AM	PH3 valve closed
8/29/2011	2:02:17 AM	SiCl4 pre valve closed
8/29/2011	2:02:17 AM	SiCl4 post valve closed
8/29/2011	2:02:17 AM	Main Vac valve closed
8/29/2011	2:02:17 AM	Bypass valve closed
8/29/2011	2:02:17 AM	H2 valve opened
8/29/2011	2:02:17 AM	Bubbler valve opened
8/29/2011	2:02:17 AM	Helium MFC set to  0.000000
8/29/2011	2:02:17 AM	H2 MFC set to  500.000000
8/29/2011	2:02:17 AM	BCl3 MFC set to  0.000000
8/29/2011	2:02:17 AM	PHl3 MFC set to  0.000000
8/29/2011	2:02:17 AM	SiCl4 MFC set to  0.000000
8/29/2011	2:02:17 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	2:02:17 AM	Tube furnace set to 1000
8/29/2011	2:02:18 AM	Helium valve closed
8/29/2011	2:02:18 AM	BCl3 valve closed
8/29/2011	2:02:18 AM	PH3 valve closed
8/29/2011	2:02:18 AM	SiCl4 pre valve closed
8/29/2011	2:02:18 AM	SiCl4 post valve closed
8/29/2011	2:02:18 AM	Main Vac valve closed
8/29/2011	2:02:18 AM	Bypass valve closed
8/29/2011	2:02:18 AM	H2 valve opened
8/29/2011	2:02:18 AM	Bubbler valve opened
8/29/2011	2:02:18 AM	Helium MFC set to  0.000000
8/29/2011	2:02:18 AM	H2 MFC set to  500.000000
8/29/2011	2:02:18 AM	BCl3 MFC set to  0.000000
8/29/2011	2:02:18 AM	PHl3 MFC set to  0.000000
8/29/2011	2:02:18 AM	SiCl4 MFC set to  0.000000
8/29/2011	2:02:18 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	2:02:18 AM	Tube furnace set to 1000
8/29/2011	2:22:18 AM	Helium valve closed
8/29/2011	2:22:18 AM	PH3 valve closed
8/29/2011	2:22:18 AM	Main Vac valve closed
8/29/2011	2:22:18 AM	Bypass valve closed
8/29/2011	2:22:18 AM	H2 valve opened
8/29/2011	2:22:18 AM	BCl3 valve opened
8/29/2011	2:22:18 AM	SiCl4 pre valve opened
8/29/2011	2:22:18 AM	SiCl4 post valve opened
8/29/2011	2:22:18 AM	Bubbler valve opened
8/29/2011	2:22:18 AM	Helium MFC set to  0.000000
8/29/2011	2:22:18 AM	H2 MFC set to  500.000000
8/29/2011	2:22:18 AM	BCl3 MFC set to  2.500000
8/29/2011	2:22:18 AM	PHl3 MFC set to  0.000000
8/29/2011	2:22:18 AM	SiCl4 MFC set to  50.000000
8/29/2011	2:22:18 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	2:22:18 AM	Tube furnace set to 1000
8/29/2011	2:34:18 AM	Helium valve closed
8/29/2011	2:34:18 AM	BCl3 valve closed
8/29/2011	2:34:18 AM	PH3 valve closed
8/29/2011	2:34:18 AM	SiCl4 pre valve closed
8/29/2011	2:34:18 AM	SiCl4 post valve closed
8/29/2011	2:34:18 AM	Main Vac valve closed
8/29/2011	2:34:18 AM	Bypass valve closed
8/29/2011	2:34:18 AM	H2 valve opened
8/29/2011	2:34:18 AM	Bubbler valve opened
8/29/2011	2:34:18 AM	Helium MFC set to  0.000000
8/29/2011	2:34:18 AM	H2 MFC set to  500.000000
8/29/2011	2:34:18 AM	BCl3 MFC set to  0.000000
8/29/2011	2:34:18 AM	PHl3 MFC set to  0.000000
8/29/2011	2:34:18 AM	SiCl4 MFC set to  0.000000
8/29/2011	2:34:18 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	2:34:19 AM	Tube furnace set to 750
8/29/2011	2:39:19 AM	H2 valve closed
8/29/2011	2:39:19 AM	BCl3 valve closed
8/29/2011	2:39:19 AM	PH3 valve closed
8/29/2011	2:39:19 AM	SiCl4 pre valve closed
8/29/2011	2:39:19 AM	SiCl4 post valve closed
8/29/2011	2:39:19 AM	Main Vac valve closed
8/29/2011	2:39:19 AM	Bypass valve closed
8/29/2011	2:39:19 AM	Helium valve opened
8/29/2011	2:39:19 AM	Bubbler valve opened
8/29/2011	2:39:19 AM	Helium MFC set to  500.000000
8/29/2011	2:39:19 AM	H2 MFC set to  0.000000
8/29/2011	2:39:19 AM	BCl3 MFC set to  0.000000
8/29/2011	2:39:19 AM	PHl3 MFC set to  0.000000
8/29/2011	2:39:19 AM	SiCl4 MFC set to  0.000000
8/29/2011	2:39:19 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	2:39:19 AM	Tube furnace set to 0
8/29/2011	2:59:19 AM	Helium valve closed
8/29/2011	2:59:19 AM	H2 valve closed
8/29/2011	2:59:19 AM	BCl3 valve closed
8/29/2011	2:59:19 AM	PH3 valve closed
8/29/2011	2:59:19 AM	SiCl4 pre valve closed
8/29/2011	2:59:19 AM	SiCl4 post valve closed
8/29/2011	2:59:19 AM	Main Vac valve closed
8/29/2011	2:59:19 AM	Bypass valve closed
8/29/2011	2:59:19 AM	Bubbler valve closed
8/29/2011	2:59:19 AM	Helium MFC set to  0.000000
8/29/2011	2:59:19 AM	H2 MFC set to  0.000000
8/29/2011	2:59:19 AM	BCl3 MFC set to  0.000000
8/29/2011	2:59:19 AM	PHl3 MFC set to  0.000000
8/29/2011	2:59:19 AM	SiCl4 MFC set to  0.000000
8/29/2011	2:59:19 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	2:59:19 AM	Tube furnace set to 0
8/29/2011	3:05:13 AM	Run aborted at 3:05 AM
8/29/2011	3:05:13 AM	Helium valve closed
8/29/2011	3:05:13 AM	H2 valve closed
8/29/2011	3:05:13 AM	BCl3 valve closed
8/29/2011	3:05:13 AM	PH3 valve closed
8/29/2011	3:05:13 AM	SiCl4 pre valve closed
8/29/2011	3:05:13 AM	SiCl4 post valve closed
8/29/2011	3:05:13 AM	Bypass valve closed
8/29/2011	3:05:13 AM	Main Vac valve closed
8/29/2011	3:05:13 AM	Bubbler valve closed
8/29/2011	3:05:13 AM	Helium MFC set to  0.000000
8/29/2011	3:05:13 AM	H2 MFC set to  0.000000
8/29/2011	3:05:13 AM	BCl3 MFC set to  0.000000
8/29/2011	3:05:13 AM	PHl3 MFC set to  0.000000
8/29/2011	3:05:13 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:05:13 AM	Tube furnace set to 0
8/29/2011	3:21:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	3:21:55 AM	Recipe started at 3:21 AM
8/29/2011	3:21:55 AM	Helium valve closed
8/29/2011	3:21:56 AM	H2 valve closed
8/29/2011	3:21:56 AM	BCl3 valve closed
8/29/2011	3:21:56 AM	PH3 valve closed
8/29/2011	3:21:56 AM	SiCl4 pre valve closed
8/29/2011	3:21:56 AM	SiCl4 post valve closed
8/29/2011	3:21:56 AM	Main Vac valve closed
8/29/2011	3:21:56 AM	Bypass valve closed
8/29/2011	3:21:56 AM	Bubbler valve closed
8/29/2011	3:21:56 AM	Helium MFC set to  0.000000
8/29/2011	3:21:56 AM	H2 MFC set to  0.000000
8/29/2011	3:21:56 AM	BCl3 MFC set to  0.000000
8/29/2011	3:21:56 AM	PHl3 MFC set to  0.000000
8/29/2011	3:21:56 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:21:56 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:21:56 AM	Tube furnace set to 0
8/29/2011	3:21:59 AM	H2 valve closed
8/29/2011	3:21:59 AM	BCl3 valve closed
8/29/2011	3:21:59 AM	PH3 valve closed
8/29/2011	3:21:59 AM	SiCl4 pre valve closed
8/29/2011	3:21:59 AM	SiCl4 post valve closed
8/29/2011	3:21:59 AM	Main Vac valve closed
8/29/2011	3:21:59 AM	Bypass valve closed
8/29/2011	3:21:59 AM	Bubbler valve closed
8/29/2011	3:21:59 AM	Helium valve opened
8/29/2011	3:21:59 AM	Helium MFC set to  500.000000
8/29/2011	3:21:59 AM	H2 MFC set to  0.000000
8/29/2011	3:21:59 AM	BCl3 MFC set to  0.000000
8/29/2011	3:21:59 AM	PHl3 MFC set to  0.000000
8/29/2011	3:21:59 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:21:59 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:21:59 AM	Tube furnace set to 0
8/29/2011	3:22:06 AM	Helium valve closed
8/29/2011	3:22:06 AM	H2 valve closed
8/29/2011	3:22:06 AM	BCl3 valve closed
8/29/2011	3:22:06 AM	PH3 valve closed
8/29/2011	3:22:06 AM	SiCl4 pre valve closed
8/29/2011	3:22:06 AM	SiCl4 post valve closed
8/29/2011	3:22:06 AM	Main Vac valve closed
8/29/2011	3:22:06 AM	Bypass valve closed
8/29/2011	3:22:06 AM	Bubbler valve closed
8/29/2011	3:22:06 AM	Helium MFC set to  0.000000
8/29/2011	3:22:06 AM	H2 MFC set to  0.000000
8/29/2011	3:22:06 AM	BCl3 MFC set to  0.000000
8/29/2011	3:22:06 AM	PHl3 MFC set to  0.000000
8/29/2011	3:22:06 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:22:06 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:22:06 AM	Tube furnace set to 0
8/29/2011	3:22:07 AM	Run finished at 3:22 AM
8/29/2011	3:22:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	3:25:15 AM	Helium valve opened
8/29/2011	3:25:19 AM	Helium MFC set to  0.000000
8/29/2011	3:25:22 AM	Helium MFC set to  100.000000
8/29/2011	3:26:52 AM	Bubbler valve opened
8/29/2011	3:28:12 AM	Bubbler valve closed
8/29/2011	3:28:13 AM	Helium valve closed
8/29/2011	3:28:15 AM	Helium MFC set to  0.000000
8/29/2011	3:28:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	3:28:21 AM	Recipe started at 3:28 AM
8/29/2011	3:28:21 AM	Helium valve closed
8/29/2011	3:28:21 AM	H2 valve closed
8/29/2011	3:28:21 AM	BCl3 valve closed
8/29/2011	3:28:21 AM	PH3 valve closed
8/29/2011	3:28:21 AM	SiCl4 pre valve closed
8/29/2011	3:28:21 AM	SiCl4 post valve closed
8/29/2011	3:28:21 AM	Main Vac valve closed
8/29/2011	3:28:21 AM	Bubbler valve closed
8/29/2011	3:28:21 AM	Bypass valve opened
8/29/2011	3:28:21 AM	Helium MFC set to  0.000000
8/29/2011	3:28:21 AM	H2 MFC set to  0.000000
8/29/2011	3:28:21 AM	BCl3 MFC set to  0.000000
8/29/2011	3:28:21 AM	PHl3 MFC set to  0.000000
8/29/2011	3:28:21 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:28:21 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:28:21 AM	Tube furnace set to 0
8/29/2011	3:29:22 AM	Helium valve closed
8/29/2011	3:29:22 AM	H2 valve closed
8/29/2011	3:29:22 AM	BCl3 valve closed
8/29/2011	3:29:22 AM	PH3 valve closed
8/29/2011	3:29:22 AM	SiCl4 pre valve closed
8/29/2011	3:29:22 AM	SiCl4 post valve closed
8/29/2011	3:29:22 AM	Main Vac valve closed
8/29/2011	3:29:22 AM	Bubbler valve closed
8/29/2011	3:29:22 AM	Bypass valve opened
8/29/2011	3:29:22 AM	Helium MFC set to  0.000000
8/29/2011	3:29:22 AM	H2 MFC set to  0.000000
8/29/2011	3:29:22 AM	BCl3 MFC set to  0.000000
8/29/2011	3:29:22 AM	PHl3 MFC set to  0.000000
8/29/2011	3:29:22 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:29:22 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:29:22 AM	Tube furnace set to 0
8/29/2011	3:30:22 AM	Helium valve closed
8/29/2011	3:30:22 AM	H2 valve closed
8/29/2011	3:30:22 AM	BCl3 valve closed
8/29/2011	3:30:22 AM	PH3 valve closed
8/29/2011	3:30:22 AM	SiCl4 pre valve closed
8/29/2011	3:30:22 AM	SiCl4 post valve closed
8/29/2011	3:30:22 AM	Bypass valve closed
8/29/2011	3:30:22 AM	Bubbler valve closed
8/29/2011	3:30:22 AM	Main Vac valve opened
8/29/2011	3:30:22 AM	Helium MFC set to  0.000000
8/29/2011	3:30:22 AM	H2 MFC set to  0.000000
8/29/2011	3:30:22 AM	BCl3 MFC set to  0.000000
8/29/2011	3:30:22 AM	PHl3 MFC set to  0.000000
8/29/2011	3:30:22 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:30:22 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:30:23 AM	Tube furnace set to 0
8/29/2011	3:30:24 AM	Run finished at 3:30 AM
8/29/2011	3:30:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	3:33:48 AM	Tube furnace set to 300
8/29/2011	3:34:40 AM	Recipe started at 3:34 AM
8/29/2011	3:34:40 AM	Helium valve closed
8/29/2011	3:34:40 AM	H2 valve closed
8/29/2011	3:34:40 AM	BCl3 valve closed
8/29/2011	3:34:40 AM	PH3 valve closed
8/29/2011	3:34:40 AM	SiCl4 pre valve closed
8/29/2011	3:34:40 AM	SiCl4 post valve closed
8/29/2011	3:34:40 AM	Bypass valve closed
8/29/2011	3:34:40 AM	Bubbler valve closed
8/29/2011	3:34:40 AM	Main Vac valve opened
8/29/2011	3:34:40 AM	Helium MFC set to  0.000000
8/29/2011	3:34:40 AM	H2 MFC set to  0.000000
8/29/2011	3:34:40 AM	BCl3 MFC set to  0.000000
8/29/2011	3:34:40 AM	PHl3 MFC set to  0.000000
8/29/2011	3:34:40 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:34:40 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:34:40 AM	Tube furnace set to 0
8/29/2011	3:35:10 AM	H2 valve closed
8/29/2011	3:35:10 AM	BCl3 valve closed
8/29/2011	3:35:10 AM	PH3 valve closed
8/29/2011	3:35:10 AM	SiCl4 pre valve closed
8/29/2011	3:35:10 AM	SiCl4 post valve closed
8/29/2011	3:35:10 AM	Bypass valve closed
8/29/2011	3:35:10 AM	Bubbler valve closed
8/29/2011	3:35:10 AM	Helium valve opened
8/29/2011	3:35:10 AM	Main Vac valve opened
8/29/2011	3:35:10 AM	Helium MFC set to  20.000000
8/29/2011	3:35:10 AM	H2 MFC set to  0.000000
8/29/2011	3:35:10 AM	BCl3 MFC set to  0.000000
8/29/2011	3:35:10 AM	PHl3 MFC set to  0.000000
8/29/2011	3:35:10 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:35:10 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:35:10 AM	Tube furnace set to 0
8/29/2011	3:35:40 AM	Helium valve closed
8/29/2011	3:35:40 AM	H2 valve closed
8/29/2011	3:35:40 AM	BCl3 valve closed
8/29/2011	3:35:40 AM	PH3 valve closed
8/29/2011	3:35:40 AM	SiCl4 pre valve closed
8/29/2011	3:35:40 AM	SiCl4 post valve closed
8/29/2011	3:35:40 AM	Bypass valve closed
8/29/2011	3:35:40 AM	Bubbler valve closed
8/29/2011	3:35:40 AM	Main Vac valve opened
8/29/2011	3:35:40 AM	Helium MFC set to  0.000000
8/29/2011	3:35:40 AM	H2 MFC set to  0.000000
8/29/2011	3:35:40 AM	BCl3 MFC set to  0.000000
8/29/2011	3:35:40 AM	PHl3 MFC set to  0.000000
8/29/2011	3:35:40 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:35:40 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:35:40 AM	Tube furnace set to 0
8/29/2011	3:36:10 AM	H2 valve closed
8/29/2011	3:36:10 AM	BCl3 valve closed
8/29/2011	3:36:10 AM	PH3 valve closed
8/29/2011	3:36:10 AM	SiCl4 pre valve closed
8/29/2011	3:36:10 AM	SiCl4 post valve closed
8/29/2011	3:36:10 AM	Bypass valve closed
8/29/2011	3:36:10 AM	Bubbler valve closed
8/29/2011	3:36:10 AM	Helium valve opened
8/29/2011	3:36:10 AM	Main Vac valve opened
8/29/2011	3:36:10 AM	Helium MFC set to  20.000000
8/29/2011	3:36:10 AM	H2 MFC set to  0.000000
8/29/2011	3:36:10 AM	BCl3 MFC set to  0.000000
8/29/2011	3:36:10 AM	PHl3 MFC set to  0.000000
8/29/2011	3:36:10 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:36:10 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:36:10 AM	Tube furnace set to 0
8/29/2011	3:36:40 AM	Helium valve closed
8/29/2011	3:36:40 AM	H2 valve closed
8/29/2011	3:36:40 AM	BCl3 valve closed
8/29/2011	3:36:40 AM	PH3 valve closed
8/29/2011	3:36:40 AM	SiCl4 pre valve closed
8/29/2011	3:36:40 AM	SiCl4 post valve closed
8/29/2011	3:36:40 AM	Bypass valve closed
8/29/2011	3:36:40 AM	Bubbler valve closed
8/29/2011	3:36:40 AM	Main Vac valve opened
8/29/2011	3:36:40 AM	Helium MFC set to  0.000000
8/29/2011	3:36:40 AM	H2 MFC set to  0.000000
8/29/2011	3:36:40 AM	BCl3 MFC set to  0.000000
8/29/2011	3:36:40 AM	PHl3 MFC set to  0.000000
8/29/2011	3:36:40 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:36:40 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:36:41 AM	Tube furnace set to 0
8/29/2011	3:37:11 AM	H2 valve closed
8/29/2011	3:37:11 AM	BCl3 valve closed
8/29/2011	3:37:11 AM	PH3 valve closed
8/29/2011	3:37:11 AM	SiCl4 pre valve closed
8/29/2011	3:37:11 AM	SiCl4 post valve closed
8/29/2011	3:37:11 AM	Bypass valve closed
8/29/2011	3:37:11 AM	Bubbler valve closed
8/29/2011	3:37:11 AM	Helium valve opened
8/29/2011	3:37:11 AM	Main Vac valve opened
8/29/2011	3:37:11 AM	Helium MFC set to  20.000000
8/29/2011	3:37:11 AM	H2 MFC set to  0.000000
8/29/2011	3:37:11 AM	BCl3 MFC set to  0.000000
8/29/2011	3:37:11 AM	PHl3 MFC set to  0.000000
8/29/2011	3:37:11 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:37:11 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:37:11 AM	Tube furnace set to 0
8/29/2011	3:37:41 AM	Helium valve closed
8/29/2011	3:37:41 AM	H2 valve closed
8/29/2011	3:37:41 AM	BCl3 valve closed
8/29/2011	3:37:41 AM	PH3 valve closed
8/29/2011	3:37:41 AM	SiCl4 pre valve closed
8/29/2011	3:37:41 AM	SiCl4 post valve closed
8/29/2011	3:37:41 AM	Bypass valve closed
8/29/2011	3:37:41 AM	Bubbler valve closed
8/29/2011	3:37:41 AM	Main Vac valve opened
8/29/2011	3:37:41 AM	Helium MFC set to  0.000000
8/29/2011	3:37:41 AM	H2 MFC set to  0.000000
8/29/2011	3:37:41 AM	BCl3 MFC set to  0.000000
8/29/2011	3:37:41 AM	PHl3 MFC set to  0.000000
8/29/2011	3:37:41 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:37:41 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:37:41 AM	Tube furnace set to 0
8/29/2011	3:38:11 AM	H2 valve closed
8/29/2011	3:38:11 AM	BCl3 valve closed
8/29/2011	3:38:11 AM	PH3 valve closed
8/29/2011	3:38:11 AM	SiCl4 pre valve closed
8/29/2011	3:38:11 AM	SiCl4 post valve closed
8/29/2011	3:38:11 AM	Bypass valve closed
8/29/2011	3:38:11 AM	Bubbler valve closed
8/29/2011	3:38:11 AM	Helium valve opened
8/29/2011	3:38:11 AM	Main Vac valve opened
8/29/2011	3:38:11 AM	Helium MFC set to  20.000000
8/29/2011	3:38:11 AM	H2 MFC set to  0.000000
8/29/2011	3:38:11 AM	BCl3 MFC set to  0.000000
8/29/2011	3:38:11 AM	PHl3 MFC set to  0.000000
8/29/2011	3:38:11 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:38:11 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:38:11 AM	Tube furnace set to 0
8/29/2011	3:38:41 AM	Helium valve closed
8/29/2011	3:38:41 AM	H2 valve closed
8/29/2011	3:38:41 AM	BCl3 valve closed
8/29/2011	3:38:41 AM	PH3 valve closed
8/29/2011	3:38:41 AM	SiCl4 pre valve closed
8/29/2011	3:38:41 AM	SiCl4 post valve closed
8/29/2011	3:38:41 AM	Bypass valve closed
8/29/2011	3:38:41 AM	Bubbler valve closed
8/29/2011	3:38:41 AM	Main Vac valve opened
8/29/2011	3:38:41 AM	Helium MFC set to  0.000000
8/29/2011	3:38:41 AM	H2 MFC set to  0.000000
8/29/2011	3:38:41 AM	BCl3 MFC set to  0.000000
8/29/2011	3:38:41 AM	PHl3 MFC set to  0.000000
8/29/2011	3:38:41 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:38:41 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:38:41 AM	Tube furnace set to 0
8/29/2011	3:39:11 AM	H2 valve closed
8/29/2011	3:39:11 AM	BCl3 valve closed
8/29/2011	3:39:11 AM	PH3 valve closed
8/29/2011	3:39:11 AM	SiCl4 pre valve closed
8/29/2011	3:39:11 AM	SiCl4 post valve closed
8/29/2011	3:39:11 AM	Bypass valve closed
8/29/2011	3:39:11 AM	Bubbler valve closed
8/29/2011	3:39:11 AM	Helium valve opened
8/29/2011	3:39:11 AM	Main Vac valve opened
8/29/2011	3:39:11 AM	Helium MFC set to  20.000000
8/29/2011	3:39:11 AM	H2 MFC set to  0.000000
8/29/2011	3:39:11 AM	BCl3 MFC set to  0.000000
8/29/2011	3:39:11 AM	PHl3 MFC set to  0.000000
8/29/2011	3:39:11 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:39:11 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:39:12 AM	Tube furnace set to 0
8/29/2011	3:39:42 AM	Helium valve closed
8/29/2011	3:39:42 AM	H2 valve closed
8/29/2011	3:39:42 AM	BCl3 valve closed
8/29/2011	3:39:42 AM	PH3 valve closed
8/29/2011	3:39:42 AM	SiCl4 pre valve closed
8/29/2011	3:39:42 AM	SiCl4 post valve closed
8/29/2011	3:39:42 AM	Bypass valve closed
8/29/2011	3:39:42 AM	Bubbler valve closed
8/29/2011	3:39:42 AM	Main Vac valve opened
8/29/2011	3:39:42 AM	Helium MFC set to  0.000000
8/29/2011	3:39:42 AM	H2 MFC set to  0.000000
8/29/2011	3:39:42 AM	BCl3 MFC set to  0.000000
8/29/2011	3:39:42 AM	PHl3 MFC set to  0.000000
8/29/2011	3:39:42 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:39:42 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:39:42 AM	Tube furnace set to 0
8/29/2011	3:40:12 AM	H2 valve closed
8/29/2011	3:40:12 AM	BCl3 valve closed
8/29/2011	3:40:12 AM	PH3 valve closed
8/29/2011	3:40:12 AM	SiCl4 pre valve closed
8/29/2011	3:40:12 AM	SiCl4 post valve closed
8/29/2011	3:40:12 AM	Bypass valve closed
8/29/2011	3:40:12 AM	Bubbler valve closed
8/29/2011	3:40:12 AM	Helium valve opened
8/29/2011	3:40:12 AM	Main Vac valve opened
8/29/2011	3:40:12 AM	Helium MFC set to  20.000000
8/29/2011	3:40:12 AM	H2 MFC set to  0.000000
8/29/2011	3:40:12 AM	BCl3 MFC set to  0.000000
8/29/2011	3:40:12 AM	PHl3 MFC set to  0.000000
8/29/2011	3:40:12 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:40:12 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:40:12 AM	Tube furnace set to 0
8/29/2011	3:40:42 AM	Helium valve closed
8/29/2011	3:40:42 AM	H2 valve closed
8/29/2011	3:40:42 AM	BCl3 valve closed
8/29/2011	3:40:42 AM	PH3 valve closed
8/29/2011	3:40:42 AM	SiCl4 pre valve closed
8/29/2011	3:40:42 AM	SiCl4 post valve closed
8/29/2011	3:40:42 AM	Bypass valve closed
8/29/2011	3:40:42 AM	Bubbler valve closed
8/29/2011	3:40:42 AM	Main Vac valve opened
8/29/2011	3:40:42 AM	Helium MFC set to  0.000000
8/29/2011	3:40:42 AM	H2 MFC set to  0.000000
8/29/2011	3:40:42 AM	BCl3 MFC set to  0.000000
8/29/2011	3:40:42 AM	PHl3 MFC set to  0.000000
8/29/2011	3:40:42 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:40:42 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:40:42 AM	Tube furnace set to 0
8/29/2011	3:41:12 AM	H2 valve closed
8/29/2011	3:41:12 AM	BCl3 valve closed
8/29/2011	3:41:12 AM	PH3 valve closed
8/29/2011	3:41:12 AM	SiCl4 pre valve closed
8/29/2011	3:41:12 AM	SiCl4 post valve closed
8/29/2011	3:41:12 AM	Bypass valve closed
8/29/2011	3:41:12 AM	Bubbler valve closed
8/29/2011	3:41:12 AM	Helium valve opened
8/29/2011	3:41:12 AM	Main Vac valve opened
8/29/2011	3:41:12 AM	Helium MFC set to  20.000000
8/29/2011	3:41:12 AM	H2 MFC set to  0.000000
8/29/2011	3:41:12 AM	BCl3 MFC set to  0.000000
8/29/2011	3:41:12 AM	PHl3 MFC set to  0.000000
8/29/2011	3:41:12 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:41:12 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:41:12 AM	Tube furnace set to 0
8/29/2011	3:41:42 AM	Helium valve closed
8/29/2011	3:41:42 AM	H2 valve closed
8/29/2011	3:41:42 AM	BCl3 valve closed
8/29/2011	3:41:42 AM	PH3 valve closed
8/29/2011	3:41:42 AM	SiCl4 pre valve closed
8/29/2011	3:41:42 AM	SiCl4 post valve closed
8/29/2011	3:41:42 AM	Bypass valve closed
8/29/2011	3:41:42 AM	Bubbler valve closed
8/29/2011	3:41:42 AM	Main Vac valve opened
8/29/2011	3:41:42 AM	Helium MFC set to  0.000000
8/29/2011	3:41:42 AM	H2 MFC set to  0.000000
8/29/2011	3:41:42 AM	BCl3 MFC set to  0.000000
8/29/2011	3:41:42 AM	PHl3 MFC set to  0.000000
8/29/2011	3:41:42 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:41:42 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:41:43 AM	Tube furnace set to 0
8/29/2011	3:42:13 AM	H2 valve closed
8/29/2011	3:42:13 AM	BCl3 valve closed
8/29/2011	3:42:13 AM	PH3 valve closed
8/29/2011	3:42:13 AM	SiCl4 pre valve closed
8/29/2011	3:42:13 AM	SiCl4 post valve closed
8/29/2011	3:42:13 AM	Bypass valve closed
8/29/2011	3:42:13 AM	Bubbler valve closed
8/29/2011	3:42:13 AM	Helium valve opened
8/29/2011	3:42:13 AM	Main Vac valve opened
8/29/2011	3:42:13 AM	Helium MFC set to  20.000000
8/29/2011	3:42:13 AM	H2 MFC set to  0.000000
8/29/2011	3:42:13 AM	BCl3 MFC set to  0.000000
8/29/2011	3:42:13 AM	PHl3 MFC set to  0.000000
8/29/2011	3:42:13 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:42:13 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:42:13 AM	Tube furnace set to 0
8/29/2011	3:42:43 AM	Helium valve closed
8/29/2011	3:42:43 AM	H2 valve closed
8/29/2011	3:42:43 AM	BCl3 valve closed
8/29/2011	3:42:43 AM	PH3 valve closed
8/29/2011	3:42:43 AM	SiCl4 pre valve closed
8/29/2011	3:42:43 AM	SiCl4 post valve closed
8/29/2011	3:42:43 AM	Bypass valve closed
8/29/2011	3:42:43 AM	Bubbler valve closed
8/29/2011	3:42:43 AM	Main Vac valve opened
8/29/2011	3:42:43 AM	Helium MFC set to  0.000000
8/29/2011	3:42:43 AM	H2 MFC set to  0.000000
8/29/2011	3:42:43 AM	BCl3 MFC set to  0.000000
8/29/2011	3:42:43 AM	PHl3 MFC set to  0.000000
8/29/2011	3:42:43 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:42:43 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:42:43 AM	Tube furnace set to 0
8/29/2011	3:43:13 AM	H2 valve closed
8/29/2011	3:43:13 AM	BCl3 valve closed
8/29/2011	3:43:13 AM	PH3 valve closed
8/29/2011	3:43:13 AM	SiCl4 pre valve closed
8/29/2011	3:43:13 AM	SiCl4 post valve closed
8/29/2011	3:43:13 AM	Bypass valve closed
8/29/2011	3:43:13 AM	Bubbler valve closed
8/29/2011	3:43:13 AM	Helium valve opened
8/29/2011	3:43:13 AM	Main Vac valve opened
8/29/2011	3:43:13 AM	Helium MFC set to  20.000000
8/29/2011	3:43:13 AM	H2 MFC set to  0.000000
8/29/2011	3:43:13 AM	BCl3 MFC set to  0.000000
8/29/2011	3:43:13 AM	PHl3 MFC set to  0.000000
8/29/2011	3:43:13 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:43:13 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:43:13 AM	Tube furnace set to 0
8/29/2011	3:43:43 AM	Helium valve closed
8/29/2011	3:43:43 AM	H2 valve closed
8/29/2011	3:43:43 AM	BCl3 valve closed
8/29/2011	3:43:43 AM	PH3 valve closed
8/29/2011	3:43:43 AM	SiCl4 pre valve closed
8/29/2011	3:43:43 AM	SiCl4 post valve closed
8/29/2011	3:43:43 AM	Bypass valve closed
8/29/2011	3:43:43 AM	Bubbler valve closed
8/29/2011	3:43:43 AM	Main Vac valve opened
8/29/2011	3:43:43 AM	Helium MFC set to  0.000000
8/29/2011	3:43:43 AM	H2 MFC set to  0.000000
8/29/2011	3:43:43 AM	BCl3 MFC set to  0.000000
8/29/2011	3:43:43 AM	PHl3 MFC set to  0.000000
8/29/2011	3:43:43 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:43:43 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:43:43 AM	Tube furnace set to 0
8/29/2011	3:44:13 AM	H2 valve closed
8/29/2011	3:44:13 AM	BCl3 valve closed
8/29/2011	3:44:13 AM	PH3 valve closed
8/29/2011	3:44:13 AM	SiCl4 pre valve closed
8/29/2011	3:44:13 AM	SiCl4 post valve closed
8/29/2011	3:44:13 AM	Bypass valve closed
8/29/2011	3:44:13 AM	Bubbler valve closed
8/29/2011	3:44:13 AM	Helium valve opened
8/29/2011	3:44:13 AM	Main Vac valve opened
8/29/2011	3:44:13 AM	Helium MFC set to  20.000000
8/29/2011	3:44:13 AM	H2 MFC set to  0.000000
8/29/2011	3:44:13 AM	BCl3 MFC set to  0.000000
8/29/2011	3:44:13 AM	PHl3 MFC set to  0.000000
8/29/2011	3:44:13 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:44:13 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:44:14 AM	Tube furnace set to 0
8/29/2011	3:44:44 AM	Helium valve closed
8/29/2011	3:44:44 AM	H2 valve closed
8/29/2011	3:44:44 AM	BCl3 valve closed
8/29/2011	3:44:44 AM	PH3 valve closed
8/29/2011	3:44:44 AM	SiCl4 pre valve closed
8/29/2011	3:44:44 AM	SiCl4 post valve closed
8/29/2011	3:44:44 AM	Bypass valve closed
8/29/2011	3:44:44 AM	Bubbler valve closed
8/29/2011	3:44:44 AM	Main Vac valve opened
8/29/2011	3:44:44 AM	Helium MFC set to  0.000000
8/29/2011	3:44:44 AM	H2 MFC set to  0.000000
8/29/2011	3:44:44 AM	BCl3 MFC set to  0.000000
8/29/2011	3:44:44 AM	PHl3 MFC set to  0.000000
8/29/2011	3:44:44 AM	SiCl4 MFC set to  0.000000
8/29/2011	3:44:44 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:44:44 AM	Tube furnace set to 0
8/29/2011	3:44:45 AM	Run finished at 3:44 AM
8/29/2011	4:15:47 AM	Main Vac valve closed
8/29/2011	4:15:56 AM	Main Vac valve opened
8/29/2011	4:17:20 AM	Recipe started at 4:17 AM
8/29/2011	4:17:20 AM	Helium valve closed
8/29/2011	4:17:20 AM	H2 valve closed
8/29/2011	4:17:20 AM	BCl3 valve closed
8/29/2011	4:17:20 AM	PH3 valve closed
8/29/2011	4:17:20 AM	SiCl4 pre valve closed
8/29/2011	4:17:20 AM	SiCl4 post valve closed
8/29/2011	4:17:20 AM	Main Vac valve closed
8/29/2011	4:17:20 AM	Bypass valve closed
8/29/2011	4:17:20 AM	Bubbler valve closed
8/29/2011	4:17:20 AM	Helium MFC set to  0.000000
8/29/2011	4:17:20 AM	H2 MFC set to  0.000000
8/29/2011	4:17:20 AM	BCl3 MFC set to  0.000000
8/29/2011	4:17:20 AM	PHl3 MFC set to  0.000000
8/29/2011	4:17:20 AM	SiCl4 MFC set to  0.000000
8/29/2011	4:17:20 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	4:17:20 AM	Tube furnace set to 1000
8/29/2011	4:17:23 AM	Helium valve closed
8/29/2011	4:17:23 AM	BCl3 valve closed
8/29/2011	4:17:23 AM	PH3 valve closed
8/29/2011	4:17:23 AM	SiCl4 pre valve closed
8/29/2011	4:17:23 AM	SiCl4 post valve closed
8/29/2011	4:17:23 AM	Main Vac valve closed
8/29/2011	4:17:23 AM	Bypass valve closed
8/29/2011	4:17:23 AM	Bubbler valve closed
8/29/2011	4:17:23 AM	H2 valve opened
8/29/2011	4:17:23 AM	Helium MFC set to  0.000000
8/29/2011	4:17:23 AM	H2 MFC set to  500.000000
8/29/2011	4:17:23 AM	BCl3 MFC set to  0.000000
8/29/2011	4:17:23 AM	PHl3 MFC set to  0.000000
8/29/2011	4:17:23 AM	SiCl4 MFC set to  0.000000
8/29/2011	4:17:23 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	4:17:23 AM	Tube furnace set to 1000
8/29/2011	4:18:27 AM	Helium valve closed
8/29/2011	4:18:27 AM	BCl3 valve closed
8/29/2011	4:18:27 AM	PH3 valve closed
8/29/2011	4:18:27 AM	SiCl4 pre valve closed
8/29/2011	4:18:27 AM	SiCl4 post valve closed
8/29/2011	4:18:27 AM	Main Vac valve closed
8/29/2011	4:18:27 AM	Bypass valve closed
8/29/2011	4:18:27 AM	H2 valve opened
8/29/2011	4:18:27 AM	Bubbler valve opened
8/29/2011	4:18:27 AM	Helium MFC set to  0.000000
8/29/2011	4:18:27 AM	H2 MFC set to  500.000000
8/29/2011	4:18:27 AM	BCl3 MFC set to  0.000000
8/29/2011	4:18:27 AM	PHl3 MFC set to  0.000000
8/29/2011	4:18:27 AM	SiCl4 MFC set to  0.000000
8/29/2011	4:18:27 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	4:18:27 AM	Tube furnace set to 1000
8/29/2011	4:18:28 AM	Helium valve closed
8/29/2011	4:18:28 AM	BCl3 valve closed
8/29/2011	4:18:28 AM	PH3 valve closed
8/29/2011	4:18:28 AM	SiCl4 pre valve closed
8/29/2011	4:18:28 AM	SiCl4 post valve closed
8/29/2011	4:18:28 AM	Main Vac valve closed
8/29/2011	4:18:28 AM	Bypass valve closed
8/29/2011	4:18:28 AM	H2 valve opened
8/29/2011	4:18:28 AM	Bubbler valve opened
8/29/2011	4:18:28 AM	Helium MFC set to  0.000000
8/29/2011	4:18:28 AM	H2 MFC set to  500.000000
8/29/2011	4:18:28 AM	BCl3 MFC set to  0.000000
8/29/2011	4:18:28 AM	PHl3 MFC set to  0.000000
8/29/2011	4:18:28 AM	SiCl4 MFC set to  0.000000
8/29/2011	4:18:28 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	4:18:28 AM	Tube furnace set to 1000
8/29/2011	4:38:28 AM	Helium valve closed
8/29/2011	4:38:28 AM	PH3 valve closed
8/29/2011	4:38:28 AM	Main Vac valve closed
8/29/2011	4:38:28 AM	Bypass valve closed
8/29/2011	4:38:28 AM	H2 valve opened
8/29/2011	4:38:29 AM	BCl3 valve opened
8/29/2011	4:38:29 AM	SiCl4 pre valve opened
8/29/2011	4:38:29 AM	SiCl4 post valve opened
8/29/2011	4:38:29 AM	Bubbler valve opened
8/29/2011	4:38:29 AM	Helium MFC set to  0.000000
8/29/2011	4:38:29 AM	H2 MFC set to  500.000000
8/29/2011	4:38:29 AM	BCl3 MFC set to  2.500000
8/29/2011	4:38:29 AM	PHl3 MFC set to  0.000000
8/29/2011	4:38:29 AM	SiCl4 MFC set to  50.000000
8/29/2011	4:38:29 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	4:38:29 AM	Tube furnace set to 1000
8/29/2011	4:50:29 AM	Helium valve closed
8/29/2011	4:50:29 AM	BCl3 valve closed
8/29/2011	4:50:29 AM	PH3 valve closed
8/29/2011	4:50:29 AM	SiCl4 pre valve closed
8/29/2011	4:50:29 AM	SiCl4 post valve closed
8/29/2011	4:50:29 AM	Main Vac valve closed
8/29/2011	4:50:29 AM	Bypass valve closed
8/29/2011	4:50:29 AM	H2 valve opened
8/29/2011	4:50:29 AM	Bubbler valve opened
8/29/2011	4:50:29 AM	Helium MFC set to  0.000000
8/29/2011	4:50:29 AM	H2 MFC set to  500.000000
8/29/2011	4:50:29 AM	BCl3 MFC set to  0.000000
8/29/2011	4:50:29 AM	PHl3 MFC set to  0.000000
8/29/2011	4:50:29 AM	SiCl4 MFC set to  0.000000
8/29/2011	4:50:29 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	4:50:29 AM	Tube furnace set to 750
8/29/2011	4:55:29 AM	H2 valve closed
8/29/2011	4:55:29 AM	BCl3 valve closed
8/29/2011	4:55:29 AM	PH3 valve closed
8/29/2011	4:55:29 AM	SiCl4 pre valve closed
8/29/2011	4:55:29 AM	SiCl4 post valve closed
8/29/2011	4:55:29 AM	Main Vac valve closed
8/29/2011	4:55:29 AM	Bypass valve closed
8/29/2011	4:55:29 AM	Helium valve opened
8/29/2011	4:55:29 AM	Bubbler valve opened
8/29/2011	4:55:29 AM	Helium MFC set to  500.000000
8/29/2011	4:55:29 AM	H2 MFC set to  0.000000
8/29/2011	4:55:29 AM	BCl3 MFC set to  0.000000
8/29/2011	4:55:29 AM	PHl3 MFC set to  0.000000
8/29/2011	4:55:29 AM	SiCl4 MFC set to  0.000000
8/29/2011	4:55:29 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	4:55:29 AM	Tube furnace set to 0
8/29/2011	5:15:29 AM	Helium valve closed
8/29/2011	5:15:29 AM	H2 valve closed
8/29/2011	5:15:29 AM	BCl3 valve closed
8/29/2011	5:15:29 AM	PH3 valve closed
8/29/2011	5:15:29 AM	SiCl4 pre valve closed
8/29/2011	5:15:29 AM	SiCl4 post valve closed
8/29/2011	5:15:29 AM	Main Vac valve closed
8/29/2011	5:15:29 AM	Bypass valve closed
8/29/2011	5:15:29 AM	Bubbler valve closed
8/29/2011	5:15:29 AM	Helium MFC set to  0.000000
8/29/2011	5:15:29 AM	H2 MFC set to  0.000000
8/29/2011	5:15:29 AM	BCl3 MFC set to  0.000000
8/29/2011	5:15:29 AM	PHl3 MFC set to  0.000000
8/29/2011	5:15:29 AM	SiCl4 MFC set to  0.000000
8/29/2011	5:15:29 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	5:15:29 AM	Tube furnace set to 0
8/29/2011	5:39:08 AM	Run aborted at 5:39 AM
8/29/2011	5:39:08 AM	Helium valve closed
8/29/2011	5:39:08 AM	H2 valve closed
8/29/2011	5:39:08 AM	BCl3 valve closed
8/29/2011	5:39:08 AM	PH3 valve closed
8/29/2011	5:39:08 AM	SiCl4 pre valve closed
8/29/2011	5:39:08 AM	SiCl4 post valve closed
8/29/2011	5:39:08 AM	Bypass valve closed
8/29/2011	5:39:08 AM	Main Vac valve closed
8/29/2011	5:39:08 AM	Bubbler valve closed
8/29/2011	5:39:08 AM	Helium MFC set to  0.000000
8/29/2011	5:39:08 AM	H2 MFC set to  0.000000
8/29/2011	5:39:08 AM	BCl3 MFC set to  0.000000
8/29/2011	5:39:08 AM	PHl3 MFC set to  0.000000
8/29/2011	5:39:08 AM	SiCl4 MFC set to  0.000000
8/29/2011	5:39:09 AM	Tube furnace set to 0
8/29/2011	5:39:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	5:39:14 AM	Recipe started at 5:39 AM
8/29/2011	5:39:14 AM	Helium valve closed
8/29/2011	5:39:14 AM	H2 valve closed
8/29/2011	5:39:14 AM	BCl3 valve closed
8/29/2011	5:39:14 AM	PH3 valve closed
8/29/2011	5:39:14 AM	SiCl4 pre valve closed
8/29/2011	5:39:14 AM	SiCl4 post valve closed
8/29/2011	5:39:14 AM	Main Vac valve closed
8/29/2011	5:39:14 AM	Bypass valve closed
8/29/2011	5:39:14 AM	Bubbler valve closed
8/29/2011	5:39:14 AM	Helium MFC set to  0.000000
8/29/2011	5:39:14 AM	H2 MFC set to  0.000000
8/29/2011	5:39:14 AM	BCl3 MFC set to  0.000000
8/29/2011	5:39:14 AM	PHl3 MFC set to  0.000000
8/29/2011	5:39:14 AM	SiCl4 MFC set to  0.000000
8/29/2011	5:39:14 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	5:39:14 AM	Tube furnace set to 0
8/29/2011	5:39:17 AM	H2 valve closed
8/29/2011	5:39:17 AM	BCl3 valve closed
8/29/2011	5:39:17 AM	PH3 valve closed
8/29/2011	5:39:17 AM	SiCl4 pre valve closed
8/29/2011	5:39:17 AM	SiCl4 post valve closed
8/29/2011	5:39:17 AM	Main Vac valve closed
8/29/2011	5:39:17 AM	Bypass valve closed
8/29/2011	5:39:17 AM	Bubbler valve closed
8/29/2011	5:39:17 AM	Helium valve opened
8/29/2011	5:39:17 AM	Helium MFC set to  500.000000
8/29/2011	5:39:17 AM	H2 MFC set to  0.000000
8/29/2011	5:39:17 AM	BCl3 MFC set to  0.000000
8/29/2011	5:39:17 AM	PHl3 MFC set to  0.000000
8/29/2011	5:39:17 AM	SiCl4 MFC set to  0.000000
8/29/2011	5:39:17 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	5:39:17 AM	Tube furnace set to 0
8/29/2011	5:39:22 AM	Helium valve closed
8/29/2011	5:39:22 AM	H2 valve closed
8/29/2011	5:39:22 AM	BCl3 valve closed
8/29/2011	5:39:22 AM	PH3 valve closed
8/29/2011	5:39:22 AM	SiCl4 pre valve closed
8/29/2011	5:39:22 AM	SiCl4 post valve closed
8/29/2011	5:39:22 AM	Main Vac valve closed
8/29/2011	5:39:22 AM	Bypass valve closed
8/29/2011	5:39:22 AM	Bubbler valve closed
8/29/2011	5:39:22 AM	Helium MFC set to  0.000000
8/29/2011	5:39:22 AM	H2 MFC set to  0.000000
8/29/2011	5:39:22 AM	BCl3 MFC set to  0.000000
8/29/2011	5:39:22 AM	PHl3 MFC set to  0.000000
8/29/2011	5:39:22 AM	SiCl4 MFC set to  0.000000
8/29/2011	5:39:22 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	5:39:23 AM	Tube furnace set to 0
8/29/2011	5:39:24 AM	Run finished at 5:39 AM
8/29/2011	5:39:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	5:42:03 AM	Helium MFC set to  100.000000
8/29/2011	5:42:03 AM	Helium valve opened
8/29/2011	5:43:20 AM	Bubbler valve opened
8/29/2011	5:43:41 AM	Helium MFC set to  0.000000
8/29/2011	5:43:42 AM	Helium valve closed
8/29/2011	5:43:43 AM	Bubbler valve closed
8/29/2011	5:43:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	5:43:46 AM	Recipe started at 5:43 AM
8/29/2011	5:43:46 AM	Helium valve closed
8/29/2011	5:43:46 AM	H2 valve closed
8/29/2011	5:43:46 AM	BCl3 valve closed
8/29/2011	5:43:46 AM	PH3 valve closed
8/29/2011	5:43:46 AM	SiCl4 pre valve closed
8/29/2011	5:43:46 AM	SiCl4 post valve closed
8/29/2011	5:43:46 AM	Main Vac valve closed
8/29/2011	5:43:46 AM	Bubbler valve closed
8/29/2011	5:43:46 AM	Bypass valve opened
8/29/2011	5:43:46 AM	Helium MFC set to  0.000000
8/29/2011	5:43:46 AM	H2 MFC set to  0.000000
8/29/2011	5:43:46 AM	BCl3 MFC set to  0.000000
8/29/2011	5:43:46 AM	PHl3 MFC set to  0.000000
8/29/2011	5:43:46 AM	SiCl4 MFC set to  0.000000
8/29/2011	5:43:46 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	5:43:46 AM	Tube furnace set to 0
8/29/2011	5:44:50 AM	Helium valve closed
8/29/2011	5:44:50 AM	H2 valve closed
8/29/2011	5:44:50 AM	BCl3 valve closed
8/29/2011	5:44:50 AM	PH3 valve closed
8/29/2011	5:44:50 AM	SiCl4 pre valve closed
8/29/2011	5:44:50 AM	SiCl4 post valve closed
8/29/2011	5:44:50 AM	Main Vac valve closed
8/29/2011	5:44:50 AM	Bubbler valve closed
8/29/2011	5:44:50 AM	Bypass valve opened
8/29/2011	5:44:50 AM	Helium MFC set to  0.000000
8/29/2011	5:44:50 AM	H2 MFC set to  0.000000
8/29/2011	5:44:50 AM	BCl3 MFC set to  0.000000
8/29/2011	5:44:50 AM	PHl3 MFC set to  0.000000
8/29/2011	5:44:50 AM	SiCl4 MFC set to  0.000000
8/29/2011	5:44:50 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	5:44:50 AM	Tube furnace set to 0
8/29/2011	5:45:50 AM	Helium valve closed
8/29/2011	5:45:50 AM	H2 valve closed
8/29/2011	5:45:50 AM	BCl3 valve closed
8/29/2011	5:45:50 AM	PH3 valve closed
8/29/2011	5:45:50 AM	SiCl4 pre valve closed
8/29/2011	5:45:50 AM	SiCl4 post valve closed
8/29/2011	5:45:50 AM	Bypass valve closed
8/29/2011	5:45:50 AM	Bubbler valve closed
8/29/2011	5:45:50 AM	Main Vac valve opened
8/29/2011	5:45:50 AM	Helium MFC set to  0.000000
8/29/2011	5:45:50 AM	H2 MFC set to  0.000000
8/29/2011	5:45:50 AM	BCl3 MFC set to  0.000000
8/29/2011	5:45:50 AM	PHl3 MFC set to  0.000000
8/29/2011	5:45:50 AM	SiCl4 MFC set to  0.000000
8/29/2011	5:45:50 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	5:45:50 AM	Tube furnace set to 0
8/29/2011	5:45:51 AM	Run finished at 5:45 AM
8/29/2011	5:45:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	6:04:02 AM	Main Vac valve closed
8/29/2011	6:04:13 AM	Main Vac valve opened
8/29/2011	6:04:36 AM	Tube furnace set to 250
8/29/2011	6:05:36 AM	Tube furnace set to 0
8/29/2011	6:07:31 AM	Recipe started at 6:07 AM
8/29/2011	6:07:31 AM	Helium valve closed
8/29/2011	6:07:31 AM	H2 valve closed
8/29/2011	6:07:31 AM	BCl3 valve closed
8/29/2011	6:07:31 AM	PH3 valve closed
8/29/2011	6:07:31 AM	SiCl4 pre valve closed
8/29/2011	6:07:31 AM	SiCl4 post valve closed
8/29/2011	6:07:31 AM	Bypass valve closed
8/29/2011	6:07:31 AM	Bubbler valve closed
8/29/2011	6:07:31 AM	Main Vac valve opened
8/29/2011	6:07:31 AM	Helium MFC set to  0.000000
8/29/2011	6:07:31 AM	H2 MFC set to  0.000000
8/29/2011	6:07:31 AM	BCl3 MFC set to  0.000000
8/29/2011	6:07:31 AM	PHl3 MFC set to  0.000000
8/29/2011	6:07:31 AM	SiCl4 MFC set to  0.000000
8/29/2011	6:07:31 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	6:07:32 AM	Tube furnace set to 0
8/29/2011	6:27:32 AM	Helium valve closed
8/29/2011	6:27:32 AM	BCl3 valve closed
8/29/2011	6:27:32 AM	PH3 valve closed
8/29/2011	6:27:32 AM	SiCl4 pre valve closed
8/29/2011	6:27:32 AM	SiCl4 post valve closed
8/29/2011	6:27:32 AM	Main Vac valve closed
8/29/2011	6:27:32 AM	Bypass valve closed
8/29/2011	6:27:32 AM	Bubbler valve closed
8/29/2011	6:27:32 AM	H2 valve opened
8/29/2011	6:27:32 AM	Helium MFC set to  0.000000
8/29/2011	6:27:32 AM	H2 MFC set to  500.000000
8/29/2011	6:27:32 AM	BCl3 MFC set to  0.000000
8/29/2011	6:27:32 AM	PHl3 MFC set to  0.000000
8/29/2011	6:27:32 AM	SiCl4 MFC set to  0.000000
8/29/2011	6:27:32 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	6:27:32 AM	Tube furnace set to 1000
8/29/2011	6:28:37 AM	Helium valve closed
8/29/2011	6:28:37 AM	BCl3 valve closed
8/29/2011	6:28:37 AM	PH3 valve closed
8/29/2011	6:28:37 AM	SiCl4 pre valve closed
8/29/2011	6:28:37 AM	SiCl4 post valve closed
8/29/2011	6:28:37 AM	Main Vac valve closed
8/29/2011	6:28:37 AM	Bypass valve closed
8/29/2011	6:28:37 AM	H2 valve opened
8/29/2011	6:28:37 AM	Bubbler valve opened
8/29/2011	6:28:37 AM	Helium MFC set to  0.000000
8/29/2011	6:28:37 AM	H2 MFC set to  500.000000
8/29/2011	6:28:37 AM	BCl3 MFC set to  0.000000
8/29/2011	6:28:37 AM	PHl3 MFC set to  0.000000
8/29/2011	6:28:37 AM	SiCl4 MFC set to  0.000000
8/29/2011	6:28:37 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	6:28:37 AM	Tube furnace set to 1000
8/29/2011	6:28:38 AM	Helium valve closed
8/29/2011	6:28:38 AM	BCl3 valve closed
8/29/2011	6:28:38 AM	PH3 valve closed
8/29/2011	6:28:39 AM	SiCl4 pre valve closed
8/29/2011	6:28:39 AM	SiCl4 post valve closed
8/29/2011	6:28:39 AM	Main Vac valve closed
8/29/2011	6:28:39 AM	Bypass valve closed
8/29/2011	6:28:39 AM	H2 valve opened
8/29/2011	6:28:39 AM	Bubbler valve opened
8/29/2011	6:28:39 AM	Helium MFC set to  0.000000
8/29/2011	6:28:39 AM	H2 MFC set to  500.000000
8/29/2011	6:28:39 AM	BCl3 MFC set to  0.000000
8/29/2011	6:28:39 AM	PHl3 MFC set to  0.000000
8/29/2011	6:28:39 AM	SiCl4 MFC set to  0.000000
8/29/2011	6:28:39 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	6:28:39 AM	Tube furnace set to 1000
8/29/2011	6:48:39 AM	Helium valve closed
8/29/2011	6:48:39 AM	PH3 valve closed
8/29/2011	6:48:39 AM	Main Vac valve closed
8/29/2011	6:48:39 AM	Bypass valve closed
8/29/2011	6:48:39 AM	H2 valve opened
8/29/2011	6:48:39 AM	BCl3 valve opened
8/29/2011	6:48:39 AM	SiCl4 pre valve opened
8/29/2011	6:48:39 AM	SiCl4 post valve opened
8/29/2011	6:48:39 AM	Bubbler valve opened
8/29/2011	6:48:39 AM	Helium MFC set to  0.000000
8/29/2011	6:48:39 AM	H2 MFC set to  500.000000
8/29/2011	6:48:39 AM	BCl3 MFC set to  2.500000
8/29/2011	6:48:39 AM	PHl3 MFC set to  0.000000
8/29/2011	6:48:39 AM	SiCl4 MFC set to  50.000000
8/29/2011	6:48:39 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	6:48:39 AM	Tube furnace set to 1000
8/29/2011	7:00:39 AM	Helium valve closed
8/29/2011	7:00:39 AM	PH3 valve closed
8/29/2011	7:00:39 AM	Main Vac valve closed
8/29/2011	7:00:39 AM	Bypass valve closed
8/29/2011	7:00:39 AM	H2 valve opened
8/29/2011	7:00:39 AM	BCl3 valve opened
8/29/2011	7:00:39 AM	SiCl4 pre valve opened
8/29/2011	7:00:39 AM	SiCl4 post valve opened
8/29/2011	7:00:39 AM	Bubbler valve opened
8/29/2011	7:00:39 AM	Helium MFC set to  0.000000
8/29/2011	7:00:39 AM	H2 MFC set to  500.000000
8/29/2011	7:00:39 AM	BCl3 MFC set to  15.000000
8/29/2011	7:00:39 AM	PHl3 MFC set to  0.000000
8/29/2011	7:00:39 AM	SiCl4 MFC set to  50.000000
8/29/2011	7:00:39 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	7:00:39 AM	Tube furnace set to 1000
8/29/2011	7:01:09 AM	Helium valve closed
8/29/2011	7:01:09 AM	BCl3 valve closed
8/29/2011	7:01:09 AM	PH3 valve closed
8/29/2011	7:01:09 AM	SiCl4 pre valve closed
8/29/2011	7:01:09 AM	SiCl4 post valve closed
8/29/2011	7:01:09 AM	Main Vac valve closed
8/29/2011	7:01:09 AM	Bypass valve closed
8/29/2011	7:01:09 AM	H2 valve opened
8/29/2011	7:01:09 AM	Bubbler valve opened
8/29/2011	7:01:09 AM	Helium MFC set to  0.000000
8/29/2011	7:01:09 AM	H2 MFC set to  500.000000
8/29/2011	7:01:09 AM	BCl3 MFC set to  0.000000
8/29/2011	7:01:09 AM	PHl3 MFC set to  0.000000
8/29/2011	7:01:09 AM	SiCl4 MFC set to  0.000000
8/29/2011	7:01:09 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	7:01:09 AM	Tube furnace set to 750
8/29/2011	7:06:09 AM	H2 valve closed
8/29/2011	7:06:09 AM	BCl3 valve closed
8/29/2011	7:06:09 AM	PH3 valve closed
8/29/2011	7:06:09 AM	SiCl4 pre valve closed
8/29/2011	7:06:09 AM	SiCl4 post valve closed
8/29/2011	7:06:09 AM	Main Vac valve closed
8/29/2011	7:06:09 AM	Bypass valve closed
8/29/2011	7:06:09 AM	Helium valve opened
8/29/2011	7:06:09 AM	Bubbler valve opened
8/29/2011	7:06:09 AM	Helium MFC set to  500.000000
8/29/2011	7:06:09 AM	H2 MFC set to  0.000000
8/29/2011	7:06:09 AM	BCl3 MFC set to  0.000000
8/29/2011	7:06:09 AM	PHl3 MFC set to  0.000000
8/29/2011	7:06:09 AM	SiCl4 MFC set to  0.000000
8/29/2011	7:06:09 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	7:06:09 AM	Tube furnace set to 0
8/29/2011	7:26:09 AM	Helium valve closed
8/29/2011	7:26:09 AM	H2 valve closed
8/29/2011	7:26:09 AM	BCl3 valve closed
8/29/2011	7:26:09 AM	PH3 valve closed
8/29/2011	7:26:09 AM	SiCl4 pre valve closed
8/29/2011	7:26:09 AM	SiCl4 post valve closed
8/29/2011	7:26:09 AM	Main Vac valve closed
8/29/2011	7:26:09 AM	Bypass valve closed
8/29/2011	7:26:09 AM	Bubbler valve closed
8/29/2011	7:26:09 AM	Helium MFC set to  0.000000
8/29/2011	7:26:09 AM	H2 MFC set to  0.000000
8/29/2011	7:26:09 AM	BCl3 MFC set to  0.000000
8/29/2011	7:26:09 AM	PHl3 MFC set to  0.000000
8/29/2011	7:26:09 AM	SiCl4 MFC set to  0.000000
8/29/2011	7:26:09 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	7:26:09 AM	Tube furnace set to 0
8/29/2011	8:06:10 AM	Helium valve closed
8/29/2011	8:06:10 AM	H2 valve closed
8/29/2011	8:06:10 AM	BCl3 valve closed
8/29/2011	8:06:10 AM	PH3 valve closed
8/29/2011	8:06:10 AM	SiCl4 pre valve closed
8/29/2011	8:06:10 AM	SiCl4 post valve closed
8/29/2011	8:06:10 AM	Main Vac valve closed
8/29/2011	8:06:10 AM	Bubbler valve closed
8/29/2011	8:06:10 AM	Bypass valve opened
8/29/2011	8:06:10 AM	Helium MFC set to  0.000000
8/29/2011	8:06:10 AM	H2 MFC set to  0.000000
8/29/2011	8:06:10 AM	BCl3 MFC set to  0.000000
8/29/2011	8:06:10 AM	PHl3 MFC set to  0.000000
8/29/2011	8:06:10 AM	SiCl4 MFC set to  0.000000
8/29/2011	8:06:10 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	8:06:10 AM	Tube furnace set to 0
8/29/2011	8:06:58 AM	Helium valve closed
8/29/2011	8:06:58 AM	H2 valve closed
8/29/2011	8:06:58 AM	BCl3 valve closed
8/29/2011	8:06:58 AM	PH3 valve closed
8/29/2011	8:06:58 AM	SiCl4 pre valve closed
8/29/2011	8:06:58 AM	SiCl4 post valve closed
8/29/2011	8:06:58 AM	Main Vac valve closed
8/29/2011	8:06:58 AM	Bubbler valve closed
8/29/2011	8:06:58 AM	Bypass valve opened
8/29/2011	8:06:58 AM	Helium MFC set to  0.000000
8/29/2011	8:06:58 AM	H2 MFC set to  0.000000
8/29/2011	8:06:58 AM	BCl3 MFC set to  0.000000
8/29/2011	8:06:58 AM	PHl3 MFC set to  0.000000
8/29/2011	8:06:58 AM	SiCl4 MFC set to  0.000000
8/29/2011	8:06:58 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	8:06:59 AM	Tube furnace set to 0
8/29/2011	8:07:59 AM	Helium valve closed
8/29/2011	8:07:59 AM	H2 valve closed
8/29/2011	8:07:59 AM	BCl3 valve closed
8/29/2011	8:07:59 AM	PH3 valve closed
8/29/2011	8:07:59 AM	SiCl4 pre valve closed
8/29/2011	8:07:59 AM	SiCl4 post valve closed
8/29/2011	8:07:59 AM	Bypass valve closed
8/29/2011	8:07:59 AM	Bubbler valve closed
8/29/2011	8:07:59 AM	Main Vac valve opened
8/29/2011	8:07:59 AM	Helium MFC set to  0.000000
8/29/2011	8:07:59 AM	H2 MFC set to  0.000000
8/29/2011	8:07:59 AM	BCl3 MFC set to  0.000000
8/29/2011	8:07:59 AM	PHl3 MFC set to  0.000000
8/29/2011	8:07:59 AM	SiCl4 MFC set to  0.000000
8/29/2011	8:07:59 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	8:07:59 AM	Tube furnace set to 0
8/29/2011	8:08:00 AM	Run finished at 8:08 AM
8/29/2011	8:27:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	8:27:52 AM	Recipe started at 8:27 AM
8/29/2011	8:27:52 AM	Helium valve closed
8/29/2011	8:27:52 AM	H2 valve closed
8/29/2011	8:27:52 AM	BCl3 valve closed
8/29/2011	8:27:52 AM	PH3 valve closed
8/29/2011	8:27:52 AM	SiCl4 pre valve closed
8/29/2011	8:27:52 AM	SiCl4 post valve closed
8/29/2011	8:27:52 AM	Main Vac valve closed
8/29/2011	8:27:52 AM	Bypass valve closed
8/29/2011	8:27:52 AM	Bubbler valve closed
8/29/2011	8:27:52 AM	Helium MFC set to  0.000000
8/29/2011	8:27:52 AM	H2 MFC set to  0.000000
8/29/2011	8:27:52 AM	BCl3 MFC set to  0.000000
8/29/2011	8:27:52 AM	PHl3 MFC set to  0.000000
8/29/2011	8:27:52 AM	SiCl4 MFC set to  0.000000
8/29/2011	8:27:52 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	8:27:53 AM	Tube furnace set to 0
8/29/2011	8:27:56 AM	H2 valve closed
8/29/2011	8:27:56 AM	BCl3 valve closed
8/29/2011	8:27:56 AM	PH3 valve closed
8/29/2011	8:27:56 AM	SiCl4 pre valve closed
8/29/2011	8:27:56 AM	SiCl4 post valve closed
8/29/2011	8:27:56 AM	Main Vac valve closed
8/29/2011	8:27:56 AM	Bypass valve closed
8/29/2011	8:27:56 AM	Bubbler valve closed
8/29/2011	8:27:56 AM	Helium valve opened
8/29/2011	8:27:56 AM	Helium MFC set to  500.000000
8/29/2011	8:27:56 AM	H2 MFC set to  0.000000
8/29/2011	8:27:56 AM	BCl3 MFC set to  0.000000
8/29/2011	8:27:56 AM	PHl3 MFC set to  0.000000
8/29/2011	8:27:56 AM	SiCl4 MFC set to  0.000000
8/29/2011	8:27:56 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	8:27:56 AM	Tube furnace set to 0
8/29/2011	8:28:57 AM	Helium valve closed
8/29/2011	8:28:57 AM	H2 valve closed
8/29/2011	8:28:57 AM	BCl3 valve closed
8/29/2011	8:28:57 AM	PH3 valve closed
8/29/2011	8:28:57 AM	SiCl4 pre valve closed
8/29/2011	8:28:57 AM	SiCl4 post valve closed
8/29/2011	8:28:57 AM	Main Vac valve closed
8/29/2011	8:28:57 AM	Bypass valve closed
8/29/2011	8:28:57 AM	Bubbler valve closed
8/29/2011	8:28:57 AM	Helium MFC set to  0.000000
8/29/2011	8:28:58 AM	H2 MFC set to  0.000000
8/29/2011	8:28:58 AM	BCl3 MFC set to  0.000000
8/29/2011	8:28:58 AM	PHl3 MFC set to  0.000000
8/29/2011	8:28:58 AM	SiCl4 MFC set to  0.000000
8/29/2011	8:28:58 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	8:28:58 AM	Tube furnace set to 0
8/29/2011	8:28:59 AM	Run finished at 8:28 AM
8/29/2011	8:28:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	8:35:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	8:35:33 AM	Recipe started at 8:35 AM
8/29/2011	8:35:33 AM	Helium valve closed
8/29/2011	8:35:33 AM	H2 valve closed
8/29/2011	8:35:33 AM	BCl3 valve closed
8/29/2011	8:35:33 AM	PH3 valve closed
8/29/2011	8:35:33 AM	SiCl4 pre valve closed
8/29/2011	8:35:33 AM	SiCl4 post valve closed
8/29/2011	8:35:33 AM	Main Vac valve closed
8/29/2011	8:35:33 AM	Bypass valve closed
8/29/2011	8:35:33 AM	Bubbler valve closed
8/29/2011	8:35:33 AM	Helium MFC set to  0.000000
8/29/2011	8:35:33 AM	H2 MFC set to  0.000000
8/29/2011	8:35:33 AM	BCl3 MFC set to  0.000000
8/29/2011	8:35:33 AM	PHl3 MFC set to  0.000000
8/29/2011	8:35:33 AM	SiCl4 MFC set to  0.000000
8/29/2011	8:35:33 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	8:35:33 AM	Tube furnace set to 0
8/29/2011	8:35:36 AM	H2 valve closed
8/29/2011	8:35:36 AM	BCl3 valve closed
8/29/2011	8:35:36 AM	PH3 valve closed
8/29/2011	8:35:36 AM	SiCl4 pre valve closed
8/29/2011	8:35:36 AM	SiCl4 post valve closed
8/29/2011	8:35:36 AM	Main Vac valve closed
8/29/2011	8:35:36 AM	Bypass valve closed
8/29/2011	8:35:36 AM	Bubbler valve closed
8/29/2011	8:35:36 AM	Helium valve opened
8/29/2011	8:35:36 AM	Helium MFC set to  500.000000
8/29/2011	8:35:36 AM	H2 MFC set to  0.000000
8/29/2011	8:35:36 AM	BCl3 MFC set to  0.000000
8/29/2011	8:35:36 AM	PHl3 MFC set to  0.000000
8/29/2011	8:35:36 AM	SiCl4 MFC set to  0.000000
8/29/2011	8:35:36 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	8:35:37 AM	Tube furnace set to 0
8/29/2011	8:35:39 AM	Helium valve closed
8/29/2011	8:35:39 AM	H2 valve closed
8/29/2011	8:35:39 AM	BCl3 valve closed
8/29/2011	8:35:39 AM	PH3 valve closed
8/29/2011	8:35:39 AM	SiCl4 pre valve closed
8/29/2011	8:35:39 AM	SiCl4 post valve closed
8/29/2011	8:35:39 AM	Main Vac valve closed
8/29/2011	8:35:39 AM	Bypass valve closed
8/29/2011	8:35:39 AM	Bubbler valve closed
8/29/2011	8:35:39 AM	Helium MFC set to  0.000000
8/29/2011	8:35:39 AM	H2 MFC set to  0.000000
8/29/2011	8:35:39 AM	BCl3 MFC set to  0.000000
8/29/2011	8:35:39 AM	PHl3 MFC set to  0.000000
8/29/2011	8:35:39 AM	SiCl4 MFC set to  0.000000
8/29/2011	8:35:39 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	8:35:39 AM	Tube furnace set to 0
8/29/2011	8:35:40 AM	Run finished at 8:35 AM
8/29/2011	8:35:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	8:39:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	8:39:44 AM	Recipe started at 8:39 AM
8/29/2011	8:39:44 AM	Helium valve closed
8/29/2011	8:39:44 AM	H2 valve closed
8/29/2011	8:39:44 AM	BCl3 valve closed
8/29/2011	8:39:44 AM	PH3 valve closed
8/29/2011	8:39:44 AM	SiCl4 pre valve closed
8/29/2011	8:39:44 AM	SiCl4 post valve closed
8/29/2011	8:39:44 AM	Main Vac valve closed
8/29/2011	8:39:44 AM	Bubbler valve closed
8/29/2011	8:39:44 AM	Bypass valve opened
8/29/2011	8:39:44 AM	Helium MFC set to  0.000000
8/29/2011	8:39:44 AM	H2 MFC set to  0.000000
8/29/2011	8:39:44 AM	BCl3 MFC set to  0.000000
8/29/2011	8:39:44 AM	PHl3 MFC set to  0.000000
8/29/2011	8:39:44 AM	SiCl4 MFC set to  0.000000
8/29/2011	8:39:44 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	8:39:44 AM	Tube furnace set to 0
8/29/2011	8:40:48 AM	Helium valve closed
8/29/2011	8:40:48 AM	H2 valve closed
8/29/2011	8:40:48 AM	BCl3 valve closed
8/29/2011	8:40:48 AM	PH3 valve closed
8/29/2011	8:40:48 AM	SiCl4 pre valve closed
8/29/2011	8:40:48 AM	SiCl4 post valve closed
8/29/2011	8:40:48 AM	Main Vac valve closed
8/29/2011	8:40:48 AM	Bubbler valve closed
8/29/2011	8:40:48 AM	Bypass valve opened
8/29/2011	8:40:48 AM	Helium MFC set to  0.000000
8/29/2011	8:40:48 AM	H2 MFC set to  0.000000
8/29/2011	8:40:48 AM	BCl3 MFC set to  0.000000
8/29/2011	8:40:48 AM	PHl3 MFC set to  0.000000
8/29/2011	8:40:48 AM	SiCl4 MFC set to  0.000000
8/29/2011	8:40:48 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	8:40:49 AM	Tube furnace set to 0
8/29/2011	8:41:49 AM	Helium valve closed
8/29/2011	8:41:49 AM	H2 valve closed
8/29/2011	8:41:49 AM	BCl3 valve closed
8/29/2011	8:41:49 AM	PH3 valve closed
8/29/2011	8:41:49 AM	SiCl4 pre valve closed
8/29/2011	8:41:49 AM	SiCl4 post valve closed
8/29/2011	8:41:49 AM	Bypass valve closed
8/29/2011	8:41:49 AM	Bubbler valve closed
8/29/2011	8:41:49 AM	Main Vac valve opened
8/29/2011	8:41:49 AM	Helium MFC set to  0.000000
8/29/2011	8:41:49 AM	H2 MFC set to  0.000000
8/29/2011	8:41:49 AM	BCl3 MFC set to  0.000000
8/29/2011	8:41:49 AM	PHl3 MFC set to  0.000000
8/29/2011	8:41:49 AM	SiCl4 MFC set to  0.000000
8/29/2011	8:41:49 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	8:41:49 AM	Tube furnace set to 0
8/29/2011	8:41:50 AM	Run finished at 8:41 AM
8/29/2011	8:41:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	9:14:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	9:14:57 AM	Recipe started at 9:14 AM
8/29/2011	9:14:57 AM	Helium valve closed
8/29/2011	9:14:57 AM	H2 valve closed
8/29/2011	9:14:57 AM	BCl3 valve closed
8/29/2011	9:14:57 AM	PH3 valve closed
8/29/2011	9:14:57 AM	SiCl4 pre valve closed
8/29/2011	9:14:57 AM	SiCl4 post valve closed
8/29/2011	9:14:57 AM	Main Vac valve closed
8/29/2011	9:14:57 AM	Bypass valve closed
8/29/2011	9:14:57 AM	Bubbler valve closed
8/29/2011	9:14:57 AM	Helium MFC set to  0.000000
8/29/2011	9:14:57 AM	H2 MFC set to  0.000000
8/29/2011	9:14:57 AM	BCl3 MFC set to  0.000000
8/29/2011	9:14:57 AM	PHl3 MFC set to  0.000000
8/29/2011	9:14:57 AM	SiCl4 MFC set to  0.000000
8/29/2011	9:14:57 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:14:57 AM	Tube furnace set to 0
8/29/2011	9:15:00 AM	H2 valve closed
8/29/2011	9:15:00 AM	BCl3 valve closed
8/29/2011	9:15:00 AM	PH3 valve closed
8/29/2011	9:15:00 AM	SiCl4 pre valve closed
8/29/2011	9:15:00 AM	SiCl4 post valve closed
8/29/2011	9:15:00 AM	Main Vac valve closed
8/29/2011	9:15:00 AM	Bypass valve closed
8/29/2011	9:15:00 AM	Bubbler valve closed
8/29/2011	9:15:00 AM	Helium valve opened
8/29/2011	9:15:00 AM	Helium MFC set to  500.000000
8/29/2011	9:15:00 AM	H2 MFC set to  0.000000
8/29/2011	9:15:00 AM	BCl3 MFC set to  0.000000
8/29/2011	9:15:00 AM	PHl3 MFC set to  0.000000
8/29/2011	9:15:00 AM	SiCl4 MFC set to  0.000000
8/29/2011	9:15:00 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:15:00 AM	Tube furnace set to 0
8/29/2011	9:16:05 AM	Helium valve closed
8/29/2011	9:16:05 AM	H2 valve closed
8/29/2011	9:16:05 AM	BCl3 valve closed
8/29/2011	9:16:05 AM	PH3 valve closed
8/29/2011	9:16:05 AM	SiCl4 pre valve closed
8/29/2011	9:16:05 AM	SiCl4 post valve closed
8/29/2011	9:16:05 AM	Main Vac valve closed
8/29/2011	9:16:05 AM	Bypass valve closed
8/29/2011	9:16:05 AM	Bubbler valve closed
8/29/2011	9:16:05 AM	Helium MFC set to  0.000000
8/29/2011	9:16:05 AM	H2 MFC set to  0.000000
8/29/2011	9:16:05 AM	BCl3 MFC set to  0.000000
8/29/2011	9:16:05 AM	PHl3 MFC set to  0.000000
8/29/2011	9:16:05 AM	SiCl4 MFC set to  0.000000
8/29/2011	9:16:05 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:16:05 AM	Tube furnace set to 0
8/29/2011	9:16:06 AM	Run finished at 9:16 AM
8/29/2011	9:16:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	9:17:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	9:17:47 AM	Recipe started at 9:17 AM
8/29/2011	9:17:47 AM	Helium valve closed
8/29/2011	9:17:47 AM	H2 valve closed
8/29/2011	9:17:47 AM	BCl3 valve closed
8/29/2011	9:17:47 AM	PH3 valve closed
8/29/2011	9:17:47 AM	SiCl4 pre valve closed
8/29/2011	9:17:47 AM	SiCl4 post valve closed
8/29/2011	9:17:47 AM	Main Vac valve closed
8/29/2011	9:17:47 AM	Bubbler valve closed
8/29/2011	9:17:47 AM	Bypass valve opened
8/29/2011	9:17:47 AM	Helium MFC set to  0.000000
8/29/2011	9:17:47 AM	H2 MFC set to  0.000000
8/29/2011	9:17:47 AM	BCl3 MFC set to  0.000000
8/29/2011	9:17:47 AM	PHl3 MFC set to  0.000000
8/29/2011	9:17:47 AM	SiCl4 MFC set to  0.000000
8/29/2011	9:17:47 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:17:47 AM	Tube furnace set to 0
8/29/2011	9:18:54 AM	Helium valve closed
8/29/2011	9:18:54 AM	H2 valve closed
8/29/2011	9:18:54 AM	BCl3 valve closed
8/29/2011	9:18:54 AM	PH3 valve closed
8/29/2011	9:18:54 AM	SiCl4 pre valve closed
8/29/2011	9:18:54 AM	SiCl4 post valve closed
8/29/2011	9:18:54 AM	Main Vac valve closed
8/29/2011	9:18:54 AM	Bubbler valve closed
8/29/2011	9:18:54 AM	Bypass valve opened
8/29/2011	9:18:54 AM	Helium MFC set to  0.000000
8/29/2011	9:18:54 AM	H2 MFC set to  0.000000
8/29/2011	9:18:54 AM	BCl3 MFC set to  0.000000
8/29/2011	9:18:54 AM	PHl3 MFC set to  0.000000
8/29/2011	9:18:54 AM	SiCl4 MFC set to  0.000000
8/29/2011	9:18:54 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:18:54 AM	Tube furnace set to 0
8/29/2011	9:19:54 AM	Helium valve closed
8/29/2011	9:19:54 AM	H2 valve closed
8/29/2011	9:19:54 AM	BCl3 valve closed
8/29/2011	9:19:54 AM	PH3 valve closed
8/29/2011	9:19:54 AM	SiCl4 pre valve closed
8/29/2011	9:19:54 AM	SiCl4 post valve closed
8/29/2011	9:19:54 AM	Bypass valve closed
8/29/2011	9:19:54 AM	Bubbler valve closed
8/29/2011	9:19:54 AM	Main Vac valve opened
8/29/2011	9:19:54 AM	Helium MFC set to  0.000000
8/29/2011	9:19:54 AM	H2 MFC set to  0.000000
8/29/2011	9:19:54 AM	BCl3 MFC set to  0.000000
8/29/2011	9:19:54 AM	PHl3 MFC set to  0.000000
8/29/2011	9:19:54 AM	SiCl4 MFC set to  0.000000
8/29/2011	9:19:54 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:19:54 AM	Tube furnace set to 0
8/29/2011	9:19:55 AM	Run finished at 9:19 AM
8/29/2011	9:19:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	9:20:18 AM	Helium MFC set to  20.000000
8/29/2011	9:20:20 AM	Helium valve opened
8/29/2011	9:22:28 AM	Helium valve closed
8/29/2011	9:25:32 AM	Tube furnace set to 100
8/29/2011	9:25:34 AM	Helium valve opened
8/29/2011	9:27:25 AM	Helium valve closed
8/29/2011	9:27:54 AM	Helium valve opened
8/29/2011	9:30:10 AM	Helium valve closed
8/29/2011	9:34:34 AM	Helium valve opened
8/29/2011	9:36:03 AM	Helium valve closed
8/29/2011	9:37:31 AM	Helium MFC set to  0.000000
8/29/2011	9:38:22 AM	Main Vac valve closed
8/29/2011	9:38:32 AM	Main Vac valve opened
8/29/2011	9:41:23 AM	Recipe started at 9:41 AM
8/29/2011	9:41:23 AM	Helium valve closed
8/29/2011	9:41:23 AM	H2 valve closed
8/29/2011	9:41:23 AM	BCl3 valve closed
8/29/2011	9:41:23 AM	PH3 valve closed
8/29/2011	9:41:23 AM	SiCl4 pre valve closed
8/29/2011	9:41:23 AM	SiCl4 post valve closed
8/29/2011	9:41:23 AM	Main Vac valve closed
8/29/2011	9:41:23 AM	Bypass valve closed
8/29/2011	9:41:23 AM	Bubbler valve closed
8/29/2011	9:41:23 AM	Helium MFC set to  0.000000
8/29/2011	9:41:23 AM	H2 MFC set to  0.000000
8/29/2011	9:41:23 AM	BCl3 MFC set to  0.000000
8/29/2011	9:41:23 AM	PHl3 MFC set to  0.000000
8/29/2011	9:41:23 AM	SiCl4 MFC set to  0.000000
8/29/2011	9:41:23 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:41:23 AM	Tube furnace set to 0
8/29/2011	9:41:26 AM	Helium valve closed
8/29/2011	9:41:26 AM	BCl3 valve closed
8/29/2011	9:41:26 AM	PH3 valve closed
8/29/2011	9:41:26 AM	SiCl4 pre valve closed
8/29/2011	9:41:26 AM	SiCl4 post valve closed
8/29/2011	9:41:26 AM	Main Vac valve closed
8/29/2011	9:41:26 AM	Bypass valve closed
8/29/2011	9:41:26 AM	Bubbler valve closed
8/29/2011	9:41:26 AM	H2 valve opened
8/29/2011	9:41:26 AM	Helium MFC set to  0.000000
8/29/2011	9:41:26 AM	H2 MFC set to  500.000000
8/29/2011	9:41:26 AM	BCl3 MFC set to  0.000000
8/29/2011	9:41:26 AM	PHl3 MFC set to  0.000000
8/29/2011	9:41:26 AM	SiCl4 MFC set to  0.000000
8/29/2011	9:41:26 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:41:26 AM	Tube furnace set to 0
8/29/2011	9:42:32 AM	Helium valve closed
8/29/2011	9:42:32 AM	BCl3 valve closed
8/29/2011	9:42:32 AM	PH3 valve closed
8/29/2011	9:42:32 AM	SiCl4 pre valve closed
8/29/2011	9:42:32 AM	SiCl4 post valve closed
8/29/2011	9:42:32 AM	Main Vac valve closed
8/29/2011	9:42:32 AM	Bypass valve closed
8/29/2011	9:42:32 AM	H2 valve opened
8/29/2011	9:42:32 AM	Bubbler valve opened
8/29/2011	9:42:32 AM	Helium MFC set to  0.000000
8/29/2011	9:42:32 AM	H2 MFC set to  500.000000
8/29/2011	9:42:32 AM	BCl3 MFC set to  0.000000
8/29/2011	9:42:32 AM	PHl3 MFC set to  0.000000
8/29/2011	9:42:32 AM	SiCl4 MFC set to  0.000000
8/29/2011	9:42:32 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:42:32 AM	Tube furnace set to 0
8/29/2011	9:42:33 AM	Helium valve closed
8/29/2011	9:42:33 AM	BCl3 valve closed
8/29/2011	9:42:33 AM	PH3 valve closed
8/29/2011	9:42:33 AM	SiCl4 pre valve closed
8/29/2011	9:42:33 AM	SiCl4 post valve closed
8/29/2011	9:42:33 AM	Main Vac valve closed
8/29/2011	9:42:33 AM	Bypass valve closed
8/29/2011	9:42:33 AM	H2 valve opened
8/29/2011	9:42:33 AM	Bubbler valve opened
8/29/2011	9:42:33 AM	Helium MFC set to  0.000000
8/29/2011	9:42:33 AM	H2 MFC set to  500.000000
8/29/2011	9:42:33 AM	BCl3 MFC set to  0.000000
8/29/2011	9:42:33 AM	PHl3 MFC set to  0.000000
8/29/2011	9:42:33 AM	SiCl4 MFC set to  0.000000
8/29/2011	9:42:33 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:42:33 AM	Tube furnace set to 1000
8/29/2011	10:05:33 AM	Helium valve closed
8/29/2011	10:05:33 AM	PH3 valve closed
8/29/2011	10:05:33 AM	Main Vac valve closed
8/29/2011	10:05:33 AM	Bypass valve closed
8/29/2011	10:05:33 AM	H2 valve opened
8/29/2011	10:05:33 AM	BCl3 valve opened
8/29/2011	10:05:33 AM	SiCl4 pre valve opened
8/29/2011	10:05:33 AM	SiCl4 post valve opened
8/29/2011	10:05:33 AM	Bubbler valve opened
8/29/2011	10:05:33 AM	Helium MFC set to  0.000000
8/29/2011	10:05:33 AM	H2 MFC set to  500.000000
8/29/2011	10:05:33 AM	BCl3 MFC set to  2.000000
8/29/2011	10:05:33 AM	PHl3 MFC set to  0.000000
8/29/2011	10:05:33 AM	SiCl4 MFC set to  50.000000
8/29/2011	10:05:33 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	10:05:33 AM	Tube furnace set to 1000
8/29/2011	10:06:33 AM	Helium valve closed
8/29/2011	10:06:33 AM	BCl3 valve closed
8/29/2011	10:06:33 AM	PH3 valve closed
8/29/2011	10:06:33 AM	SiCl4 pre valve closed
8/29/2011	10:06:33 AM	SiCl4 post valve closed
8/29/2011	10:06:33 AM	Main Vac valve closed
8/29/2011	10:06:33 AM	Bypass valve closed
8/29/2011	10:06:33 AM	H2 valve opened
8/29/2011	10:06:33 AM	Bubbler valve opened
8/29/2011	10:06:33 AM	Helium MFC set to  0.000000
8/29/2011	10:06:33 AM	H2 MFC set to  500.000000
8/29/2011	10:06:33 AM	BCl3 MFC set to  0.000000
8/29/2011	10:06:33 AM	PHl3 MFC set to  0.000000
8/29/2011	10:06:33 AM	SiCl4 MFC set to  0.000000
8/29/2011	10:06:33 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	10:06:33 AM	Tube furnace set to 750
8/29/2011	10:11:33 AM	H2 valve closed
8/29/2011	10:11:33 AM	BCl3 valve closed
8/29/2011	10:11:33 AM	PH3 valve closed
8/29/2011	10:11:33 AM	SiCl4 pre valve closed
8/29/2011	10:11:33 AM	SiCl4 post valve closed
8/29/2011	10:11:33 AM	Main Vac valve closed
8/29/2011	10:11:33 AM	Bypass valve closed
8/29/2011	10:11:33 AM	Helium valve opened
8/29/2011	10:11:33 AM	Bubbler valve opened
8/29/2011	10:11:33 AM	Helium MFC set to  400.000000
8/29/2011	10:11:33 AM	H2 MFC set to  0.000000
8/29/2011	10:11:33 AM	BCl3 MFC set to  0.000000
8/29/2011	10:11:33 AM	PHl3 MFC set to  0.000000
8/29/2011	10:11:33 AM	SiCl4 MFC set to  0.000000
8/29/2011	10:11:33 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	10:11:33 AM	Tube furnace set to 0
8/29/2011	10:31:33 AM	Helium valve closed
8/29/2011	10:31:33 AM	H2 valve closed
8/29/2011	10:31:33 AM	BCl3 valve closed
8/29/2011	10:31:33 AM	PH3 valve closed
8/29/2011	10:31:33 AM	SiCl4 pre valve closed
8/29/2011	10:31:33 AM	SiCl4 post valve closed
8/29/2011	10:31:33 AM	Main Vac valve closed
8/29/2011	10:31:33 AM	Bypass valve closed
8/29/2011	10:31:33 AM	Bubbler valve closed
8/29/2011	10:31:33 AM	Helium MFC set to  0.000000
8/29/2011	10:31:33 AM	H2 MFC set to  0.000000
8/29/2011	10:31:33 AM	BCl3 MFC set to  0.000000
8/29/2011	10:31:33 AM	PHl3 MFC set to  0.000000
8/29/2011	10:31:33 AM	SiCl4 MFC set to  0.000000
8/29/2011	10:31:33 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	10:31:34 AM	Tube furnace set to 0
8/29/2011	10:37:02 AM	Run finished at 10:37 AM
8/29/2011	10:37:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	10:37:07 AM	Recipe started at 10:37 AM
8/29/2011	10:37:07 AM	Helium valve closed
8/29/2011	10:37:07 AM	H2 valve closed
8/29/2011	10:37:07 AM	BCl3 valve closed
8/29/2011	10:37:07 AM	PH3 valve closed
8/29/2011	10:37:07 AM	SiCl4 pre valve closed
8/29/2011	10:37:07 AM	SiCl4 post valve closed
8/29/2011	10:37:07 AM	Main Vac valve closed
8/29/2011	10:37:07 AM	Bypass valve closed
8/29/2011	10:37:07 AM	Bubbler valve closed
8/29/2011	10:37:07 AM	Helium MFC set to  0.000000
8/29/2011	10:37:07 AM	H2 MFC set to  0.000000
8/29/2011	10:37:07 AM	BCl3 MFC set to  0.000000
8/29/2011	10:37:07 AM	PHl3 MFC set to  0.000000
8/29/2011	10:37:07 AM	SiCl4 MFC set to  0.000000
8/29/2011	10:37:07 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	10:37:07 AM	Tube furnace set to 0
8/29/2011	10:37:10 AM	H2 valve closed
8/29/2011	10:37:10 AM	BCl3 valve closed
8/29/2011	10:37:10 AM	PH3 valve closed
8/29/2011	10:37:10 AM	SiCl4 pre valve closed
8/29/2011	10:37:10 AM	SiCl4 post valve closed
8/29/2011	10:37:10 AM	Main Vac valve closed
8/29/2011	10:37:10 AM	Bypass valve closed
8/29/2011	10:37:10 AM	Bubbler valve closed
8/29/2011	10:37:10 AM	Helium valve opened
8/29/2011	10:37:10 AM	Helium MFC set to  500.000000
8/29/2011	10:37:10 AM	H2 MFC set to  0.000000
8/29/2011	10:37:10 AM	BCl3 MFC set to  0.000000
8/29/2011	10:37:10 AM	PHl3 MFC set to  0.000000
8/29/2011	10:37:10 AM	SiCl4 MFC set to  0.000000
8/29/2011	10:37:10 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	10:37:10 AM	Tube furnace set to 0
8/29/2011	10:37:10 AM	Helium valve closed
8/29/2011	10:37:10 AM	H2 valve closed
8/29/2011	10:37:10 AM	BCl3 valve closed
8/29/2011	10:37:10 AM	PH3 valve closed
8/29/2011	10:37:10 AM	SiCl4 pre valve closed
8/29/2011	10:37:10 AM	SiCl4 post valve closed
8/29/2011	10:37:10 AM	Main Vac valve closed
8/29/2011	10:37:10 AM	Bypass valve closed
8/29/2011	10:37:10 AM	Bubbler valve closed
8/29/2011	10:37:10 AM	Helium MFC set to  0.000000
8/29/2011	10:37:10 AM	H2 MFC set to  0.000000
8/29/2011	10:37:10 AM	BCl3 MFC set to  0.000000
8/29/2011	10:37:10 AM	PHl3 MFC set to  0.000000
8/29/2011	10:37:10 AM	SiCl4 MFC set to  0.000000
8/29/2011	10:37:10 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	10:37:10 AM	Tube furnace set to 0
8/29/2011	10:37:11 AM	Run finished at 10:37 AM
8/29/2011	10:37:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	10:43:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	10:43:11 AM	Recipe started at 10:43 AM
8/29/2011	10:43:11 AM	Helium valve closed
8/29/2011	10:43:11 AM	H2 valve closed
8/29/2011	10:43:11 AM	BCl3 valve closed
8/29/2011	10:43:11 AM	PH3 valve closed
8/29/2011	10:43:11 AM	SiCl4 pre valve closed
8/29/2011	10:43:11 AM	SiCl4 post valve closed
8/29/2011	10:43:11 AM	Main Vac valve closed
8/29/2011	10:43:11 AM	Bubbler valve closed
8/29/2011	10:43:11 AM	Bypass valve opened
8/29/2011	10:43:11 AM	Helium MFC set to  0.000000
8/29/2011	10:43:11 AM	H2 MFC set to  0.000000
8/29/2011	10:43:11 AM	BCl3 MFC set to  0.000000
8/29/2011	10:43:11 AM	PHl3 MFC set to  0.000000
8/29/2011	10:43:11 AM	SiCl4 MFC set to  0.000000
8/29/2011	10:43:11 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	10:43:11 AM	Tube furnace set to 0
8/29/2011	10:44:19 AM	Helium valve closed
8/29/2011	10:44:19 AM	H2 valve closed
8/29/2011	10:44:19 AM	BCl3 valve closed
8/29/2011	10:44:19 AM	PH3 valve closed
8/29/2011	10:44:19 AM	SiCl4 pre valve closed
8/29/2011	10:44:19 AM	SiCl4 post valve closed
8/29/2011	10:44:19 AM	Main Vac valve closed
8/29/2011	10:44:19 AM	Bubbler valve closed
8/29/2011	10:44:19 AM	Bypass valve opened
8/29/2011	10:44:19 AM	Helium MFC set to  0.000000
8/29/2011	10:44:19 AM	H2 MFC set to  0.000000
8/29/2011	10:44:19 AM	BCl3 MFC set to  0.000000
8/29/2011	10:44:19 AM	PHl3 MFC set to  0.000000
8/29/2011	10:44:19 AM	SiCl4 MFC set to  0.000000
8/29/2011	10:44:19 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	10:44:19 AM	Tube furnace set to 0
8/29/2011	10:45:19 AM	Helium valve closed
8/29/2011	10:45:19 AM	H2 valve closed
8/29/2011	10:45:19 AM	BCl3 valve closed
8/29/2011	10:45:19 AM	PH3 valve closed
8/29/2011	10:45:19 AM	SiCl4 pre valve closed
8/29/2011	10:45:19 AM	SiCl4 post valve closed
8/29/2011	10:45:19 AM	Bypass valve closed
8/29/2011	10:45:19 AM	Bubbler valve closed
8/29/2011	10:45:19 AM	Main Vac valve opened
8/29/2011	10:45:19 AM	Helium MFC set to  0.000000
8/29/2011	10:45:19 AM	H2 MFC set to  0.000000
8/29/2011	10:45:19 AM	BCl3 MFC set to  0.000000
8/29/2011	10:45:19 AM	PHl3 MFC set to  0.000000
8/29/2011	10:45:19 AM	SiCl4 MFC set to  0.000000
8/29/2011	10:45:19 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	10:45:19 AM	Tube furnace set to 0
8/29/2011	10:45:20 AM	Run finished at 10:45 AM
8/29/2011	10:45:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	11:19:42 AM	Main Vac valve closed
8/29/2011	11:19:53 AM	Main Vac valve opened
8/29/2011	11:22:02 AM	Recipe started at 11:22 AM
8/29/2011	11:22:02 AM	Helium valve closed
8/29/2011	11:22:02 AM	H2 valve closed
8/29/2011	11:22:02 AM	BCl3 valve closed
8/29/2011	11:22:02 AM	PH3 valve closed
8/29/2011	11:22:02 AM	SiCl4 pre valve closed
8/29/2011	11:22:02 AM	SiCl4 post valve closed
8/29/2011	11:22:02 AM	Main Vac valve closed
8/29/2011	11:22:02 AM	Bypass valve closed
8/29/2011	11:22:02 AM	Bubbler valve closed
8/29/2011	11:22:02 AM	Helium MFC set to  0.000000
8/29/2011	11:22:02 AM	H2 MFC set to  0.000000
8/29/2011	11:22:02 AM	BCl3 MFC set to  0.000000
8/29/2011	11:22:02 AM	PHl3 MFC set to  0.000000
8/29/2011	11:22:02 AM	SiCl4 MFC set to  0.000000
8/29/2011	11:22:02 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	11:22:02 AM	Tube furnace set to 0
8/29/2011	11:22:05 AM	Helium valve closed
8/29/2011	11:22:05 AM	BCl3 valve closed
8/29/2011	11:22:05 AM	PH3 valve closed
8/29/2011	11:22:05 AM	SiCl4 pre valve closed
8/29/2011	11:22:05 AM	SiCl4 post valve closed
8/29/2011	11:22:05 AM	Main Vac valve closed
8/29/2011	11:22:05 AM	Bypass valve closed
8/29/2011	11:22:05 AM	Bubbler valve closed
8/29/2011	11:22:05 AM	H2 valve opened
8/29/2011	11:22:05 AM	Helium MFC set to  0.000000
8/29/2011	11:22:05 AM	H2 MFC set to  500.000000
8/29/2011	11:22:05 AM	BCl3 MFC set to  0.000000
8/29/2011	11:22:05 AM	PHl3 MFC set to  0.000000
8/29/2011	11:22:05 AM	SiCl4 MFC set to  0.000000
8/29/2011	11:22:05 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	11:22:05 AM	Tube furnace set to 0
8/29/2011	11:23:10 AM	Helium valve closed
8/29/2011	11:23:10 AM	BCl3 valve closed
8/29/2011	11:23:10 AM	PH3 valve closed
8/29/2011	11:23:10 AM	SiCl4 pre valve closed
8/29/2011	11:23:10 AM	SiCl4 post valve closed
8/29/2011	11:23:10 AM	Main Vac valve closed
8/29/2011	11:23:10 AM	Bypass valve closed
8/29/2011	11:23:10 AM	H2 valve opened
8/29/2011	11:23:10 AM	Bubbler valve opened
8/29/2011	11:23:10 AM	Helium MFC set to  0.000000
8/29/2011	11:23:10 AM	H2 MFC set to  500.000000
8/29/2011	11:23:10 AM	BCl3 MFC set to  0.000000
8/29/2011	11:23:10 AM	PHl3 MFC set to  0.000000
8/29/2011	11:23:10 AM	SiCl4 MFC set to  0.000000
8/29/2011	11:23:10 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	11:23:11 AM	Tube furnace set to 0
8/29/2011	11:23:12 AM	Helium valve closed
8/29/2011	11:23:12 AM	BCl3 valve closed
8/29/2011	11:23:12 AM	PH3 valve closed
8/29/2011	11:23:12 AM	SiCl4 pre valve closed
8/29/2011	11:23:12 AM	SiCl4 post valve closed
8/29/2011	11:23:12 AM	Main Vac valve closed
8/29/2011	11:23:12 AM	Bypass valve closed
8/29/2011	11:23:12 AM	H2 valve opened
8/29/2011	11:23:12 AM	Bubbler valve opened
8/29/2011	11:23:12 AM	Helium MFC set to  0.000000
8/29/2011	11:23:12 AM	H2 MFC set to  500.000000
8/29/2011	11:23:12 AM	BCl3 MFC set to  0.000000
8/29/2011	11:23:12 AM	PHl3 MFC set to  0.000000
8/29/2011	11:23:12 AM	SiCl4 MFC set to  0.000000
8/29/2011	11:23:12 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	11:23:12 AM	Tube furnace set to 1000
8/29/2011	11:45:12 AM	Helium valve closed
8/29/2011	11:45:12 AM	PH3 valve closed
8/29/2011	11:45:12 AM	Main Vac valve closed
8/29/2011	11:45:12 AM	Bypass valve closed
8/29/2011	11:45:12 AM	H2 valve opened
8/29/2011	11:45:12 AM	BCl3 valve opened
8/29/2011	11:45:12 AM	SiCl4 pre valve opened
8/29/2011	11:45:12 AM	SiCl4 post valve opened
8/29/2011	11:45:12 AM	Bubbler valve opened
8/29/2011	11:45:12 AM	Helium MFC set to  0.000000
8/29/2011	11:45:12 AM	H2 MFC set to  500.000000
8/29/2011	11:45:12 AM	BCl3 MFC set to  2.000000
8/29/2011	11:45:12 AM	PHl3 MFC set to  0.000000
8/29/2011	11:45:12 AM	SiCl4 MFC set to  50.000000
8/29/2011	11:45:12 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	11:45:12 AM	Tube furnace set to 1000
8/29/2011	11:46:12 AM	Helium valve closed
8/29/2011	11:46:12 AM	BCl3 valve closed
8/29/2011	11:46:12 AM	PH3 valve closed
8/29/2011	11:46:12 AM	SiCl4 pre valve closed
8/29/2011	11:46:12 AM	SiCl4 post valve closed
8/29/2011	11:46:12 AM	Main Vac valve closed
8/29/2011	11:46:12 AM	Bypass valve closed
8/29/2011	11:46:12 AM	H2 valve opened
8/29/2011	11:46:12 AM	Bubbler valve opened
8/29/2011	11:46:12 AM	Helium MFC set to  0.000000
8/29/2011	11:46:12 AM	H2 MFC set to  500.000000
8/29/2011	11:46:12 AM	BCl3 MFC set to  0.000000
8/29/2011	11:46:12 AM	PHl3 MFC set to  0.000000
8/29/2011	11:46:12 AM	SiCl4 MFC set to  0.000000
8/29/2011	11:46:12 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	11:46:12 AM	Tube furnace set to 750
8/29/2011	11:51:12 AM	H2 valve closed
8/29/2011	11:51:12 AM	BCl3 valve closed
8/29/2011	11:51:12 AM	PH3 valve closed
8/29/2011	11:51:12 AM	SiCl4 pre valve closed
8/29/2011	11:51:12 AM	SiCl4 post valve closed
8/29/2011	11:51:12 AM	Main Vac valve closed
8/29/2011	11:51:12 AM	Bypass valve closed
8/29/2011	11:51:12 AM	Helium valve opened
8/29/2011	11:51:12 AM	Bubbler valve opened
8/29/2011	11:51:12 AM	Helium MFC set to  400.000000
8/29/2011	11:51:12 AM	H2 MFC set to  0.000000
8/29/2011	11:51:12 AM	BCl3 MFC set to  0.000000
8/29/2011	11:51:12 AM	PHl3 MFC set to  0.000000
8/29/2011	11:51:12 AM	SiCl4 MFC set to  0.000000
8/29/2011	11:51:12 AM	Bypass solenoid MFC set to  0.000000
8/29/2011	11:51:12 AM	Tube furnace set to 0
8/29/2011	12:11:12 PM	Helium valve closed
8/29/2011	12:11:12 PM	H2 valve closed
8/29/2011	12:11:12 PM	BCl3 valve closed
8/29/2011	12:11:12 PM	PH3 valve closed
8/29/2011	12:11:12 PM	SiCl4 pre valve closed
8/29/2011	12:11:12 PM	SiCl4 post valve closed
8/29/2011	12:11:12 PM	Main Vac valve closed
8/29/2011	12:11:12 PM	Bypass valve closed
8/29/2011	12:11:12 PM	Bubbler valve closed
8/29/2011	12:11:12 PM	Helium MFC set to  0.000000
8/29/2011	12:11:12 PM	H2 MFC set to  0.000000
8/29/2011	12:11:12 PM	BCl3 MFC set to  0.000000
8/29/2011	12:11:12 PM	PHl3 MFC set to  0.000000
8/29/2011	12:11:12 PM	SiCl4 MFC set to  0.000000
8/29/2011	12:11:12 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	12:11:12 PM	Tube furnace set to 0
8/29/2011	12:13:10 PM	Run finished at 12:13 PM
8/29/2011	12:13:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	12:13:13 PM	Recipe started at 12:13 PM
8/29/2011	12:13:13 PM	Helium valve closed
8/29/2011	12:13:13 PM	H2 valve closed
8/29/2011	12:13:13 PM	BCl3 valve closed
8/29/2011	12:13:13 PM	PH3 valve closed
8/29/2011	12:13:13 PM	SiCl4 pre valve closed
8/29/2011	12:13:13 PM	SiCl4 post valve closed
8/29/2011	12:13:13 PM	Main Vac valve closed
8/29/2011	12:13:13 PM	Bypass valve closed
8/29/2011	12:13:13 PM	Bubbler valve closed
8/29/2011	12:13:13 PM	Helium MFC set to  0.000000
8/29/2011	12:13:13 PM	H2 MFC set to  0.000000
8/29/2011	12:13:13 PM	BCl3 MFC set to  0.000000
8/29/2011	12:13:13 PM	PHl3 MFC set to  0.000000
8/29/2011	12:13:13 PM	SiCl4 MFC set to  0.000000
8/29/2011	12:13:13 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	12:13:13 PM	Tube furnace set to 0
8/29/2011	12:13:16 PM	H2 valve closed
8/29/2011	12:13:16 PM	BCl3 valve closed
8/29/2011	12:13:16 PM	PH3 valve closed
8/29/2011	12:13:16 PM	SiCl4 pre valve closed
8/29/2011	12:13:16 PM	SiCl4 post valve closed
8/29/2011	12:13:16 PM	Main Vac valve closed
8/29/2011	12:13:16 PM	Bypass valve closed
8/29/2011	12:13:16 PM	Bubbler valve closed
8/29/2011	12:13:16 PM	Helium valve opened
8/29/2011	12:13:16 PM	Helium MFC set to  500.000000
8/29/2011	12:13:16 PM	H2 MFC set to  0.000000
8/29/2011	12:13:16 PM	BCl3 MFC set to  0.000000
8/29/2011	12:13:16 PM	PHl3 MFC set to  0.000000
8/29/2011	12:13:16 PM	SiCl4 MFC set to  0.000000
8/29/2011	12:13:16 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	12:13:16 PM	Tube furnace set to 0
8/29/2011	12:13:16 PM	Helium valve closed
8/29/2011	12:13:16 PM	H2 valve closed
8/29/2011	12:13:16 PM	BCl3 valve closed
8/29/2011	12:13:16 PM	PH3 valve closed
8/29/2011	12:13:16 PM	SiCl4 pre valve closed
8/29/2011	12:13:16 PM	SiCl4 post valve closed
8/29/2011	12:13:16 PM	Main Vac valve closed
8/29/2011	12:13:16 PM	Bypass valve closed
8/29/2011	12:13:16 PM	Bubbler valve closed
8/29/2011	12:13:16 PM	Helium MFC set to  0.000000
8/29/2011	12:13:16 PM	H2 MFC set to  0.000000
8/29/2011	12:13:16 PM	BCl3 MFC set to  0.000000
8/29/2011	12:13:16 PM	PHl3 MFC set to  0.000000
8/29/2011	12:13:16 PM	SiCl4 MFC set to  0.000000
8/29/2011	12:13:16 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	12:13:17 PM	Tube furnace set to 0
8/29/2011	12:13:18 PM	Run finished at 12:13 PM
8/29/2011	12:13:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	12:18:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	12:18:04 PM	Recipe started at 12:18 PM
8/29/2011	12:18:04 PM	Helium valve closed
8/29/2011	12:18:04 PM	H2 valve closed
8/29/2011	12:18:04 PM	BCl3 valve closed
8/29/2011	12:18:04 PM	PH3 valve closed
8/29/2011	12:18:04 PM	SiCl4 pre valve closed
8/29/2011	12:18:04 PM	SiCl4 post valve closed
8/29/2011	12:18:04 PM	Main Vac valve closed
8/29/2011	12:18:04 PM	Bubbler valve closed
8/29/2011	12:18:04 PM	Bypass valve opened
8/29/2011	12:18:04 PM	Helium MFC set to  0.000000
8/29/2011	12:18:04 PM	H2 MFC set to  0.000000
8/29/2011	12:18:04 PM	BCl3 MFC set to  0.000000
8/29/2011	12:18:04 PM	PHl3 MFC set to  0.000000
8/29/2011	12:18:04 PM	SiCl4 MFC set to  0.000000
8/29/2011	12:18:04 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	12:18:04 PM	Tube furnace set to 0
8/29/2011	12:19:07 PM	Helium valve closed
8/29/2011	12:19:07 PM	H2 valve closed
8/29/2011	12:19:07 PM	BCl3 valve closed
8/29/2011	12:19:07 PM	PH3 valve closed
8/29/2011	12:19:07 PM	SiCl4 pre valve closed
8/29/2011	12:19:07 PM	SiCl4 post valve closed
8/29/2011	12:19:07 PM	Main Vac valve closed
8/29/2011	12:19:07 PM	Bubbler valve closed
8/29/2011	12:19:07 PM	Bypass valve opened
8/29/2011	12:19:07 PM	Helium MFC set to  0.000000
8/29/2011	12:19:07 PM	H2 MFC set to  0.000000
8/29/2011	12:19:07 PM	BCl3 MFC set to  0.000000
8/29/2011	12:19:07 PM	PHl3 MFC set to  0.000000
8/29/2011	12:19:07 PM	SiCl4 MFC set to  0.000000
8/29/2011	12:19:07 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	12:19:07 PM	Tube furnace set to 0
8/29/2011	12:20:07 PM	Helium valve closed
8/29/2011	12:20:07 PM	H2 valve closed
8/29/2011	12:20:07 PM	BCl3 valve closed
8/29/2011	12:20:07 PM	PH3 valve closed
8/29/2011	12:20:07 PM	SiCl4 pre valve closed
8/29/2011	12:20:07 PM	SiCl4 post valve closed
8/29/2011	12:20:07 PM	Bypass valve closed
8/29/2011	12:20:07 PM	Bubbler valve closed
8/29/2011	12:20:07 PM	Main Vac valve opened
8/29/2011	12:20:07 PM	Helium MFC set to  0.000000
8/29/2011	12:20:07 PM	H2 MFC set to  0.000000
8/29/2011	12:20:07 PM	BCl3 MFC set to  0.000000
8/29/2011	12:20:07 PM	PHl3 MFC set to  0.000000
8/29/2011	12:20:07 PM	SiCl4 MFC set to  0.000000
8/29/2011	12:20:07 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	12:20:07 PM	Tube furnace set to 0
8/29/2011	12:20:08 PM	Run finished at 12:20 PM
8/29/2011	12:20:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	1:21:12 PM	Main Vac valve closed
8/29/2011	1:21:23 PM	Main Vac valve opened
8/29/2011	1:22:57 PM	Recipe started at 1:22 PM
8/29/2011	1:22:57 PM	Helium valve closed
8/29/2011	1:22:57 PM	H2 valve closed
8/29/2011	1:22:57 PM	BCl3 valve closed
8/29/2011	1:22:57 PM	PH3 valve closed
8/29/2011	1:22:57 PM	SiCl4 pre valve closed
8/29/2011	1:22:57 PM	SiCl4 post valve closed
8/29/2011	1:22:57 PM	Main Vac valve closed
8/29/2011	1:22:57 PM	Bypass valve closed
8/29/2011	1:22:57 PM	Bubbler valve closed
8/29/2011	1:22:57 PM	Helium MFC set to  0.000000
8/29/2011	1:22:57 PM	H2 MFC set to  0.000000
8/29/2011	1:22:57 PM	BCl3 MFC set to  0.000000
8/29/2011	1:22:57 PM	PHl3 MFC set to  0.000000
8/29/2011	1:22:57 PM	SiCl4 MFC set to  0.000000
8/29/2011	1:22:57 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:22:57 PM	Tube furnace set to 0
8/29/2011	1:23:00 PM	Helium valve closed
8/29/2011	1:23:00 PM	BCl3 valve closed
8/29/2011	1:23:00 PM	PH3 valve closed
8/29/2011	1:23:00 PM	SiCl4 pre valve closed
8/29/2011	1:23:00 PM	SiCl4 post valve closed
8/29/2011	1:23:00 PM	Main Vac valve closed
8/29/2011	1:23:00 PM	Bypass valve closed
8/29/2011	1:23:00 PM	Bubbler valve closed
8/29/2011	1:23:00 PM	H2 valve opened
8/29/2011	1:23:00 PM	Helium MFC set to  0.000000
8/29/2011	1:23:00 PM	H2 MFC set to  500.000000
8/29/2011	1:23:00 PM	BCl3 MFC set to  0.000000
8/29/2011	1:23:00 PM	PHl3 MFC set to  0.000000
8/29/2011	1:23:00 PM	SiCl4 MFC set to  0.000000
8/29/2011	1:23:00 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:23:01 PM	Tube furnace set to 0
8/29/2011	1:24:05 PM	Helium valve closed
8/29/2011	1:24:05 PM	BCl3 valve closed
8/29/2011	1:24:05 PM	PH3 valve closed
8/29/2011	1:24:05 PM	SiCl4 pre valve closed
8/29/2011	1:24:05 PM	SiCl4 post valve closed
8/29/2011	1:24:05 PM	Main Vac valve closed
8/29/2011	1:24:05 PM	Bypass valve closed
8/29/2011	1:24:05 PM	H2 valve opened
8/29/2011	1:24:05 PM	Bubbler valve opened
8/29/2011	1:24:05 PM	Helium MFC set to  0.000000
8/29/2011	1:24:05 PM	H2 MFC set to  500.000000
8/29/2011	1:24:05 PM	BCl3 MFC set to  0.000000
8/29/2011	1:24:05 PM	PHl3 MFC set to  0.000000
8/29/2011	1:24:05 PM	SiCl4 MFC set to  0.000000
8/29/2011	1:24:05 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:24:05 PM	Tube furnace set to 0
8/29/2011	1:24:06 PM	Helium valve closed
8/29/2011	1:24:06 PM	BCl3 valve closed
8/29/2011	1:24:06 PM	PH3 valve closed
8/29/2011	1:24:06 PM	SiCl4 pre valve closed
8/29/2011	1:24:06 PM	SiCl4 post valve closed
8/29/2011	1:24:06 PM	Main Vac valve closed
8/29/2011	1:24:06 PM	Bypass valve closed
8/29/2011	1:24:06 PM	H2 valve opened
8/29/2011	1:24:06 PM	Bubbler valve opened
8/29/2011	1:24:06 PM	Helium MFC set to  0.000000
8/29/2011	1:24:06 PM	H2 MFC set to  500.000000
8/29/2011	1:24:06 PM	BCl3 MFC set to  0.000000
8/29/2011	1:24:06 PM	PHl3 MFC set to  0.000000
8/29/2011	1:24:06 PM	SiCl4 MFC set to  0.000000
8/29/2011	1:24:06 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:24:06 PM	Tube furnace set to 1000
8/29/2011	1:47:06 PM	Helium valve closed
8/29/2011	1:47:06 PM	PH3 valve closed
8/29/2011	1:47:06 PM	Main Vac valve closed
8/29/2011	1:47:06 PM	Bypass valve closed
8/29/2011	1:47:06 PM	H2 valve opened
8/29/2011	1:47:06 PM	BCl3 valve opened
8/29/2011	1:47:06 PM	SiCl4 pre valve opened
8/29/2011	1:47:06 PM	SiCl4 post valve opened
8/29/2011	1:47:06 PM	Bubbler valve opened
8/29/2011	1:47:06 PM	Helium MFC set to  0.000000
8/29/2011	1:47:06 PM	H2 MFC set to  500.000000
8/29/2011	1:47:06 PM	BCl3 MFC set to  2.000000
8/29/2011	1:47:06 PM	PHl3 MFC set to  0.000000
8/29/2011	1:47:06 PM	SiCl4 MFC set to  50.000000
8/29/2011	1:47:06 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:47:07 PM	Tube furnace set to 1000
8/29/2011	1:48:07 PM	Helium valve closed
8/29/2011	1:48:07 PM	BCl3 valve closed
8/29/2011	1:48:07 PM	PH3 valve closed
8/29/2011	1:48:07 PM	SiCl4 pre valve closed
8/29/2011	1:48:07 PM	SiCl4 post valve closed
8/29/2011	1:48:07 PM	Main Vac valve closed
8/29/2011	1:48:07 PM	Bypass valve closed
8/29/2011	1:48:07 PM	H2 valve opened
8/29/2011	1:48:07 PM	Bubbler valve opened
8/29/2011	1:48:07 PM	Helium MFC set to  0.000000
8/29/2011	1:48:07 PM	H2 MFC set to  500.000000
8/29/2011	1:48:07 PM	BCl3 MFC set to  0.000000
8/29/2011	1:48:07 PM	PHl3 MFC set to  0.000000
8/29/2011	1:48:07 PM	SiCl4 MFC set to  0.000000
8/29/2011	1:48:07 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:48:07 PM	Tube furnace set to 750
8/29/2011	1:53:07 PM	H2 valve closed
8/29/2011	1:53:07 PM	BCl3 valve closed
8/29/2011	1:53:07 PM	PH3 valve closed
8/29/2011	1:53:07 PM	SiCl4 pre valve closed
8/29/2011	1:53:07 PM	SiCl4 post valve closed
8/29/2011	1:53:07 PM	Main Vac valve closed
8/29/2011	1:53:07 PM	Bypass valve closed
8/29/2011	1:53:07 PM	Helium valve opened
8/29/2011	1:53:07 PM	Bubbler valve opened
8/29/2011	1:53:07 PM	Helium MFC set to  400.000000
8/29/2011	1:53:07 PM	H2 MFC set to  0.000000
8/29/2011	1:53:07 PM	BCl3 MFC set to  0.000000
8/29/2011	1:53:07 PM	PHl3 MFC set to  0.000000
8/29/2011	1:53:07 PM	SiCl4 MFC set to  0.000000
8/29/2011	1:53:07 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	1:53:07 PM	Tube furnace set to 0
8/29/2011	2:13:07 PM	Helium valve closed
8/29/2011	2:13:07 PM	H2 valve closed
8/29/2011	2:13:07 PM	BCl3 valve closed
8/29/2011	2:13:07 PM	PH3 valve closed
8/29/2011	2:13:07 PM	SiCl4 pre valve closed
8/29/2011	2:13:07 PM	SiCl4 post valve closed
8/29/2011	2:13:07 PM	Main Vac valve closed
8/29/2011	2:13:07 PM	Bypass valve closed
8/29/2011	2:13:07 PM	Bubbler valve closed
8/29/2011	2:13:07 PM	Helium MFC set to  0.000000
8/29/2011	2:13:07 PM	H2 MFC set to  0.000000
8/29/2011	2:13:07 PM	BCl3 MFC set to  0.000000
8/29/2011	2:13:07 PM	PHl3 MFC set to  0.000000
8/29/2011	2:13:07 PM	SiCl4 MFC set to  0.000000
8/29/2011	2:13:07 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	2:13:07 PM	Tube furnace set to 0
8/29/2011	2:47:01 PM	Run finished at 2:47 PM
8/29/2011	2:47:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	2:47:10 PM	Recipe started at 2:47 PM
8/29/2011	2:47:10 PM	Helium valve closed
8/29/2011	2:47:10 PM	H2 valve closed
8/29/2011	2:47:10 PM	BCl3 valve closed
8/29/2011	2:47:10 PM	PH3 valve closed
8/29/2011	2:47:10 PM	SiCl4 pre valve closed
8/29/2011	2:47:10 PM	SiCl4 post valve closed
8/29/2011	2:47:10 PM	Main Vac valve closed
8/29/2011	2:47:10 PM	Bypass valve closed
8/29/2011	2:47:10 PM	Bubbler valve closed
8/29/2011	2:47:10 PM	Helium MFC set to  0.000000
8/29/2011	2:47:10 PM	H2 MFC set to  0.000000
8/29/2011	2:47:10 PM	BCl3 MFC set to  0.000000
8/29/2011	2:47:10 PM	PHl3 MFC set to  0.000000
8/29/2011	2:47:10 PM	SiCl4 MFC set to  0.000000
8/29/2011	2:47:10 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	2:47:10 PM	Tube furnace set to 0
8/29/2011	2:47:13 PM	H2 valve closed
8/29/2011	2:47:13 PM	BCl3 valve closed
8/29/2011	2:47:13 PM	PH3 valve closed
8/29/2011	2:47:13 PM	SiCl4 pre valve closed
8/29/2011	2:47:13 PM	SiCl4 post valve closed
8/29/2011	2:47:13 PM	Main Vac valve closed
8/29/2011	2:47:13 PM	Bypass valve closed
8/29/2011	2:47:13 PM	Bubbler valve closed
8/29/2011	2:47:13 PM	Helium valve opened
8/29/2011	2:47:13 PM	Helium MFC set to  500.000000
8/29/2011	2:47:13 PM	H2 MFC set to  0.000000
8/29/2011	2:47:13 PM	BCl3 MFC set to  0.000000
8/29/2011	2:47:13 PM	PHl3 MFC set to  0.000000
8/29/2011	2:47:13 PM	SiCl4 MFC set to  0.000000
8/29/2011	2:47:13 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	2:47:13 PM	Tube furnace set to 0
8/29/2011	2:47:14 PM	Helium valve closed
8/29/2011	2:47:14 PM	H2 valve closed
8/29/2011	2:47:14 PM	BCl3 valve closed
8/29/2011	2:47:14 PM	PH3 valve closed
8/29/2011	2:47:14 PM	SiCl4 pre valve closed
8/29/2011	2:47:14 PM	SiCl4 post valve closed
8/29/2011	2:47:14 PM	Main Vac valve closed
8/29/2011	2:47:14 PM	Bypass valve closed
8/29/2011	2:47:14 PM	Bubbler valve closed
8/29/2011	2:47:14 PM	Helium MFC set to  0.000000
8/29/2011	2:47:14 PM	H2 MFC set to  0.000000
8/29/2011	2:47:14 PM	BCl3 MFC set to  0.000000
8/29/2011	2:47:14 PM	PHl3 MFC set to  0.000000
8/29/2011	2:47:14 PM	SiCl4 MFC set to  0.000000
8/29/2011	2:47:14 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	2:47:14 PM	Tube furnace set to 0
8/29/2011	2:47:15 PM	Run finished at 2:47 PM
8/29/2011	2:47:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	2:50:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	2:50:54 PM	Recipe started at 2:50 PM
8/29/2011	2:50:54 PM	Helium valve closed
8/29/2011	2:50:54 PM	H2 valve closed
8/29/2011	2:50:54 PM	BCl3 valve closed
8/29/2011	2:50:54 PM	PH3 valve closed
8/29/2011	2:50:54 PM	SiCl4 pre valve closed
8/29/2011	2:50:54 PM	SiCl4 post valve closed
8/29/2011	2:50:54 PM	Main Vac valve closed
8/29/2011	2:50:54 PM	Bubbler valve closed
8/29/2011	2:50:54 PM	Bypass valve opened
8/29/2011	2:50:54 PM	Helium MFC set to  0.000000
8/29/2011	2:50:54 PM	H2 MFC set to  0.000000
8/29/2011	2:50:54 PM	BCl3 MFC set to  0.000000
8/29/2011	2:50:54 PM	PHl3 MFC set to  0.000000
8/29/2011	2:50:54 PM	SiCl4 MFC set to  0.000000
8/29/2011	2:50:54 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	2:50:54 PM	Tube furnace set to 0
8/29/2011	2:52:00 PM	Helium valve closed
8/29/2011	2:52:00 PM	H2 valve closed
8/29/2011	2:52:00 PM	BCl3 valve closed
8/29/2011	2:52:00 PM	PH3 valve closed
8/29/2011	2:52:00 PM	SiCl4 pre valve closed
8/29/2011	2:52:00 PM	SiCl4 post valve closed
8/29/2011	2:52:00 PM	Main Vac valve closed
8/29/2011	2:52:00 PM	Bubbler valve closed
8/29/2011	2:52:00 PM	Bypass valve opened
8/29/2011	2:52:00 PM	Helium MFC set to  0.000000
8/29/2011	2:52:00 PM	H2 MFC set to  0.000000
8/29/2011	2:52:00 PM	BCl3 MFC set to  0.000000
8/29/2011	2:52:00 PM	PHl3 MFC set to  0.000000
8/29/2011	2:52:00 PM	SiCl4 MFC set to  0.000000
8/29/2011	2:52:00 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	2:52:00 PM	Tube furnace set to 0
8/29/2011	2:53:00 PM	Helium valve closed
8/29/2011	2:53:00 PM	H2 valve closed
8/29/2011	2:53:00 PM	BCl3 valve closed
8/29/2011	2:53:00 PM	PH3 valve closed
8/29/2011	2:53:00 PM	SiCl4 pre valve closed
8/29/2011	2:53:00 PM	SiCl4 post valve closed
8/29/2011	2:53:00 PM	Bypass valve closed
8/29/2011	2:53:00 PM	Bubbler valve closed
8/29/2011	2:53:00 PM	Main Vac valve opened
8/29/2011	2:53:00 PM	Helium MFC set to  0.000000
8/29/2011	2:53:00 PM	H2 MFC set to  0.000000
8/29/2011	2:53:00 PM	BCl3 MFC set to  0.000000
8/29/2011	2:53:00 PM	PHl3 MFC set to  0.000000
8/29/2011	2:53:00 PM	SiCl4 MFC set to  0.000000
8/29/2011	2:53:00 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	2:53:00 PM	Tube furnace set to 0
8/29/2011	2:53:01 PM	Run finished at 2:53 PM
8/29/2011	2:53:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	3:09:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/29/2011	3:09:50 PM	Recipe started at 3:09 PM
8/29/2011	3:09:50 PM	Helium valve closed
8/29/2011	3:09:50 PM	H2 valve closed
8/29/2011	3:09:50 PM	BCl3 valve closed
8/29/2011	3:09:50 PM	PH3 valve closed
8/29/2011	3:09:50 PM	SiCl4 pre valve closed
8/29/2011	3:09:50 PM	SiCl4 post valve closed
8/29/2011	3:09:50 PM	Main Vac valve closed
8/29/2011	3:09:50 PM	Bypass valve closed
8/29/2011	3:09:50 PM	Bubbler valve closed
8/29/2011	3:09:50 PM	Helium MFC set to  0.000000
8/29/2011	3:09:50 PM	H2 MFC set to  0.000000
8/29/2011	3:09:50 PM	BCl3 MFC set to  0.000000
8/29/2011	3:09:50 PM	PHl3 MFC set to  0.000000
8/29/2011	3:09:50 PM	SiCl4 MFC set to  0.000000
8/29/2011	3:09:50 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:09:51 PM	Tube furnace set to 0
8/29/2011	3:09:51 PM	Run finished at 3:09 PM
8/29/2011	3:09:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/29/2011	3:10:04 PM	Main Vac valve opened
8/29/2011	3:11:29 PM	Recipe started at 3:11 PM
8/29/2011	3:11:29 PM	Helium valve closed
8/29/2011	3:11:29 PM	H2 valve closed
8/29/2011	3:11:29 PM	BCl3 valve closed
8/29/2011	3:11:29 PM	PH3 valve closed
8/29/2011	3:11:29 PM	SiCl4 pre valve closed
8/29/2011	3:11:29 PM	SiCl4 post valve closed
8/29/2011	3:11:29 PM	Main Vac valve closed
8/29/2011	3:11:29 PM	Bypass valve closed
8/29/2011	3:11:29 PM	Bubbler valve closed
8/29/2011	3:11:29 PM	Helium MFC set to  0.000000
8/29/2011	3:11:29 PM	H2 MFC set to  0.000000
8/29/2011	3:11:29 PM	BCl3 MFC set to  0.000000
8/29/2011	3:11:29 PM	PHl3 MFC set to  0.000000
8/29/2011	3:11:29 PM	SiCl4 MFC set to  0.000000
8/29/2011	3:11:29 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:11:30 PM	Tube furnace set to 0
8/29/2011	3:11:33 PM	Helium valve closed
8/29/2011	3:11:33 PM	BCl3 valve closed
8/29/2011	3:11:33 PM	PH3 valve closed
8/29/2011	3:11:33 PM	SiCl4 pre valve closed
8/29/2011	3:11:33 PM	SiCl4 post valve closed
8/29/2011	3:11:33 PM	Main Vac valve closed
8/29/2011	3:11:33 PM	Bypass valve closed
8/29/2011	3:11:33 PM	Bubbler valve closed
8/29/2011	3:11:33 PM	H2 valve opened
8/29/2011	3:11:33 PM	Helium MFC set to  0.000000
8/29/2011	3:11:33 PM	H2 MFC set to  500.000000
8/29/2011	3:11:33 PM	BCl3 MFC set to  0.000000
8/29/2011	3:11:33 PM	PHl3 MFC set to  0.000000
8/29/2011	3:11:33 PM	SiCl4 MFC set to  0.000000
8/29/2011	3:11:33 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:11:33 PM	Tube furnace set to 0
8/29/2011	3:12:39 PM	Helium valve closed
8/29/2011	3:12:39 PM	BCl3 valve closed
8/29/2011	3:12:39 PM	PH3 valve closed
8/29/2011	3:12:39 PM	SiCl4 pre valve closed
8/29/2011	3:12:39 PM	SiCl4 post valve closed
8/29/2011	3:12:39 PM	Main Vac valve closed
8/29/2011	3:12:39 PM	Bypass valve closed
8/29/2011	3:12:39 PM	H2 valve opened
8/29/2011	3:12:39 PM	Bubbler valve opened
8/29/2011	3:12:39 PM	Helium MFC set to  0.000000
8/29/2011	3:12:39 PM	H2 MFC set to  500.000000
8/29/2011	3:12:39 PM	BCl3 MFC set to  0.000000
8/29/2011	3:12:39 PM	PHl3 MFC set to  0.000000
8/29/2011	3:12:39 PM	SiCl4 MFC set to  0.000000
8/29/2011	3:12:39 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:12:39 PM	Tube furnace set to 0
8/29/2011	3:12:40 PM	Helium valve closed
8/29/2011	3:12:40 PM	BCl3 valve closed
8/29/2011	3:12:40 PM	PH3 valve closed
8/29/2011	3:12:40 PM	SiCl4 pre valve closed
8/29/2011	3:12:40 PM	SiCl4 post valve closed
8/29/2011	3:12:40 PM	Main Vac valve closed
8/29/2011	3:12:40 PM	Bypass valve closed
8/29/2011	3:12:40 PM	H2 valve opened
8/29/2011	3:12:40 PM	Bubbler valve opened
8/29/2011	3:12:40 PM	Helium MFC set to  0.000000
8/29/2011	3:12:40 PM	H2 MFC set to  500.000000
8/29/2011	3:12:40 PM	BCl3 MFC set to  0.000000
8/29/2011	3:12:41 PM	PHl3 MFC set to  0.000000
8/29/2011	3:12:41 PM	SiCl4 MFC set to  0.000000
8/29/2011	3:12:41 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:12:41 PM	Tube furnace set to 1000
8/29/2011	3:35:41 PM	Helium valve closed
8/29/2011	3:35:41 PM	PH3 valve closed
8/29/2011	3:35:41 PM	Main Vac valve closed
8/29/2011	3:35:41 PM	Bypass valve closed
8/29/2011	3:35:41 PM	H2 valve opened
8/29/2011	3:35:41 PM	BCl3 valve opened
8/29/2011	3:35:41 PM	SiCl4 pre valve opened
8/29/2011	3:35:41 PM	SiCl4 post valve opened
8/29/2011	3:35:41 PM	Bubbler valve opened
8/29/2011	3:35:41 PM	Helium MFC set to  0.000000
8/29/2011	3:35:41 PM	H2 MFC set to  500.000000
8/29/2011	3:35:41 PM	BCl3 MFC set to  2.000000
8/29/2011	3:35:41 PM	PHl3 MFC set to  0.000000
8/29/2011	3:35:41 PM	SiCl4 MFC set to  50.000000
8/29/2011	3:35:41 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:35:41 PM	Tube furnace set to 1000
8/29/2011	3:36:41 PM	Helium valve closed
8/29/2011	3:36:41 PM	BCl3 valve closed
8/29/2011	3:36:41 PM	PH3 valve closed
8/29/2011	3:36:41 PM	SiCl4 pre valve closed
8/29/2011	3:36:41 PM	SiCl4 post valve closed
8/29/2011	3:36:41 PM	Main Vac valve closed
8/29/2011	3:36:41 PM	Bypass valve closed
8/29/2011	3:36:41 PM	H2 valve opened
8/29/2011	3:36:41 PM	Bubbler valve opened
8/29/2011	3:36:41 PM	Helium MFC set to  0.000000
8/29/2011	3:36:41 PM	H2 MFC set to  500.000000
8/29/2011	3:36:41 PM	BCl3 MFC set to  0.000000
8/29/2011	3:36:41 PM	PHl3 MFC set to  0.000000
8/29/2011	3:36:41 PM	SiCl4 MFC set to  0.000000
8/29/2011	3:36:41 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:36:41 PM	Tube furnace set to 750
8/29/2011	3:41:41 PM	H2 valve closed
8/29/2011	3:41:41 PM	BCl3 valve closed
8/29/2011	3:41:41 PM	PH3 valve closed
8/29/2011	3:41:41 PM	SiCl4 pre valve closed
8/29/2011	3:41:41 PM	SiCl4 post valve closed
8/29/2011	3:41:41 PM	Main Vac valve closed
8/29/2011	3:41:41 PM	Bypass valve closed
8/29/2011	3:41:41 PM	Helium valve opened
8/29/2011	3:41:41 PM	Bubbler valve opened
8/29/2011	3:41:41 PM	Helium MFC set to  400.000000
8/29/2011	3:41:41 PM	H2 MFC set to  0.000000
8/29/2011	3:41:41 PM	BCl3 MFC set to  0.000000
8/29/2011	3:41:41 PM	PHl3 MFC set to  0.000000
8/29/2011	3:41:41 PM	SiCl4 MFC set to  0.000000
8/29/2011	3:41:41 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	3:41:41 PM	Tube furnace set to 0
8/29/2011	4:01:41 PM	Helium valve closed
8/29/2011	4:01:41 PM	H2 valve closed
8/29/2011	4:01:41 PM	BCl3 valve closed
8/29/2011	4:01:41 PM	PH3 valve closed
8/29/2011	4:01:41 PM	SiCl4 pre valve closed
8/29/2011	4:01:41 PM	SiCl4 post valve closed
8/29/2011	4:01:41 PM	Main Vac valve closed
8/29/2011	4:01:41 PM	Bypass valve closed
8/29/2011	4:01:41 PM	Bubbler valve closed
8/29/2011	4:01:41 PM	Helium MFC set to  0.000000
8/29/2011	4:01:41 PM	H2 MFC set to  0.000000
8/29/2011	4:01:41 PM	BCl3 MFC set to  0.000000
8/29/2011	4:01:41 PM	PHl3 MFC set to  0.000000
8/29/2011	4:01:41 PM	SiCl4 MFC set to  0.000000
8/29/2011	4:01:41 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	4:01:41 PM	Tube furnace set to 0
8/29/2011	4:08:10 PM	Run finished at 4:08 PM
8/29/2011	4:08:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	4:08:16 PM	Recipe started at 4:08 PM
8/29/2011	4:08:16 PM	Helium valve closed
8/29/2011	4:08:16 PM	H2 valve closed
8/29/2011	4:08:16 PM	BCl3 valve closed
8/29/2011	4:08:16 PM	PH3 valve closed
8/29/2011	4:08:16 PM	SiCl4 pre valve closed
8/29/2011	4:08:16 PM	SiCl4 post valve closed
8/29/2011	4:08:16 PM	Main Vac valve closed
8/29/2011	4:08:16 PM	Bypass valve closed
8/29/2011	4:08:16 PM	Bubbler valve closed
8/29/2011	4:08:16 PM	Helium MFC set to  0.000000
8/29/2011	4:08:16 PM	H2 MFC set to  0.000000
8/29/2011	4:08:16 PM	BCl3 MFC set to  0.000000
8/29/2011	4:08:16 PM	PHl3 MFC set to  0.000000
8/29/2011	4:08:16 PM	SiCl4 MFC set to  0.000000
8/29/2011	4:08:16 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	4:08:16 PM	Tube furnace set to 0
8/29/2011	4:08:19 PM	H2 valve closed
8/29/2011	4:08:19 PM	BCl3 valve closed
8/29/2011	4:08:19 PM	PH3 valve closed
8/29/2011	4:08:19 PM	SiCl4 pre valve closed
8/29/2011	4:08:19 PM	SiCl4 post valve closed
8/29/2011	4:08:19 PM	Main Vac valve closed
8/29/2011	4:08:19 PM	Bypass valve closed
8/29/2011	4:08:19 PM	Bubbler valve closed
8/29/2011	4:08:19 PM	Helium valve opened
8/29/2011	4:08:19 PM	Helium MFC set to  500.000000
8/29/2011	4:08:19 PM	H2 MFC set to  0.000000
8/29/2011	4:08:19 PM	BCl3 MFC set to  0.000000
8/29/2011	4:08:19 PM	PHl3 MFC set to  0.000000
8/29/2011	4:08:19 PM	SiCl4 MFC set to  0.000000
8/29/2011	4:08:19 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	4:08:20 PM	Tube furnace set to 0
8/29/2011	4:08:20 PM	Helium valve closed
8/29/2011	4:08:20 PM	H2 valve closed
8/29/2011	4:08:20 PM	BCl3 valve closed
8/29/2011	4:08:20 PM	PH3 valve closed
8/29/2011	4:08:20 PM	SiCl4 pre valve closed
8/29/2011	4:08:20 PM	SiCl4 post valve closed
8/29/2011	4:08:20 PM	Main Vac valve closed
8/29/2011	4:08:20 PM	Bypass valve closed
8/29/2011	4:08:20 PM	Bubbler valve closed
8/29/2011	4:08:20 PM	Helium MFC set to  0.000000
8/29/2011	4:08:20 PM	H2 MFC set to  0.000000
8/29/2011	4:08:20 PM	BCl3 MFC set to  0.000000
8/29/2011	4:08:20 PM	PHl3 MFC set to  0.000000
8/29/2011	4:08:20 PM	SiCl4 MFC set to  0.000000
8/29/2011	4:08:20 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	4:08:20 PM	Tube furnace set to 0
8/29/2011	4:08:21 PM	Run finished at 4:08 PM
8/29/2011	4:08:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	4:52:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	4:52:28 PM	Recipe started at 4:52 PM
8/29/2011	4:52:28 PM	Helium valve closed
8/29/2011	4:52:28 PM	H2 valve closed
8/29/2011	4:52:28 PM	BCl3 valve closed
8/29/2011	4:52:28 PM	PH3 valve closed
8/29/2011	4:52:28 PM	SiCl4 pre valve closed
8/29/2011	4:52:28 PM	SiCl4 post valve closed
8/29/2011	4:52:28 PM	Main Vac valve closed
8/29/2011	4:52:28 PM	Bypass valve closed
8/29/2011	4:52:28 PM	Bubbler valve closed
8/29/2011	4:52:28 PM	Helium MFC set to  0.000000
8/29/2011	4:52:28 PM	H2 MFC set to  0.000000
8/29/2011	4:52:28 PM	BCl3 MFC set to  0.000000
8/29/2011	4:52:28 PM	PHl3 MFC set to  0.000000
8/29/2011	4:52:28 PM	SiCl4 MFC set to  0.000000
8/29/2011	4:52:28 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	4:52:28 PM	Tube furnace set to 0
8/29/2011	4:52:31 PM	H2 valve closed
8/29/2011	4:52:31 PM	BCl3 valve closed
8/29/2011	4:52:31 PM	PH3 valve closed
8/29/2011	4:52:31 PM	SiCl4 pre valve closed
8/29/2011	4:52:31 PM	SiCl4 post valve closed
8/29/2011	4:52:31 PM	Main Vac valve closed
8/29/2011	4:52:31 PM	Bypass valve closed
8/29/2011	4:52:31 PM	Bubbler valve closed
8/29/2011	4:52:31 PM	Helium valve opened
8/29/2011	4:52:31 PM	Helium MFC set to  500.000000
8/29/2011	4:52:31 PM	H2 MFC set to  0.000000
8/29/2011	4:52:31 PM	BCl3 MFC set to  0.000000
8/29/2011	4:52:31 PM	PHl3 MFC set to  0.000000
8/29/2011	4:52:31 PM	SiCl4 MFC set to  0.000000
8/29/2011	4:52:31 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	4:52:31 PM	Tube furnace set to 0
8/29/2011	4:52:33 PM	Helium valve closed
8/29/2011	4:52:33 PM	H2 valve closed
8/29/2011	4:52:33 PM	BCl3 valve closed
8/29/2011	4:52:33 PM	PH3 valve closed
8/29/2011	4:52:33 PM	SiCl4 pre valve closed
8/29/2011	4:52:33 PM	SiCl4 post valve closed
8/29/2011	4:52:33 PM	Main Vac valve closed
8/29/2011	4:52:33 PM	Bypass valve closed
8/29/2011	4:52:33 PM	Bubbler valve closed
8/29/2011	4:52:33 PM	Helium MFC set to  0.000000
8/29/2011	4:52:33 PM	H2 MFC set to  0.000000
8/29/2011	4:52:33 PM	BCl3 MFC set to  0.000000
8/29/2011	4:52:33 PM	PHl3 MFC set to  0.000000
8/29/2011	4:52:33 PM	SiCl4 MFC set to  0.000000
8/29/2011	4:52:33 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	4:52:33 PM	Tube furnace set to 0
8/29/2011	4:52:34 PM	Run finished at 4:52 PM
8/29/2011	4:52:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	4:56:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	4:56:45 PM	Recipe started at 4:56 PM
8/29/2011	4:56:45 PM	Helium valve closed
8/29/2011	4:56:45 PM	H2 valve closed
8/29/2011	4:56:45 PM	BCl3 valve closed
8/29/2011	4:56:45 PM	PH3 valve closed
8/29/2011	4:56:45 PM	SiCl4 pre valve closed
8/29/2011	4:56:45 PM	SiCl4 post valve closed
8/29/2011	4:56:45 PM	Main Vac valve closed
8/29/2011	4:56:45 PM	Bubbler valve closed
8/29/2011	4:56:45 PM	Bypass valve opened
8/29/2011	4:56:45 PM	Helium MFC set to  0.000000
8/29/2011	4:56:45 PM	H2 MFC set to  0.000000
8/29/2011	4:56:45 PM	BCl3 MFC set to  0.000000
8/29/2011	4:56:45 PM	PHl3 MFC set to  0.000000
8/29/2011	4:56:45 PM	SiCl4 MFC set to  0.000000
8/29/2011	4:56:45 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	4:56:46 PM	Tube furnace set to 0
8/29/2011	4:57:50 PM	Helium valve closed
8/29/2011	4:57:50 PM	H2 valve closed
8/29/2011	4:57:50 PM	BCl3 valve closed
8/29/2011	4:57:50 PM	PH3 valve closed
8/29/2011	4:57:50 PM	SiCl4 pre valve closed
8/29/2011	4:57:50 PM	SiCl4 post valve closed
8/29/2011	4:57:50 PM	Main Vac valve closed
8/29/2011	4:57:50 PM	Bubbler valve closed
8/29/2011	4:57:50 PM	Bypass valve opened
8/29/2011	4:57:50 PM	Helium MFC set to  0.000000
8/29/2011	4:57:50 PM	H2 MFC set to  0.000000
8/29/2011	4:57:50 PM	BCl3 MFC set to  0.000000
8/29/2011	4:57:50 PM	PHl3 MFC set to  0.000000
8/29/2011	4:57:50 PM	SiCl4 MFC set to  0.000000
8/29/2011	4:57:50 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	4:57:50 PM	Tube furnace set to 0
8/29/2011	4:58:50 PM	Helium valve closed
8/29/2011	4:58:50 PM	H2 valve closed
8/29/2011	4:58:50 PM	BCl3 valve closed
8/29/2011	4:58:50 PM	PH3 valve closed
8/29/2011	4:58:50 PM	SiCl4 pre valve closed
8/29/2011	4:58:50 PM	SiCl4 post valve closed
8/29/2011	4:58:50 PM	Bypass valve closed
8/29/2011	4:58:50 PM	Bubbler valve closed
8/29/2011	4:58:50 PM	Main Vac valve opened
8/29/2011	4:58:50 PM	Helium MFC set to  0.000000
8/29/2011	4:58:50 PM	H2 MFC set to  0.000000
8/29/2011	4:58:50 PM	BCl3 MFC set to  0.000000
8/29/2011	4:58:50 PM	PHl3 MFC set to  0.000000
8/29/2011	4:58:50 PM	SiCl4 MFC set to  0.000000
8/29/2011	4:58:50 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	4:58:50 PM	Tube furnace set to 0
8/29/2011	4:58:51 PM	Run finished at 4:58 PM
8/29/2011	4:58:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	5:20:25 PM	Main Vac valve closed
8/29/2011	5:20:35 PM	Main Vac valve opened
8/29/2011	5:21:02 PM	Recipe started at 5:21 PM
8/29/2011	5:21:02 PM	Helium valve closed
8/29/2011	5:21:02 PM	H2 valve closed
8/29/2011	5:21:02 PM	BCl3 valve closed
8/29/2011	5:21:02 PM	PH3 valve closed
8/29/2011	5:21:02 PM	SiCl4 pre valve closed
8/29/2011	5:21:02 PM	SiCl4 post valve closed
8/29/2011	5:21:02 PM	Main Vac valve closed
8/29/2011	5:21:02 PM	Bypass valve closed
8/29/2011	5:21:02 PM	Bubbler valve closed
8/29/2011	5:21:02 PM	Helium MFC set to  0.000000
8/29/2011	5:21:02 PM	H2 MFC set to  0.000000
8/29/2011	5:21:02 PM	BCl3 MFC set to  0.000000
8/29/2011	5:21:02 PM	PHl3 MFC set to  0.000000
8/29/2011	5:21:02 PM	SiCl4 MFC set to  0.000000
8/29/2011	5:21:02 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	5:21:03 PM	Tube furnace set to 0
8/29/2011	5:21:06 PM	Helium valve closed
8/29/2011	5:21:06 PM	BCl3 valve closed
8/29/2011	5:21:06 PM	PH3 valve closed
8/29/2011	5:21:06 PM	SiCl4 pre valve closed
8/29/2011	5:21:06 PM	SiCl4 post valve closed
8/29/2011	5:21:06 PM	Main Vac valve closed
8/29/2011	5:21:06 PM	Bypass valve closed
8/29/2011	5:21:06 PM	Bubbler valve closed
8/29/2011	5:21:06 PM	H2 valve opened
8/29/2011	5:21:06 PM	Helium MFC set to  0.000000
8/29/2011	5:21:06 PM	H2 MFC set to  500.000000
8/29/2011	5:21:06 PM	BCl3 MFC set to  0.000000
8/29/2011	5:21:06 PM	PHl3 MFC set to  0.000000
8/29/2011	5:21:06 PM	SiCl4 MFC set to  0.000000
8/29/2011	5:21:06 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	5:21:06 PM	Tube furnace set to 0
8/29/2011	5:22:13 PM	Helium valve closed
8/29/2011	5:22:13 PM	BCl3 valve closed
8/29/2011	5:22:13 PM	PH3 valve closed
8/29/2011	5:22:13 PM	SiCl4 pre valve closed
8/29/2011	5:22:13 PM	SiCl4 post valve closed
8/29/2011	5:22:13 PM	Main Vac valve closed
8/29/2011	5:22:13 PM	Bypass valve closed
8/29/2011	5:22:13 PM	H2 valve opened
8/29/2011	5:22:13 PM	Bubbler valve opened
8/29/2011	5:22:13 PM	Helium MFC set to  0.000000
8/29/2011	5:22:13 PM	H2 MFC set to  500.000000
8/29/2011	5:22:13 PM	BCl3 MFC set to  0.000000
8/29/2011	5:22:13 PM	PHl3 MFC set to  0.000000
8/29/2011	5:22:13 PM	SiCl4 MFC set to  0.000000
8/29/2011	5:22:13 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	5:22:13 PM	Tube furnace set to 0
8/29/2011	5:22:14 PM	Helium valve closed
8/29/2011	5:22:14 PM	BCl3 valve closed
8/29/2011	5:22:14 PM	PH3 valve closed
8/29/2011	5:22:14 PM	SiCl4 pre valve closed
8/29/2011	5:22:14 PM	SiCl4 post valve closed
8/29/2011	5:22:14 PM	Main Vac valve closed
8/29/2011	5:22:14 PM	Bypass valve closed
8/29/2011	5:22:14 PM	H2 valve opened
8/29/2011	5:22:14 PM	Bubbler valve opened
8/29/2011	5:22:14 PM	Helium MFC set to  0.000000
8/29/2011	5:22:14 PM	H2 MFC set to  500.000000
8/29/2011	5:22:14 PM	BCl3 MFC set to  0.000000
8/29/2011	5:22:14 PM	PHl3 MFC set to  0.000000
8/29/2011	5:22:14 PM	SiCl4 MFC set to  0.000000
8/29/2011	5:22:14 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	5:22:14 PM	Tube furnace set to 1000
8/29/2011	5:45:14 PM	Helium valve closed
8/29/2011	5:45:14 PM	PH3 valve closed
8/29/2011	5:45:14 PM	Main Vac valve closed
8/29/2011	5:45:14 PM	Bypass valve closed
8/29/2011	5:45:14 PM	H2 valve opened
8/29/2011	5:45:14 PM	BCl3 valve opened
8/29/2011	5:45:14 PM	SiCl4 pre valve opened
8/29/2011	5:45:14 PM	SiCl4 post valve opened
8/29/2011	5:45:14 PM	Bubbler valve opened
8/29/2011	5:45:14 PM	Helium MFC set to  0.000000
8/29/2011	5:45:14 PM	H2 MFC set to  500.000000
8/29/2011	5:45:14 PM	BCl3 MFC set to  2.000000
8/29/2011	5:45:14 PM	PHl3 MFC set to  0.000000
8/29/2011	5:45:14 PM	SiCl4 MFC set to  50.000000
8/29/2011	5:45:14 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	5:45:14 PM	Tube furnace set to 1000
8/29/2011	6:00:14 PM	Helium valve closed
8/29/2011	6:00:14 PM	BCl3 valve closed
8/29/2011	6:00:14 PM	PH3 valve closed
8/29/2011	6:00:14 PM	SiCl4 pre valve closed
8/29/2011	6:00:14 PM	SiCl4 post valve closed
8/29/2011	6:00:14 PM	Main Vac valve closed
8/29/2011	6:00:14 PM	Bypass valve closed
8/29/2011	6:00:14 PM	H2 valve opened
8/29/2011	6:00:14 PM	Bubbler valve opened
8/29/2011	6:00:14 PM	Helium MFC set to  0.000000
8/29/2011	6:00:14 PM	H2 MFC set to  500.000000
8/29/2011	6:00:14 PM	BCl3 MFC set to  0.000000
8/29/2011	6:00:14 PM	PHl3 MFC set to  0.000000
8/29/2011	6:00:14 PM	SiCl4 MFC set to  0.000000
8/29/2011	6:00:14 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	6:00:14 PM	Tube furnace set to 750
8/29/2011	6:05:14 PM	H2 valve closed
8/29/2011	6:05:14 PM	BCl3 valve closed
8/29/2011	6:05:14 PM	PH3 valve closed
8/29/2011	6:05:14 PM	SiCl4 pre valve closed
8/29/2011	6:05:14 PM	SiCl4 post valve closed
8/29/2011	6:05:14 PM	Main Vac valve closed
8/29/2011	6:05:14 PM	Bypass valve closed
8/29/2011	6:05:14 PM	Helium valve opened
8/29/2011	6:05:14 PM	Bubbler valve opened
8/29/2011	6:05:14 PM	Helium MFC set to  400.000000
8/29/2011	6:05:14 PM	H2 MFC set to  0.000000
8/29/2011	6:05:14 PM	BCl3 MFC set to  0.000000
8/29/2011	6:05:14 PM	PHl3 MFC set to  0.000000
8/29/2011	6:05:14 PM	SiCl4 MFC set to  0.000000
8/29/2011	6:05:14 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	6:05:15 PM	Tube furnace set to 0
8/29/2011	6:25:15 PM	Helium valve closed
8/29/2011	6:25:15 PM	H2 valve closed
8/29/2011	6:25:15 PM	BCl3 valve closed
8/29/2011	6:25:15 PM	PH3 valve closed
8/29/2011	6:25:15 PM	SiCl4 pre valve closed
8/29/2011	6:25:15 PM	SiCl4 post valve closed
8/29/2011	6:25:15 PM	Main Vac valve closed
8/29/2011	6:25:15 PM	Bypass valve closed
8/29/2011	6:25:15 PM	Bubbler valve closed
8/29/2011	6:25:15 PM	Helium MFC set to  0.000000
8/29/2011	6:25:15 PM	H2 MFC set to  0.000000
8/29/2011	6:25:15 PM	BCl3 MFC set to  0.000000
8/29/2011	6:25:15 PM	PHl3 MFC set to  0.000000
8/29/2011	6:25:15 PM	SiCl4 MFC set to  0.000000
8/29/2011	6:25:15 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	6:25:15 PM	Tube furnace set to 0
8/29/2011	6:36:16 PM	Run finished at 6:36 PM
8/29/2011	6:36:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	6:36:19 PM	Recipe started at 6:36 PM
8/29/2011	6:36:19 PM	Helium valve closed
8/29/2011	6:36:19 PM	H2 valve closed
8/29/2011	6:36:19 PM	BCl3 valve closed
8/29/2011	6:36:19 PM	PH3 valve closed
8/29/2011	6:36:19 PM	SiCl4 pre valve closed
8/29/2011	6:36:19 PM	SiCl4 post valve closed
8/29/2011	6:36:19 PM	Main Vac valve closed
8/29/2011	6:36:19 PM	Bypass valve closed
8/29/2011	6:36:19 PM	Bubbler valve closed
8/29/2011	6:36:19 PM	Helium MFC set to  0.000000
8/29/2011	6:36:19 PM	H2 MFC set to  0.000000
8/29/2011	6:36:19 PM	BCl3 MFC set to  0.000000
8/29/2011	6:36:19 PM	PHl3 MFC set to  0.000000
8/29/2011	6:36:19 PM	SiCl4 MFC set to  0.000000
8/29/2011	6:36:19 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	6:36:19 PM	Tube furnace set to 0
8/29/2011	6:36:22 PM	H2 valve closed
8/29/2011	6:36:22 PM	BCl3 valve closed
8/29/2011	6:36:22 PM	PH3 valve closed
8/29/2011	6:36:22 PM	SiCl4 pre valve closed
8/29/2011	6:36:22 PM	SiCl4 post valve closed
8/29/2011	6:36:22 PM	Main Vac valve closed
8/29/2011	6:36:22 PM	Bypass valve closed
8/29/2011	6:36:22 PM	Bubbler valve closed
8/29/2011	6:36:22 PM	Helium valve opened
8/29/2011	6:36:22 PM	Helium MFC set to  500.000000
8/29/2011	6:36:22 PM	H2 MFC set to  0.000000
8/29/2011	6:36:22 PM	BCl3 MFC set to  0.000000
8/29/2011	6:36:22 PM	PHl3 MFC set to  0.000000
8/29/2011	6:36:22 PM	SiCl4 MFC set to  0.000000
8/29/2011	6:36:22 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	6:36:22 PM	Tube furnace set to 0
8/29/2011	6:36:27 PM	Helium valve closed
8/29/2011	6:36:27 PM	H2 valve closed
8/29/2011	6:36:27 PM	BCl3 valve closed
8/29/2011	6:36:27 PM	PH3 valve closed
8/29/2011	6:36:27 PM	SiCl4 pre valve closed
8/29/2011	6:36:27 PM	SiCl4 post valve closed
8/29/2011	6:36:27 PM	Main Vac valve closed
8/29/2011	6:36:27 PM	Bypass valve closed
8/29/2011	6:36:27 PM	Bubbler valve closed
8/29/2011	6:36:27 PM	Helium MFC set to  0.000000
8/29/2011	6:36:27 PM	H2 MFC set to  0.000000
8/29/2011	6:36:27 PM	BCl3 MFC set to  0.000000
8/29/2011	6:36:27 PM	PHl3 MFC set to  0.000000
8/29/2011	6:36:27 PM	SiCl4 MFC set to  0.000000
8/29/2011	6:36:27 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	6:36:27 PM	Tube furnace set to 0
8/29/2011	6:36:28 PM	Run finished at 6:36 PM
8/29/2011	6:36:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	6:40:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	6:40:57 PM	Recipe started at 6:40 PM
8/29/2011	6:40:57 PM	Helium valve closed
8/29/2011	6:40:57 PM	H2 valve closed
8/29/2011	6:40:57 PM	BCl3 valve closed
8/29/2011	6:40:57 PM	PH3 valve closed
8/29/2011	6:40:57 PM	SiCl4 pre valve closed
8/29/2011	6:40:57 PM	SiCl4 post valve closed
8/29/2011	6:40:57 PM	Main Vac valve closed
8/29/2011	6:40:57 PM	Bubbler valve closed
8/29/2011	6:40:57 PM	Bypass valve opened
8/29/2011	6:40:57 PM	Helium MFC set to  0.000000
8/29/2011	6:40:57 PM	H2 MFC set to  0.000000
8/29/2011	6:40:57 PM	BCl3 MFC set to  0.000000
8/29/2011	6:40:57 PM	PHl3 MFC set to  0.000000
8/29/2011	6:40:57 PM	SiCl4 MFC set to  0.000000
8/29/2011	6:40:57 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	6:40:57 PM	Tube furnace set to 0
8/29/2011	6:42:02 PM	Helium valve closed
8/29/2011	6:42:02 PM	H2 valve closed
8/29/2011	6:42:02 PM	BCl3 valve closed
8/29/2011	6:42:02 PM	PH3 valve closed
8/29/2011	6:42:02 PM	SiCl4 pre valve closed
8/29/2011	6:42:02 PM	SiCl4 post valve closed
8/29/2011	6:42:02 PM	Main Vac valve closed
8/29/2011	6:42:02 PM	Bubbler valve closed
8/29/2011	6:42:02 PM	Bypass valve opened
8/29/2011	6:42:02 PM	Helium MFC set to  0.000000
8/29/2011	6:42:02 PM	H2 MFC set to  0.000000
8/29/2011	6:42:02 PM	BCl3 MFC set to  0.000000
8/29/2011	6:42:02 PM	PHl3 MFC set to  0.000000
8/29/2011	6:42:02 PM	SiCl4 MFC set to  0.000000
8/29/2011	6:42:02 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	6:42:03 PM	Tube furnace set to 0
8/29/2011	6:43:03 PM	Helium valve closed
8/29/2011	6:43:03 PM	H2 valve closed
8/29/2011	6:43:03 PM	BCl3 valve closed
8/29/2011	6:43:03 PM	PH3 valve closed
8/29/2011	6:43:03 PM	SiCl4 pre valve closed
8/29/2011	6:43:03 PM	SiCl4 post valve closed
8/29/2011	6:43:03 PM	Bypass valve closed
8/29/2011	6:43:03 PM	Bubbler valve closed
8/29/2011	6:43:03 PM	Main Vac valve opened
8/29/2011	6:43:03 PM	Helium MFC set to  0.000000
8/29/2011	6:43:03 PM	H2 MFC set to  0.000000
8/29/2011	6:43:03 PM	BCl3 MFC set to  0.000000
8/29/2011	6:43:03 PM	PHl3 MFC set to  0.000000
8/29/2011	6:43:03 PM	SiCl4 MFC set to  0.000000
8/29/2011	6:43:03 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	6:43:03 PM	Tube furnace set to 0
8/29/2011	6:43:04 PM	Run finished at 6:43 PM
8/29/2011	6:43:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	7:47:43 PM	Main Vac valve closed
8/29/2011	7:47:56 PM	Main Vac valve opened
8/29/2011	7:48:16 PM	Recipe started at 7:48 PM
8/29/2011	7:48:16 PM	Helium valve closed
8/29/2011	7:48:16 PM	H2 valve closed
8/29/2011	7:48:16 PM	BCl3 valve closed
8/29/2011	7:48:16 PM	PH3 valve closed
8/29/2011	7:48:16 PM	SiCl4 pre valve closed
8/29/2011	7:48:16 PM	SiCl4 post valve closed
8/29/2011	7:48:16 PM	Main Vac valve closed
8/29/2011	7:48:16 PM	Bypass valve closed
8/29/2011	7:48:16 PM	Bubbler valve closed
8/29/2011	7:48:16 PM	Helium MFC set to  0.000000
8/29/2011	7:48:16 PM	H2 MFC set to  0.000000
8/29/2011	7:48:16 PM	BCl3 MFC set to  0.000000
8/29/2011	7:48:16 PM	PHl3 MFC set to  0.000000
8/29/2011	7:48:16 PM	SiCl4 MFC set to  0.000000
8/29/2011	7:48:16 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	7:48:16 PM	Tube furnace set to 0
8/29/2011	7:48:19 PM	Helium valve closed
8/29/2011	7:48:19 PM	BCl3 valve closed
8/29/2011	7:48:19 PM	PH3 valve closed
8/29/2011	7:48:19 PM	SiCl4 pre valve closed
8/29/2011	7:48:19 PM	SiCl4 post valve closed
8/29/2011	7:48:19 PM	Main Vac valve closed
8/29/2011	7:48:19 PM	Bypass valve closed
8/29/2011	7:48:19 PM	Bubbler valve closed
8/29/2011	7:48:19 PM	H2 valve opened
8/29/2011	7:48:19 PM	Helium MFC set to  0.000000
8/29/2011	7:48:19 PM	H2 MFC set to  500.000000
8/29/2011	7:48:19 PM	BCl3 MFC set to  0.000000
8/29/2011	7:48:19 PM	PHl3 MFC set to  0.000000
8/29/2011	7:48:19 PM	SiCl4 MFC set to  0.000000
8/29/2011	7:48:19 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	7:48:19 PM	Tube furnace set to 0
8/29/2011	7:49:27 PM	Helium valve closed
8/29/2011	7:49:27 PM	BCl3 valve closed
8/29/2011	7:49:27 PM	PH3 valve closed
8/29/2011	7:49:27 PM	SiCl4 pre valve closed
8/29/2011	7:49:27 PM	SiCl4 post valve closed
8/29/2011	7:49:27 PM	Main Vac valve closed
8/29/2011	7:49:27 PM	Bypass valve closed
8/29/2011	7:49:27 PM	H2 valve opened
8/29/2011	7:49:27 PM	Bubbler valve opened
8/29/2011	7:49:27 PM	Helium MFC set to  0.000000
8/29/2011	7:49:27 PM	H2 MFC set to  500.000000
8/29/2011	7:49:27 PM	BCl3 MFC set to  0.000000
8/29/2011	7:49:27 PM	PHl3 MFC set to  0.000000
8/29/2011	7:49:27 PM	SiCl4 MFC set to  0.000000
8/29/2011	7:49:27 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	7:49:27 PM	Tube furnace set to 0
8/29/2011	7:49:28 PM	Helium valve closed
8/29/2011	7:49:28 PM	BCl3 valve closed
8/29/2011	7:49:28 PM	PH3 valve closed
8/29/2011	7:49:28 PM	SiCl4 pre valve closed
8/29/2011	7:49:28 PM	SiCl4 post valve closed
8/29/2011	7:49:28 PM	Main Vac valve closed
8/29/2011	7:49:28 PM	Bypass valve closed
8/29/2011	7:49:28 PM	H2 valve opened
8/29/2011	7:49:28 PM	Bubbler valve opened
8/29/2011	7:49:28 PM	Helium MFC set to  0.000000
8/29/2011	7:49:28 PM	H2 MFC set to  500.000000
8/29/2011	7:49:28 PM	BCl3 MFC set to  0.000000
8/29/2011	7:49:28 PM	PHl3 MFC set to  0.000000
8/29/2011	7:49:28 PM	SiCl4 MFC set to  0.000000
8/29/2011	7:49:28 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	7:49:28 PM	Tube furnace set to 1000
8/29/2011	8:12:28 PM	Helium valve closed
8/29/2011	8:12:28 PM	PH3 valve closed
8/29/2011	8:12:28 PM	Main Vac valve closed
8/29/2011	8:12:28 PM	Bypass valve closed
8/29/2011	8:12:28 PM	H2 valve opened
8/29/2011	8:12:28 PM	BCl3 valve opened
8/29/2011	8:12:28 PM	SiCl4 pre valve opened
8/29/2011	8:12:28 PM	SiCl4 post valve opened
8/29/2011	8:12:28 PM	Bubbler valve opened
8/29/2011	8:12:28 PM	Helium MFC set to  0.000000
8/29/2011	8:12:28 PM	H2 MFC set to  500.000000
8/29/2011	8:12:28 PM	BCl3 MFC set to  2.000000
8/29/2011	8:12:28 PM	PHl3 MFC set to  0.000000
8/29/2011	8:12:28 PM	SiCl4 MFC set to  50.000000
8/29/2011	8:12:28 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	8:12:28 PM	Tube furnace set to 1000
8/29/2011	8:27:28 PM	Helium valve closed
8/29/2011	8:27:28 PM	BCl3 valve closed
8/29/2011	8:27:28 PM	PH3 valve closed
8/29/2011	8:27:28 PM	SiCl4 pre valve closed
8/29/2011	8:27:28 PM	SiCl4 post valve closed
8/29/2011	8:27:28 PM	Main Vac valve closed
8/29/2011	8:27:28 PM	Bypass valve closed
8/29/2011	8:27:28 PM	H2 valve opened
8/29/2011	8:27:28 PM	Bubbler valve opened
8/29/2011	8:27:28 PM	Helium MFC set to  0.000000
8/29/2011	8:27:28 PM	H2 MFC set to  500.000000
8/29/2011	8:27:28 PM	BCl3 MFC set to  0.000000
8/29/2011	8:27:28 PM	PHl3 MFC set to  0.000000
8/29/2011	8:27:28 PM	SiCl4 MFC set to  0.000000
8/29/2011	8:27:28 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	8:27:29 PM	Tube furnace set to 750
8/29/2011	8:32:29 PM	H2 valve closed
8/29/2011	8:32:29 PM	BCl3 valve closed
8/29/2011	8:32:29 PM	PH3 valve closed
8/29/2011	8:32:29 PM	SiCl4 pre valve closed
8/29/2011	8:32:29 PM	SiCl4 post valve closed
8/29/2011	8:32:29 PM	Main Vac valve closed
8/29/2011	8:32:29 PM	Bypass valve closed
8/29/2011	8:32:29 PM	Helium valve opened
8/29/2011	8:32:29 PM	Bubbler valve opened
8/29/2011	8:32:29 PM	Helium MFC set to  400.000000
8/29/2011	8:32:29 PM	H2 MFC set to  0.000000
8/29/2011	8:32:29 PM	BCl3 MFC set to  0.000000
8/29/2011	8:32:29 PM	PHl3 MFC set to  0.000000
8/29/2011	8:32:29 PM	SiCl4 MFC set to  0.000000
8/29/2011	8:32:29 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	8:32:29 PM	Tube furnace set to 0
8/29/2011	8:52:29 PM	Helium valve closed
8/29/2011	8:52:29 PM	H2 valve closed
8/29/2011	8:52:29 PM	BCl3 valve closed
8/29/2011	8:52:29 PM	PH3 valve closed
8/29/2011	8:52:29 PM	SiCl4 pre valve closed
8/29/2011	8:52:29 PM	SiCl4 post valve closed
8/29/2011	8:52:29 PM	Main Vac valve closed
8/29/2011	8:52:29 PM	Bypass valve closed
8/29/2011	8:52:29 PM	Bubbler valve closed
8/29/2011	8:52:29 PM	Helium MFC set to  0.000000
8/29/2011	8:52:29 PM	H2 MFC set to  0.000000
8/29/2011	8:52:29 PM	BCl3 MFC set to  0.000000
8/29/2011	8:52:29 PM	PHl3 MFC set to  0.000000
8/29/2011	8:52:29 PM	SiCl4 MFC set to  0.000000
8/29/2011	8:52:29 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	8:52:29 PM	Tube furnace set to 0
8/29/2011	9:09:51 PM	Run finished at 9:09 PM
8/29/2011	9:10:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	9:10:06 PM	Recipe started at 9:10 PM
8/29/2011	9:10:06 PM	Helium valve closed
8/29/2011	9:10:06 PM	H2 valve closed
8/29/2011	9:10:06 PM	BCl3 valve closed
8/29/2011	9:10:06 PM	PH3 valve closed
8/29/2011	9:10:06 PM	SiCl4 pre valve closed
8/29/2011	9:10:06 PM	SiCl4 post valve closed
8/29/2011	9:10:06 PM	Main Vac valve closed
8/29/2011	9:10:06 PM	Bypass valve closed
8/29/2011	9:10:06 PM	Bubbler valve closed
8/29/2011	9:10:06 PM	Helium MFC set to  0.000000
8/29/2011	9:10:06 PM	H2 MFC set to  0.000000
8/29/2011	9:10:06 PM	BCl3 MFC set to  0.000000
8/29/2011	9:10:06 PM	PHl3 MFC set to  0.000000
8/29/2011	9:10:06 PM	SiCl4 MFC set to  0.000000
8/29/2011	9:10:06 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:10:06 PM	Tube furnace set to 0
8/29/2011	9:10:09 PM	H2 valve closed
8/29/2011	9:10:09 PM	BCl3 valve closed
8/29/2011	9:10:09 PM	PH3 valve closed
8/29/2011	9:10:09 PM	SiCl4 pre valve closed
8/29/2011	9:10:09 PM	SiCl4 post valve closed
8/29/2011	9:10:09 PM	Main Vac valve closed
8/29/2011	9:10:09 PM	Bypass valve closed
8/29/2011	9:10:09 PM	Bubbler valve closed
8/29/2011	9:10:09 PM	Helium valve opened
8/29/2011	9:10:09 PM	Helium MFC set to  500.000000
8/29/2011	9:10:09 PM	H2 MFC set to  0.000000
8/29/2011	9:10:09 PM	BCl3 MFC set to  0.000000
8/29/2011	9:10:09 PM	PHl3 MFC set to  0.000000
8/29/2011	9:10:09 PM	SiCl4 MFC set to  0.000000
8/29/2011	9:10:09 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:10:09 PM	Tube furnace set to 0
8/29/2011	9:10:10 PM	Helium valve closed
8/29/2011	9:10:10 PM	H2 valve closed
8/29/2011	9:10:10 PM	BCl3 valve closed
8/29/2011	9:10:10 PM	PH3 valve closed
8/29/2011	9:10:10 PM	SiCl4 pre valve closed
8/29/2011	9:10:10 PM	SiCl4 post valve closed
8/29/2011	9:10:10 PM	Main Vac valve closed
8/29/2011	9:10:10 PM	Bypass valve closed
8/29/2011	9:10:10 PM	Bubbler valve closed
8/29/2011	9:10:10 PM	Helium MFC set to  0.000000
8/29/2011	9:10:10 PM	H2 MFC set to  0.000000
8/29/2011	9:10:10 PM	BCl3 MFC set to  0.000000
8/29/2011	9:10:10 PM	PHl3 MFC set to  0.000000
8/29/2011	9:10:10 PM	SiCl4 MFC set to  0.000000
8/29/2011	9:10:10 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:10:10 PM	Tube furnace set to 0
8/29/2011	9:10:11 PM	Run finished at 9:10 PM
8/29/2011	9:10:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	9:23:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	9:23:52 PM	Recipe started at 9:23 PM
8/29/2011	9:23:52 PM	Helium valve closed
8/29/2011	9:23:52 PM	H2 valve closed
8/29/2011	9:23:52 PM	BCl3 valve closed
8/29/2011	9:23:52 PM	PH3 valve closed
8/29/2011	9:23:52 PM	SiCl4 pre valve closed
8/29/2011	9:23:52 PM	SiCl4 post valve closed
8/29/2011	9:23:52 PM	Main Vac valve closed
8/29/2011	9:23:52 PM	Bypass valve closed
8/29/2011	9:23:52 PM	Bubbler valve closed
8/29/2011	9:23:52 PM	Helium MFC set to  0.000000
8/29/2011	9:23:52 PM	H2 MFC set to  0.000000
8/29/2011	9:23:52 PM	BCl3 MFC set to  0.000000
8/29/2011	9:23:52 PM	PHl3 MFC set to  0.000000
8/29/2011	9:23:52 PM	SiCl4 MFC set to  0.000000
8/29/2011	9:23:52 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:23:52 PM	Tube furnace set to 0
8/29/2011	9:23:55 PM	H2 valve closed
8/29/2011	9:23:55 PM	BCl3 valve closed
8/29/2011	9:23:55 PM	PH3 valve closed
8/29/2011	9:23:55 PM	SiCl4 pre valve closed
8/29/2011	9:23:55 PM	SiCl4 post valve closed
8/29/2011	9:23:55 PM	Main Vac valve closed
8/29/2011	9:23:55 PM	Bypass valve closed
8/29/2011	9:23:55 PM	Bubbler valve closed
8/29/2011	9:23:55 PM	Helium valve opened
8/29/2011	9:23:55 PM	Helium MFC set to  500.000000
8/29/2011	9:23:55 PM	H2 MFC set to  0.000000
8/29/2011	9:23:55 PM	BCl3 MFC set to  0.000000
8/29/2011	9:23:55 PM	PHl3 MFC set to  0.000000
8/29/2011	9:23:55 PM	SiCl4 MFC set to  0.000000
8/29/2011	9:23:55 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:23:56 PM	Tube furnace set to 0
8/29/2011	9:24:02 PM	Helium valve closed
8/29/2011	9:24:02 PM	H2 valve closed
8/29/2011	9:24:02 PM	BCl3 valve closed
8/29/2011	9:24:02 PM	PH3 valve closed
8/29/2011	9:24:02 PM	SiCl4 pre valve closed
8/29/2011	9:24:02 PM	SiCl4 post valve closed
8/29/2011	9:24:02 PM	Main Vac valve closed
8/29/2011	9:24:02 PM	Bypass valve closed
8/29/2011	9:24:02 PM	Bubbler valve closed
8/29/2011	9:24:02 PM	Helium MFC set to  0.000000
8/29/2011	9:24:02 PM	H2 MFC set to  0.000000
8/29/2011	9:24:02 PM	BCl3 MFC set to  0.000000
8/29/2011	9:24:02 PM	PHl3 MFC set to  0.000000
8/29/2011	9:24:02 PM	SiCl4 MFC set to  0.000000
8/29/2011	9:24:02 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:24:02 PM	Tube furnace set to 0
8/29/2011	9:24:03 PM	Run finished at 9:24 PM
8/29/2011	9:24:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	9:43:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	9:43:14 PM	Recipe started at 9:43 PM
8/29/2011	9:43:14 PM	Helium valve closed
8/29/2011	9:43:14 PM	H2 valve closed
8/29/2011	9:43:14 PM	BCl3 valve closed
8/29/2011	9:43:14 PM	PH3 valve closed
8/29/2011	9:43:14 PM	SiCl4 pre valve closed
8/29/2011	9:43:14 PM	SiCl4 post valve closed
8/29/2011	9:43:14 PM	Main Vac valve closed
8/29/2011	9:43:14 PM	Bypass valve closed
8/29/2011	9:43:14 PM	Bubbler valve closed
8/29/2011	9:43:14 PM	Helium MFC set to  0.000000
8/29/2011	9:43:14 PM	H2 MFC set to  0.000000
8/29/2011	9:43:14 PM	BCl3 MFC set to  0.000000
8/29/2011	9:43:14 PM	PHl3 MFC set to  0.000000
8/29/2011	9:43:14 PM	SiCl4 MFC set to  0.000000
8/29/2011	9:43:14 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:43:14 PM	Tube furnace set to 0
8/29/2011	9:43:17 PM	H2 valve closed
8/29/2011	9:43:17 PM	BCl3 valve closed
8/29/2011	9:43:17 PM	PH3 valve closed
8/29/2011	9:43:17 PM	SiCl4 pre valve closed
8/29/2011	9:43:17 PM	SiCl4 post valve closed
8/29/2011	9:43:17 PM	Main Vac valve closed
8/29/2011	9:43:17 PM	Bypass valve closed
8/29/2011	9:43:17 PM	Bubbler valve closed
8/29/2011	9:43:17 PM	Helium valve opened
8/29/2011	9:43:17 PM	Helium MFC set to  500.000000
8/29/2011	9:43:17 PM	H2 MFC set to  0.000000
8/29/2011	9:43:17 PM	BCl3 MFC set to  0.000000
8/29/2011	9:43:17 PM	PHl3 MFC set to  0.000000
8/29/2011	9:43:17 PM	SiCl4 MFC set to  0.000000
8/29/2011	9:43:17 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:43:17 PM	Tube furnace set to 0
8/29/2011	9:43:18 PM	Helium valve closed
8/29/2011	9:43:18 PM	H2 valve closed
8/29/2011	9:43:18 PM	BCl3 valve closed
8/29/2011	9:43:18 PM	PH3 valve closed
8/29/2011	9:43:18 PM	SiCl4 pre valve closed
8/29/2011	9:43:18 PM	SiCl4 post valve closed
8/29/2011	9:43:18 PM	Main Vac valve closed
8/29/2011	9:43:18 PM	Bypass valve closed
8/29/2011	9:43:18 PM	Bubbler valve closed
8/29/2011	9:43:18 PM	Helium MFC set to  0.000000
8/29/2011	9:43:18 PM	H2 MFC set to  0.000000
8/29/2011	9:43:18 PM	BCl3 MFC set to  0.000000
8/29/2011	9:43:18 PM	PHl3 MFC set to  0.000000
8/29/2011	9:43:18 PM	SiCl4 MFC set to  0.000000
8/29/2011	9:43:18 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:43:19 PM	Tube furnace set to 0
8/29/2011	9:43:20 PM	Run finished at 9:43 PM
8/29/2011	9:43:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/29/2011	9:45:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/29/2011	9:45:51 PM	Recipe started at 9:45 PM
8/29/2011	9:45:51 PM	Helium valve closed
8/29/2011	9:45:51 PM	H2 valve closed
8/29/2011	9:45:51 PM	BCl3 valve closed
8/29/2011	9:45:51 PM	PH3 valve closed
8/29/2011	9:45:51 PM	SiCl4 pre valve closed
8/29/2011	9:45:51 PM	SiCl4 post valve closed
8/29/2011	9:45:51 PM	Main Vac valve closed
8/29/2011	9:45:51 PM	Bubbler valve closed
8/29/2011	9:45:51 PM	Bypass valve opened
8/29/2011	9:45:51 PM	Helium MFC set to  0.000000
8/29/2011	9:45:51 PM	H2 MFC set to  0.000000
8/29/2011	9:45:51 PM	BCl3 MFC set to  0.000000
8/29/2011	9:45:51 PM	PHl3 MFC set to  0.000000
8/29/2011	9:45:51 PM	SiCl4 MFC set to  0.000000
8/29/2011	9:45:51 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:45:51 PM	Tube furnace set to 0
8/29/2011	9:46:54 PM	Helium valve closed
8/29/2011	9:46:54 PM	H2 valve closed
8/29/2011	9:46:54 PM	BCl3 valve closed
8/29/2011	9:46:54 PM	PH3 valve closed
8/29/2011	9:46:54 PM	SiCl4 pre valve closed
8/29/2011	9:46:54 PM	SiCl4 post valve closed
8/29/2011	9:46:54 PM	Main Vac valve closed
8/29/2011	9:46:54 PM	Bubbler valve closed
8/29/2011	9:46:54 PM	Bypass valve opened
8/29/2011	9:46:54 PM	Helium MFC set to  0.000000
8/29/2011	9:46:54 PM	H2 MFC set to  0.000000
8/29/2011	9:46:54 PM	BCl3 MFC set to  0.000000
8/29/2011	9:46:54 PM	PHl3 MFC set to  0.000000
8/29/2011	9:46:54 PM	SiCl4 MFC set to  0.000000
8/29/2011	9:46:54 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:46:55 PM	Tube furnace set to 0
8/29/2011	9:47:55 PM	Helium valve closed
8/29/2011	9:47:55 PM	H2 valve closed
8/29/2011	9:47:55 PM	BCl3 valve closed
8/29/2011	9:47:55 PM	PH3 valve closed
8/29/2011	9:47:55 PM	SiCl4 pre valve closed
8/29/2011	9:47:55 PM	SiCl4 post valve closed
8/29/2011	9:47:55 PM	Bypass valve closed
8/29/2011	9:47:55 PM	Bubbler valve closed
8/29/2011	9:47:55 PM	Main Vac valve opened
8/29/2011	9:47:55 PM	Helium MFC set to  0.000000
8/29/2011	9:47:55 PM	H2 MFC set to  0.000000
8/29/2011	9:47:55 PM	BCl3 MFC set to  0.000000
8/29/2011	9:47:55 PM	PHl3 MFC set to  0.000000
8/29/2011	9:47:55 PM	SiCl4 MFC set to  0.000000
8/29/2011	9:47:55 PM	Bypass solenoid MFC set to  0.000000
8/29/2011	9:47:55 PM	Tube furnace set to 0
8/29/2011	9:47:56 PM	Run finished at 9:47 PM
8/29/2011	9:47:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
